Nthawi zambiri ntchito pedestals kwa nthunzi gawo epitaxy

Panthawi ya vapor phase epitaxy (VPE), udindo wa pedestal ndikuthandizira gawo lapansi ndikuwonetsetsa kutentha kofanana pakukula. Mitundu yosiyanasiyana ya pedestals ndi yoyenera kukula kwa zinthu ndi machitidwe azinthu. Zotsatirazi ndi zina mwa mitundu yoyambira yomwe imagwiritsidwa ntchito kwambiri mu gawo la nthunziepitaxy:

Chopondapo mbiya

Mipiringidzo ya migolo imagwiritsidwa ntchito kwambiri pamakina opingasa kapena opendekeka a vapor phase epitaxy. Amatha kugwira gawo lapansi ndikulola kuti mpweya uziyenda pamwamba pa gawo lapansi, zomwe zimathandiza kukwaniritsa kukula kwa epitaxial.

Chopondapo chooneka ngati diski (chopondapo)

Zikhazikiko zooneka ngati diski ndizoyenera kachitidwe ka epitaxy gawo la nthunzi, momwe gawo lapansi limayikidwa molunjika. Kapangidwe kameneka kamathandizira kuchepetsa malo olumikizana pakati pa gawo lapansi ndi chopondera, potero kuchepetsa kutaya kwa kutentha komanso kuipitsidwa komwe kungachitike.

Yopingasa susceptor

Ma susceptors opingasa sapezeka kawirikawiri mu gawo la nthunzi epitaxy, koma angagwiritsidwe ntchito m'makina ena apadera kuti alole kukula kwa epitaxial molunjika.

Monolithic epitaxial reaction susceptor

The monolithic epitaxial reaction susceptor idapangidwira gawo limodzi, lomwe limatha kupereka kuwongolera kolondola kwa kutentha komanso kudzipatula kwabwinoko, koyenera kukula kwa zigawo zapamwamba za epitaxial.

Takulandirani kutsamba lathu kuti mudziwe zambiri zamalonda ndi kukambirana.

Tsamba lathu: https://www.vet-china.com/