BCD ndondomeko

Kodi BCD process ndi chiyani?

BCD ndondomeko ndi imodzi-chip Integrated ndondomeko teknoloji inayamba kuyambitsidwa ndi ST mu 1986. Njirayi imatha kupanga zipangizo za bipolar, CMOS ndi DMOS pa chip chomwecho. Maonekedwe ake amachepetsa kwambiri dera la chip.

Zinganenedwe kuti njira ya BCD imagwiritsa ntchito bwino ubwino woyendetsa galimoto ya Bipolar, kusakanikirana kwakukulu kwa CMOS ndi kugwiritsa ntchito mphamvu zochepa, ndi mphamvu yamagetsi ya DMOS komanso mphamvu yothamanga kwambiri. Pakati pawo, DMOS ndiye chinsinsi chothandizira mphamvu ndi kuphatikiza. Ndi chitukuko chowonjezereka cha ukadaulo wophatikizika wozungulira, njira ya BCD yakhala ukadaulo wopanga kwambiri wa PMIC.

BCD ndondomeko cross-Sectional chithunzi, gwero network, zikomo

Ubwino wa BCD process

Njira ya BCD imapanga zida za Bipolar, zida za CMOS, ndi zida zamagetsi za DMOS pa chip chomwecho nthawi yomweyo, kuphatikiza kusinthasintha kwakukulu komanso kuthekera koyendetsa bwino kwa zida za bipolar komanso kuphatikiza kwakukulu komanso kugwiritsa ntchito mphamvu zochepa kwa CMOS, kuti athe kuthandizira. wina ndi mzake ndi kusewera mokwanira pa ubwino wawo; nthawi yomweyo, DMOS imatha kugwira ntchito posinthira ndikugwiritsa ntchito mphamvu zochepa kwambiri. Mwachidule, kugwiritsa ntchito mphamvu zochepa, mphamvu zogwiritsira ntchito mphamvu komanso kuphatikiza kwakukulu ndi chimodzi mwa ubwino waukulu wa BCD. Njira ya BCD imatha kuchepetsa kugwiritsa ntchito mphamvu kwambiri, kukonza magwiridwe antchito komanso kudalirika bwino. Ntchito zamagetsi zamagetsi zikuwonjezeka tsiku ndi tsiku, ndipo zofunikira pakusintha kwamagetsi, chitetezo cha capacitor ndi kukulitsa moyo wa batri zikukhala zofunika kwambiri. Makhalidwe othamanga kwambiri komanso opulumutsa mphamvu a BCD amakwaniritsa zofunikira pakupanga tchipisi ta analogi/mphamvu zoyendetsera mphamvu.

Matekinoloje ofunikira a BCD process

Zipangizo zamakono za ndondomeko ya BCD zimaphatikizapo CMOS yotsika kwambiri, machubu a MOS othamanga kwambiri, LDMOS yokhala ndi ma voltages osiyanasiyana osweka, vertical NPN/PNP ndi Schottky diode, etc. Njira zina zimaphatikizanso zida monga JFET ndi EEPROM, zomwe zimapangitsa kuti pakhale mitundu yambiri yamagetsi. zipangizo mu BCD ndondomeko. Choncho, kuwonjezera pa kulingalira za kugwirizana kwa zipangizo zamakono ndi zipangizo zotsika kwambiri, njira zodulira kawiri ndi njira za CMOS, etc.

Muukadaulo wodzipatula wa BCD, matekinoloje ambiri monga kudzipatula kwapagawo, kudzipatula komanso kudzipatula kwa dielectric zatulukira. Ukadaulo wodzipatula wa Junction ndikupangitsa chipangizocho pamtundu wa N-epitaxial wosanjikiza wa gawo lapansi la P-mtundu ndikugwiritsa ntchito mawonekedwe am'mbuyo a PN mphambano kuti akwaniritse kudzipatula, chifukwa mphambano ya PN imakhala ndi kukana kwakukulu pansi pazankho losiya.

Ukadaulo wodzipatula ndiwodzipatula wa PN junction, womwe umadalira mawonekedwe achilengedwe a PN apakati pakati pa gwero ndi kukhetsa zigawo za chipangizocho ndi gawo lapansi kuti akwaniritse kudzipatula. Pamene chubu cha MOS chiyatsidwa, chigawo cha gwero, dera lakuda ndi njira zimazunguliridwa ndi dera lakutha, kupanga kudzipatula ku gawo lapansi. Ikazimitsidwa, mphambano ya PN pakati pa dera la kukhetsa ndi gawo laling'ono ndilokondera, ndipo mphamvu yaikulu ya dera la gwero imasiyanitsidwa ndi dera lochepa.

Dielectric isolation imagwiritsa ntchito zotchingira zotchingira ngati silicon oxide kuti zitheke kudzipatula. Kutengera kudzipatula kwa dielectric ndi kupatukana kwapagulu, kudzipatula kwa quasi-dielectric kwapangidwa pophatikiza zabwino zonse ziwiri. Mwa kusankha kutengera ukadaulo wodzipatula womwe uli pamwambapa, kuyanjana kwamphamvu kwambiri komanso kutsika kwamagetsi kumatha kukwaniritsidwa.

Njira yachitukuko cha BCD process

Kukula kwaukadaulo waukadaulo wa BCD sikuli ngati njira yokhazikika ya CMOS, yomwe yakhala ikutsatira lamulo la Moore kuti litukuke molunjika m'lifupi mwake komanso kuthamanga mwachangu. Njira ya BCD imasiyanitsidwa pang'ono ndikupangidwa mbali zitatu: voteji yayikulu, mphamvu yayikulu, komanso kachulukidwe kwambiri.

1. Mayendedwe apamwamba kwambiri a BCD

High-voltage BCD imatha kupanga mabwalo odalirika otsika kwambiri komanso ma frequency apamwamba kwambiri a DMOS pa chipangizo chimodzi panthawi imodzimodzi, ndipo amatha kuzindikira kupanga zida za 500-700V zamphamvu kwambiri. Komabe, nthawi zambiri, BCD ikadali yoyenera pazinthu zomwe zili ndi zofunikira kwambiri pazida zamagetsi, makamaka BJT kapena zida zamakono za DMOS, ndipo zitha kugwiritsidwa ntchito pakuwongolera magetsi pakuwunikira zamagetsi ndi ntchito zamafakitale.

Ukadaulo wapano wopangira ma BCD okwera kwambiri ndiukadaulo wa RESURF wopangidwa ndi Appel et al. mu 1979. chipangizo anapangidwa ntchito mopepuka doped wosanjikiza epitaxial kuti padziko magetsi munda kugawa mosabisa, potero kuwongolera pamwamba kusweka makhalidwe, kotero kuti kuwonongeka kumachitika mu thupi m'malo pamwamba, potero kuwonjezera chipangizo kusweka voteji. Doping yopepuka ndi njira ina yowonjezerera voteji ya BCD. Imagwiritsa ntchito DDD yosakanikirana kawiri (double Doping Drain) ndi kukhetsa pang'ono kwa LDD (Doping Drain pang'ono). M'dera la DMOS drainage, dera lamtundu wa N-drift limawonjezedwa kuti lisinthe kulumikizana koyambirira pakati pa kukhetsa kwa N+ ndi gawo la P-mtundu kuti lilumikizane pakati pa N-drain ndi gawo la P-mtundu, potero kumawonjezera mphamvu yamagetsi.

2. Kuwongolera kwamphamvu kwambiri kwa BCD

Ma voliyumu osiyanasiyana amphamvu kwambiri a BCD ndi 40-90V, ndipo amagwiritsidwa ntchito kwambiri pamagetsi amagalimoto omwe amafunikira kuyendetsa bwino kwambiri, voteji yapakatikati komanso mabwalo osavuta owongolera. Makhalidwe ake ofunikira ndi okwera kwambiri pakali pano, voteji yapakati, ndipo dera lowongolera nthawi zambiri limakhala losavuta.

3. Kuwongolera kwapamwamba kwambiri kwa BCD

BCD yokwera kwambiri, mtundu wamagetsi ndi 5-50V, ndipo zida zamagetsi zamagalimoto zimafika 70V. Ntchito zowonjezereka komanso zosiyanasiyana zimatha kuphatikizidwa pa chip chomwecho. BCD yochuluka kwambiri imatenga malingaliro opangira ma modular kuti akwaniritse kusiyanasiyana kwazinthu, zomwe zimagwiritsidwa ntchito kwambiri pamagetsi amagalimoto.

Ntchito zazikulu za BCD process

Njira ya BCD imagwiritsidwa ntchito kwambiri poyang'anira mphamvu (mphamvu ndi mphamvu ya batri), kuyendetsa galimoto, magetsi oyendetsa galimoto, kulamulira mafakitale, etc. Power management chip (PMIC) ndi imodzi mwa mitundu yofunikira ya tchipisi ta analogi. Kuphatikiza kwa njira ya BCD ndi ukadaulo wa SOI ndi gawo lalikulu pakukula kwa njira ya BCD.

VET-China imatha kupereka zida za graphite, zomverera zofewa, zida za silicon carbide, zida za cvD silicon carbide, ndi zida zokutira za sic/Tac m'masiku 30.
Ngati muli ndi chidwi ndi zinthu zomwe zili pamwambazi, chonde musazengereze kulumikizana nafe koyamba.

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