Kodi ma epitaxial layers amathandiza bwanji zida za semiconductor?

Chiyambi cha dzina la epitaxial wafer

Choyamba, tiyeni tifalitse lingaliro laling'ono: kukonzekera kwawafa kumaphatikizapo maulalo akuluakulu awiri: kukonzekera kwa gawo lapansi ndi njira ya epitaxial. Gawo lapansi ndi chowotcha chopangidwa ndi semiconductor single crystal material. Gawo laling'ono limatha kulowa mwachindunji munjira yopanga zowotcha kuti zipange zida za semiconductor, kapena zitha kukonzedwa ndi njira za epitaxial kuti apange ma epitaxial wafers. Epitaxy imatanthawuza njira ya kukula kwa kristalo watsopano pa gawo limodzi la kristalo lomwe lakonzedwa mosamala ndi kudula, kugaya, kupukuta, ndi zina zotero. zinthu zosiyanasiyana (homogeneous) epitaxy kapena heteroepitaxy). Chifukwa mtundu watsopano wa kristalo umakulirakulira ndikukula molingana ndi gawo la kristalo la gawo lapansi, amatchedwa epitaxial layer (kukhuthala kwake nthawi zambiri kumakhala ma microns ochepa, kutenga silicon monga chitsanzo: tanthauzo la kukula kwa silicon epitaxial lili pa silicon imodzi. Gawo la kristalo lokhala ndi mawonekedwe ena a kristalo Wosanjikiza wa kristalo wokhala ndi umphumphu wabwino wa lattice komanso kusinthika kosiyana ndi makulidwe omwe ali ndi mawonekedwe a kristalo momwe gawo lapansi limakulirakulira. gawo lapansi lokhala ndi gawo la epitaxial limatchedwa epitaxial wafer (epitaxial wafer = epitaxial layer + substrate). Pamene chipangizocho chimapangidwa pa epitaxial layer, imatchedwa positive epitaxy. Ngati chipangizocho chapangidwa pa gawo lapansi, chimatchedwa reverse epitaxy. Panthawiyi, epitaxial layer imangogwira ntchito yothandizira.

Mphika wopukutidwa

Njira za kukula kwa Epitaxial

Molecular beam epitaxy (MBE): Ndi teknoloji ya kukula kwa semiconductor epitaxial yomwe imachitidwa pansi pa ultra-high vacuum mikhalidwe. Mwanjira iyi, zinthu zoyambira zimasinthidwa kukhala ngati mtengo wa ma atomu kapena mamolekyu kenako ndikuyikidwa pagawo la crystalline. MBE ndi ukadaulo wolondola kwambiri komanso wosinthika wa semiconductor woonda wa kukula kwa filimu yomwe imatha kuwongolera ndendende makulidwe azinthu zoyikidwa pamlingo wa atomiki.
Metal organic CVD (MOCVD): Mu njira ya MOCVD, organic metal ndi hydride gas N mpweya wokhala ndi zinthu zofunika amaperekedwa ku gawo lapansi pa kutentha koyenera, amakumana ndi mankhwala kuti apange semiconductor yofunika, ndipo amayikidwa pa gawo lapansi. pa, pamene otsala mankhwala ndi zochita mankhwala amatulutsidwa.
Vapor phase epitaxy (VPE): Vapor phase epitaxy ndi ukadaulo wofunikira womwe umagwiritsidwa ntchito popanga zida za semiconductor. Mfundo yayikulu ndikunyamula mpweya wa zinthu zoyambira kapena zophatikizika mu gasi wonyamula, ndikuyika makhiristo pagawo laling'ono kudzera pamachitidwe amankhwala.

Ndi mavuto otani omwe ndondomeko ya epitaxy imathetsa?

Zida zambiri za kristalo zokha sizingakwaniritse zosowa zomwe zikukula popanga zida zosiyanasiyana za semiconductor. Chifukwa chake, kukula kwa epitaxial, ukadaulo wocheperako wosanjikiza umodzi wa kristalo, udapangidwa kumapeto kwa 1959. Ndiye ndi chithandizo chotani chomwe ukadaulo wa epitaxy uli nawo pakupititsa patsogolo zinthu?

Kwa silicon, pamene teknoloji ya kukula kwa silicon epitaxial inayamba, inali nthawi yovuta kwambiri kupanga ma transistors a silicon high-frequency ndi high-power. Kuchokera pamalingaliro a mfundo za transistor, kuti mupeze ma frequency apamwamba komanso mphamvu yayikulu, voteji yakuwonongeka kwa malo otolera iyenera kukhala yayikulu ndipo kukana kwa mndandanda kuyenera kukhala kochepa, ndiko kuti, kutsika kwamagetsi kuyenera kukhala kochepa. Zakale zimafuna kuti resistivity ya zinthu mu malo osonkhanitsira ikhale yokwera, pamene yotsirizirayi imafuna kuti resistivity ya zinthu mu malo osonkhanitsira ikhale yotsika. Zigawo ziwirizi zimatsutsana. Ngati makulidwe azinthu m'dera la osonkhanitsa achepetsedwa kuti achepetse kukana kwa mndandanda, chowotcha cha silicon chidzakhala choonda kwambiri komanso chosalimba kuti chisinthidwe. Ngati resistivity ya zinthu yachepetsedwa, izo zikutsutsana ndi chofunika choyamba. Komabe, chitukuko cha luso la epitaxial chakhala chikuyenda bwino. anathetsa vutoli.

Yankho: Kulitsani epitaxial wosanjikiza kwambiri pagawo lotsika kwambiri, ndipo pangani chipangizocho pa epitaxial layer. Epitaxial wosanjikiza wapamwamba kwambiriyu amatsimikizira kuti chubu imakhala ndi mphamvu yowonongeka kwambiri, pamene gawo lapansi lopanda mphamvu limachepetsanso kukana kwa gawo lapansi, potero kuchepetsa kutsika kwa magetsi, potero kuthetsa kutsutsana pakati pa ziwirizi.

Kuphatikiza apo, matekinoloje a epitaxy monga epitaxy gawo la nthunzi ndi epitaxy yamadzimadzi a GaAs ndi ma III-V, II-VI ndi zida zina zama cell a semiconductor zidapangidwanso kwambiri ndipo zakhala maziko a zida zambiri zama microwave, zida za optoelectronic, mphamvu. Ndi ukadaulo wofunikira kwambiri pakupangira zida, makamaka kugwiritsa ntchito bwino kwamitengo yama cell ndi chitsulo cha organic nthunzi gawo la epitaxy mu zigawo woonda, superlattices, zitsime za quantum, superlattice zosefukira, ndi epitaxy yocheperako ya atomiki, yomwe ndi sitepe yatsopano mu kafukufuku wa semiconductor. Kukula kwa "magetsi lamba lamagetsi" m'munda kwakhazikitsa maziko olimba.

M'magwiritsidwe ntchito, zida zazikulu za bandgap semiconductor pafupifupi nthawi zonse zimapangidwa pamtundu wa epitaxial, ndipo chowotcha cha silicon carbide chokha chimangogwira ntchito ngati gawo lapansi. Chifukwa chake, kuwongolera kwa epitaxial wosanjikiza ndi gawo lofunikira pamakampani opanga ma semiconductor a bandgap.

Maluso 7 akuluakulu muukadaulo wa epitaxy

1. Magawo apamwamba (otsika) otsutsa epitaxial akhoza kukula epitaxially pazigawo zochepa (zapamwamba) zotsutsa.
2. Mtundu wa N (P) wa epitaxial wosanjikiza ukhoza kukula epitaxially pa gawo la P (N) la mtundu wa P (N) kuti apange mgwirizano wa PN mwachindunji. Palibe vuto la chipukuta misozi mukamagwiritsa ntchito njira yophatikizira kupanga gulu la PN pagawo limodzi la kristalo.
3. Kuphatikizana ndi teknoloji ya chigoba, kukula kwa epitaxial kosankha kumachitidwa m'madera osankhidwa, kupanga zinthu zopangira maulendo ophatikizika ndi zipangizo zomwe zimakhala ndi mapangidwe apadera.
4. Mtundu ndi ndondomeko ya doping ikhoza kusinthidwa malinga ndi zosowa panthawi ya kukula kwa epitaxial. Kusintha kwa ndende kungakhale kusintha kwadzidzidzi kapena kusintha pang'onopang'ono.
5. Ikhoza kukula mosiyanasiyana, mitundu yambiri, yamagulu ambiri ndi zigawo zowonda kwambiri zomwe zimakhala ndi zigawo zosiyana.
6. Kukula kwa Epitaxial kungathe kuchitidwa pa kutentha kochepa kusiyana ndi kusungunuka kwa zinthuzo, kukula kwake kumayendetsedwa, ndipo kukula kwa epitaxial kwa makulidwe a atomiki kungatheke.
7. Ikhoza kukula zipangizo za kristalo zomwe sizingakokedwe, monga GaN, zigawo za kristalo imodzi ya mankhwala apamwamba ndi a quaternary, etc.