Kugwiritsa ntchito zoumba za silicon carbide m'munda wa semiconductor

Zinthu zokondedwa za magawo olondola a makina a photolithography

M'munda wa semiconductor,silicon carbide ceramiczipangizo makamaka ntchito zida kiyi kwa Integrated dera kupanga, monga silicon carbide worktable, njanji kalozera,zowunikira, mchere wa ceramic, mikono, mphero zimbale, fixtures, etc. kwa lithography makina.

Zigawo za silicon carbide ceramickwa zida za semiconductor ndi kuwala

● Silicon carbide ceramic grinding disc. Ngati chimbale chogaya chimapangidwa ndi chitsulo choponyedwa kapena chitsulo cha carbon, moyo wake wautumiki ndi waufupi ndipo coefficient yake yowonjezera kutentha ndi yaikulu. Pakukonza zowotcha za silicon, makamaka pogaya kapena kupukuta kothamanga kwambiri, kusinthika ndi kutenthedwa kwa ma disc a grinding kumapangitsa kuti zikhale zovuta kutsimikizira kusalala ndi kufanana kwa chotupa cha silicon. Disiki yogaya yopangidwa ndi silicon carbide ceramics imakhala yolimba kwambiri komanso yocheperako, ndipo mphamvu yowonjezera kutentha imakhala yofanana ndi ya zowotcha za silicon, kotero imatha kugwedezeka ndikupukutidwa mwachangu.
● Silicon carbide ceramic fixture. Kuphatikiza apo, zowotcha za silicon zikapangidwa, zimafunika kuthandizidwa ndi kutentha kwambiri ndipo nthawi zambiri zimatengedwa pogwiritsa ntchito zida za silicon carbide. Ndizosatentha komanso zosawononga. Mpweya wofanana ndi diamondi (DLC) ndi zokutira zina zitha kuyikidwa pamwamba kuti ziwongolere magwiridwe antchito, kuchepetsa kuwonongeka kwa zopindika, ndikuletsa kufalikira.
● Silicon carbide worktable. Kutenga worktable mu makina lithography monga chitsanzo, worktable ndi makamaka udindo kumaliza kukhudzana kayendedwe, amafuna mkulu-liwiro, lalikulu sitiroko, sikisi digiri-of-ufulu nano-level kopitilira muyeso-kulondola kwambiri kayendedwe. Mwachitsanzo, kwa makina a lithography omwe ali ndi 100nm, kulondola kwa 33nm, ndi mzere wa 10nm m'lifupi, kulondola kwa malo ogwirira ntchito kumafunika kuti afike 10nm, chigoba-silicon chopindika nthawi imodzi ndikuthamanga ndi 150nm / s. ndi 120nm / s motero, ndi liwiro chigoba kupanga sikani ili pafupi 500nm/s, ndi worktable chofunika kwambiri zoyenda molondola ndi bata.

Chithunzi chojambula cha tebulo la worktable ndi micro-motion table (gawo lina)

● Silicon carbide ceramic square mirror. Zofunikira pazida zazikulu zophatikizika zamagawo monga makina a lithography zimakhala ndi mawonekedwe ovuta, miyeso yovuta, ndi zida zopepuka zopepuka, zomwe zimapangitsa kuti zikhale zovuta kukonzekera zida za ceramic za silicon carbide. Pakadali pano, opanga zida zapadziko lonse lapansi zophatikizika, monga ASML ku Netherlands, NIKON ndi CANON ku Japan, amagwiritsa ntchito zida zambiri monga galasi la microcrystalline ndi cordierite pokonzekera magalasi akulu, zigawo zazikulu za makina a lithography, ndikugwiritsa ntchito silicon carbide. zitsulo zadothi kuti akonze zida zina zapamwamba zopangira mawonekedwe osavuta. Komabe, akatswiri ochokera ku China Building Materials Research Institute agwiritsa ntchito luso lokonzekera eni ake kuti akwaniritse kukonzekera kwa magalasi akulu akulu, owoneka movutikira, opepuka kwambiri, otsekedwa kwathunthu ndi silicon carbide ceramic square magalasi ndi zida zina zowoneka bwino komanso zogwira ntchito zamakina a lithography.