Kuyika kwa nthunzi wa mankhwala(CVD)ndi ukadaulo womwe umagwiritsidwa ntchito kwambiri pamakampani opanga zida zopangira zida zamagetsi poyika zinthu zosiyanasiyana, kuphatikiza zida zambiri zotsekera, zida zambiri zachitsulo ndi zida zachitsulo.
CVD ndiukadaulo wokonzekera mafilimu opyapyala. Mfundo yake ndikugwiritsa ntchito ma precursors a gaseous kuti awole zigawo zina mu kalambulabwalo kudzera pamachitidwe amankhwala pakati pa ma atomu ndi mamolekyu, kenako kupanga filimu yopyapyala pagawo lapansi. Makhalidwe abwino a CVD ndi awa: kusintha kwa mankhwala (mankhwala opangira mankhwala kapena kuwonongeka kwa kutentha); zida zonse mufilimuyi zimachokera kunja; reactants ayenera nawo anachita mu mawonekedwe a mpweya gawo.
Low pressure chemical vapor deposition (LPCVD), plasma enhanced chemical vapor deposition (PECVD) ndi high density plasma chemical vapor deposition (HDP-CVD) ndi matekinoloje atatu odziwika bwino a CVD, omwe ali ndi kusiyana kwakukulu pakuyika zinthu, zofunikira za zida, mikhalidwe yamachitidwe, ndi zina zambiri. Zotsatirazi ndi kufotokozera kosavuta komanso kuyerekezera kwa matekinoloje atatuwa.
1. LPCVD (Low Pressure CVD)
Mfundo Yofunika: Njira ya CVD pansi pa zovuta zochepa. Mfundo yake ndi jekeseni anachita mpweya mu chipinda anachita pansi zingalowe kapena otsika mavuto chilengedwe, kuwola kapena kuchitapo kanthu mpweya ndi kutentha, ndi kupanga olimba filimu waikamo pa gawo lapansi. Popeza kupanikizika kochepa kumachepetsa kugunda kwa gasi ndi chipwirikiti, kufanana ndi khalidwe la filimuyo limapangidwa bwino. LPCVD imagwiritsidwa ntchito kwambiri mu silicon dioxide (LTO TEOS), silicon nitride (Si3N4), polysilicon (POLY), galasi la phosphosilicate (BSG), galasi la borophosphosilicate (BPSG), doped polysilicon, graphene, carbon nanotubes ndi mafilimu ena.
Mawonekedwe:
▪ Kutentha kwa ndondomeko: kawirikawiri pakati pa 500 ~ 900 ° C, kutentha kwa ndondomeko kumakhala kokwera kwambiri;
▪ Kuthamanga kwa gasi: chilengedwe chochepa cha 0.1 ~ 10 Torr;
▪ Kanema wamakanema: wapamwamba kwambiri, wofanana bwino, kachulukidwe kabwino, ndi zolakwika zochepa;
▪ Mlingo wa kuyika: kutsika pang'onopang'ono;
▪ Kufanana: koyenera magawo akulu akulu, kuyika yunifolomu;
Ubwino ndi kuipa:
▪ Amatha kusungitsa mafilimu ofananirako komanso azindine;
▪ Imagwira ntchito bwino pamagawo akulu akulu, oyenera kupangidwa mochuluka;
▪ Mtengo wotsika;
▪ Kutentha kwakukulu, kosayenera kwa zipangizo zoteteza kutentha;
▪ Kuchuluka kwa malo kumachedwa ndipo kutulutsa kwake kumakhala kochepa.
2. PECVD (Plasma Enhanced CVD)
Mfundo yofunikira: Gwiritsani ntchito madzi a m'magazi kuti muyambitse zochitika za gasi pa kutentha kochepa, ionize ndi kuwola mamolekyu mu gasi yomwe imayendera, kenako ndikuyika mafilimu opyapyala pamwamba pa gawo lapansi. Mphamvu ya plasma imatha kuchepetsa kwambiri kutentha kofunikira kuti ichitike, ndipo imakhala ndi ntchito zambiri. Mafilimu osiyanasiyana achitsulo, mafilimu opangidwa ndi organic ndi mafilimu achilengedwe akhoza kukonzedwa.
Mawonekedwe:
▪ Kutentha kwa ndondomeko: kawirikawiri pakati pa 200 ~ 400 ° C, kutentha kumakhala kochepa;
▪ Kuthamanga kwa gasi: nthawi zambiri mazana a mTorr mpaka ma Torr angapo;
▪ Ubwino wa filimu: ngakhale kuti filimuyo imafanana bwino, makulidwe ake ndi khalidwe lake silifanana ndi LPCVD chifukwa cha zolakwika zimene plasma imayamba;
▪ Mlingo wa malo: kuchuluka kwambiri, kupanga kwachangu;
▪ Kufanana: kutsika pang'ono ku LPCVD pazigawo zazikuluzikulu;
Ubwino ndi kuipa:
▪ Makanema owonda amatha kuikidwa pamalo otsika kwambiri, oyenera kutengera zinthu zomwe sizimva kutentha;
▪ Kuthamanga kwachangu, koyenera kupanga bwino;
▪ Njira yosinthika, mawonekedwe a filimu amatha kuwongoleredwa mwa kusintha magawo a plasma;
▪ Madzi a m'magazi amatha kuyambitsa zolakwika zamakanema monga ma pinholes kapena kusafanana;
▪ Poyerekeza ndi LPCVD, kachulukidwe ka filimuyo ndi khalidwe lake n’zoipa pang’ono.
3. HDP-CVD (High Density Plasma CVD)
Mfundo: Ukadaulo wapadera wa PECVD. HDP-CVD (yomwe imadziwikanso kuti ICP-CVD) imatha kutulutsa kachulukidwe kakang'ono ka plasma ndi mtundu wake kuposa zida zachikhalidwe za PECVD pamatenthedwe otsika. Kuphatikiza apo, HDP-CVD imapereka pafupifupi odziyimira pawokha ma ion flux ndi kuwongolera mphamvu, kuwongolera ngalande kapena kudzaza dzenje pakuyika kwamakanema, monga zokutira zotsutsana ndi reflective, kuyika kwazinthu zotsika kwa dielectric, ndi zina zambiri.
Mawonekedwe:
▪ Njira kutentha: chipinda kutentha kwa 300 ℃, ndondomeko kutentha ndi otsika kwambiri;
▪ Kuthamanga kwa gasi: pakati pa 1 ndi 100 mTorr, kutsika kuposa PECVD;
▪ Kanema wa filimu: kuchulukirachulukira kwa madzi a m’magazi a m’magazi, filimu yapamwamba kwambiri, kufanana kwabwino;
▪ Mlingo wa malo: mlingo wa malo uli pakati pa LPCVD ndi PECVD, wokwera pang'ono kuposa LPCVD;
▪ Kufanana: chifukwa cha madzi a m'magazi ochuluka kwambiri, kufanana kwa filimu n'kwabwino kwambiri, koyenera pagawo la gawo laling'ono losaoneka bwino;
Ubwino ndi kuipa:
▪ Wotha kuyika mafilimu apamwamba kwambiri pamalo otsika kwambiri, oyenera kwambiri kuzinthu zosagwirizana ndi kutentha;
▪ Kufanana kwafilimu kopambana, kachulukidwe ndi kusalala kwa pamwamba;
▪ Kuchulukirachulukira kwa madzi a m'magazi a m'magazi kumapangitsa kuti kaonekedwe kake kakhale kofanana ndi kaonekedwe ka filimu;
▪ Zida zovuta komanso zokwera mtengo;
▪ Liwiro la kuikidwa m'magazi limakhala lapang'onopang'ono, ndipo mphamvu zambiri za plasma zimatha kuwononga pang'ono.
Landirani makasitomala aliwonse ochokera padziko lonse lapansi kuti atichezere kuti tidzakambiranenso!
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Nthawi yotumiza: Dec-03-2024