Kuyika filimu yopyapyala ndikuveka filimu yosanjikiza pagawo lalikulu la semiconductor. Filimuyi imatha kupangidwa ndi zinthu zosiyanasiyana, monga kutsekereza pawiri silicon dioxide, semiconductor polysilicon, mkuwa wachitsulo, ndi zina zotere. Zida zomwe zimagwiritsidwa ntchito popaka zimatchedwa zida zowonda kwambiri zoyika filimu.
Kuchokera pamawonedwe a semiconductor chip kupanga njira, ili kumapeto kwenikweni.
Njira yokonzekera filimu yopyapyala imatha kugawidwa m'magulu awiri molingana ndi njira yake yopangira filimu: vapor deposition (PVD) ndi kuyika kwa nthunzi wamankhwala.(CVD), zomwe zida zopangira CVD zimawerengera kwambiri.
Physical nvapor deposition (PVD) amatanthauza vaporization pamwamba pa gwero la zinthu ndi mafunsidwe pamwamba pa gawo lapansi kudzera otsika-anzanu mpweya / plasma, kuphatikizapo evaporation, sputtering, ion mtengo, etc.;
Kuyika kwa mpweya wa Chemical (CVD) amatanthawuza njira yoyika filimu yolimba pamwamba pa kachitsulo kachitsulo ka silicon pogwiritsa ntchito mankhwala osakanikirana ndi mpweya. Malingana ndi momwe zinthu zimachitikira (pressure, precursor), zimagawidwa mumlengalengaCVD(APCVD), kuthamanga kwapansiCVD(LPCVD), plasma yowonjezera CVD (PECVD), high density plasma CVD (HDPCVD) ndi atomic layer deposition (ALD).
LPCVD: LPCVD ali bwino sitepe Kuphunzira luso, zikuchokera wabwino ndi dongosolo kulamulira, mkulu mafunsidwe mlingo ndi linanena bungwe, ndipo amachepetsa kwambiri gwero la tinthu kuipitsa. Kudalira zida zotenthetsera ngati gwero la kutentha kuti musunge zomwe zikuchitika, kuwongolera kutentha ndi kuthamanga kwa gasi ndikofunikira kwambiri. Amagwiritsidwa ntchito kwambiri popanga poly layer yopanga ma cell a TopCon.
PECVD: PECVD imadalira plasma yopangidwa ndi ma radio frequency induction kuti ikwaniritse kutentha kochepa (osakwana madigiri 450) a njira yowonda yoyika filimu. Kuyika kwa kutentha pang'ono ndi mwayi wake waukulu, potero kupulumutsa mphamvu, kuchepetsa ndalama, kuonjezera mphamvu zopangira, ndi kuchepetsa kuwonongeka kwa moyo wa onyamula ochepa muzitsulo za silicon chifukwa cha kutentha kwakukulu. Itha kugwiritsidwa ntchito pama cell osiyanasiyana monga PERC, TOPCON, ndi HJT.
ALD: Kufanana kwa filimu yabwino, wandiweyani komanso wopanda mabowo, makhalidwe abwino ophimba masitepe, akhoza kuchitidwa pa kutentha kochepa (kutentha kwa chipinda-400 ℃), amatha kulamulira makulidwe a filimuyo molondola komanso molondola, amagwiritsidwa ntchito kwambiri ku magawo osiyanasiyana, ndi sichiyenera kulamulira kufanana kwa kayendedwe ka reactant. Koma choyipa ndichakuti liwiro la mapangidwe a filimu limachedwa. Monga zinc sulfide (ZnS) wosanjikiza wotulutsa kuwala womwe umagwiritsidwa ntchito popanga zida zopangira ma nanostructured (Al2O3/TiO2) ndi mawonedwe a film electroluminescent (TFEL).
Atomic layer deposition (ALD) ndi njira yokutira vacuum yomwe imapanga filimu yopyapyala pamwamba pa gawo lapansi ndi wosanjikiza ngati gawo limodzi la atomiki. Kumayambiriro kwa 1974, katswiri wa sayansi ya zinthu zaku Finland, Tuomo Suntola, adapanga lusoli ndipo adapambana mphoto ya 1 miliyoni ya Millennium Technology Award. Ukadaulo wa ALD udagwiritsidwa ntchito popanga ma electroluminescent ophatikizika, koma sunagwiritsidwe ntchito kwambiri. Sizinafike kumayambiriro kwa zaka za zana la 21 pomwe ukadaulo wa ALD unayamba kutengedwa ndi makampani opanga ma semiconductor. Popanga zida zoonda kwambiri za dielectric kuti zilowe m'malo mwa silicon oxide, zidathetsa bwino vuto lomwe likutuluka chifukwa cha kuchepa kwa mizere ya ma transistors am'munda, zomwe zidapangitsa kuti Lamulo la Moore lipitirire kukulitsa mizere yaying'ono. Dr. Tuomo Suntola adanenapo kuti ALD ikhoza kuonjezera kwambiri kusakanikirana kwa zigawo zikuluzikulu.
Deta yapagulu ikuwonetsa kuti ukadaulo wa ALD unapangidwa ndi Dr. Tuomo Suntola wa PICOSUN ku Finland mu 1974 ndipo wakhala akupanga mafakitale kunja, monga filimu yapamwamba ya dielectric mu 45/32 nanometer chip yopangidwa ndi Intel. Ku China, dziko langa linayambitsa luso la ALD patatha zaka 30 kuposa mayiko akunja. Mu Okutobala 2010, PICOSUN ku Finland ndi Fudan University adachita msonkhano woyamba wapakhomo wa ALD wosinthira maphunziro, ndikuyambitsa ukadaulo wa ALD ku China koyamba.
Poyerekeza ndi chikhalidwe cha vapor chamankhwala (CVD) ndi mawonekedwe a nthunzi (PVD), ubwino wa ALD ndiwofanana kwambiri ndi magawo atatu, kufanana kwa mafilimu amtundu waukulu, ndi kuwongolera kolondola kwa makulidwe, omwe ali oyenera kukulitsa mafilimu owonda kwambiri pamawonekedwe ovuta komanso mawonekedwe apamwamba.
- Gwero la data: Micro-nano processing nsanja ya Tsinghua University-
M'nthawi ya pambuyo pa Moore, zovuta komanso kuchuluka kwa njira zopangira zowotcha zakhala zikuyenda bwino. Kutengera fanizo tchipisi monga chitsanzo, ndi kuchuluka kwa mizere kupanga ndi njira zosakwana 45nm, makamaka mizere kupanga ndi njira 28nm ndi pansi, zofunika ❖ kuyanika makulidwe ndi kulamulira mwatsatanetsatane ndi apamwamba. Pambuyo poyambitsa teknoloji yowonetsera zambiri, chiwerengero cha masitepe a ALD ndi zipangizo zofunikira zawonjezeka kwambiri; m'munda wa tchipisi ta kukumbukira, njira zopangira zopangira zidasintha kuchokera ku 2D NAND kupita ku 3D NAND kapangidwe, kuchuluka kwa zigawo zamkati kukupitilira kukula, ndipo zigawozo zawonetsa pang'onopang'ono mawonekedwe apamwamba, mawonekedwe apamwamba, komanso gawo lofunikira. ALD yayamba kuonekera. Potengera chitukuko chamtsogolo cha ma semiconductors, ukadaulo wa ALD utenga gawo lofunikira kwambiri munthawi ya pambuyo pa Moore.
Mwachitsanzo, ALD ndiye ukadaulo wokhawo woyikapo womwe ungakwaniritse zofunikira zowunikira komanso filimu yazinthu zovuta za 3D (monga 3D-NAND). Izi zitha kuwoneka bwino pachithunzichi pansipa. Kanemayo woyikidwa mu CVD A (buluu) samaphimba kwathunthu gawo lapansi la kapangidwe; ngakhale kusintha kwa ndondomeko kumapangidwira ku CVD (CVD B) kuti akwaniritse kufalitsa, filimuyi ndi mawonekedwe a mankhwala a m'munsimu ndi osauka kwambiri (malo oyera pachithunzi); mosiyana, kugwiritsa ntchito teknoloji ya ALD kumasonyeza filimu yonse, ndipo mafilimu apamwamba ndi ofanana ndi mafilimu amapezeka m'madera onse a dongosolo.
--Chithunzi Ubwino waukadaulo wa ALD poyerekeza ndi CVD (Source: ASM)—-
Ngakhale CVD ikadali ndi gawo lalikulu pamsika kwakanthawi kochepa, ALD yakhala imodzi mwamagawo omwe akukula mwachangu pamsika wa zida zopangira nsalu. Mumsika wa ALD uwu wokhala ndi kukula kwakukulu komanso gawo lalikulu pakupanga tchipisi, ASM ndi kampani yotsogola pazida za ALD.
Nthawi yotumiza: Jun-12-2024