Zolinga za sputtering zomwe zimagwiritsidwa ntchito mu semiconductor integrated circuits

Zolinga za sputteringamagwiritsidwa ntchito makamaka m'mafakitale amagetsi ndi zidziwitso, monga mabwalo ophatikizika, kusungirako zidziwitso, zowonetsera makristalo amadzimadzi, kukumbukira kwa laser, zida zowongolera zamagetsi, ndi zina. Zitha kugwiritsidwanso ntchito popaka magalasi, komanso kukana kuvala. zipangizo, kutentha kwapamwamba kukana dzimbiri , zinthu zokongoletsera zapamwamba ndi mafakitale ena.

Sputtering ndi imodzi mwa njira zazikulu zokonzekera zipangizo zoonda zamakanema.Amagwiritsa ntchito ma ion opangidwa ndi ma ion kuti apititse patsogolo ndikuphatikizana mu vacuum kuti apange ma ion amphamvu othamanga kwambiri, kuphulitsa malo olimba, ndikusinthanitsa mphamvu ya kinetic pakati pa ayoni ndi maatomu olimba a pamwamba. Ma atomu olimba amasiya cholimbacho ndipo amayikidwa pamwamba pa gawo lapansi. Zolimba zomwe zimaphulitsidwa ndizomwe zimapangidwira kuyika mafilimu opyapyala mwa sputtering, zomwe zimatchedwa sputtering target. Mitundu yosiyanasiyana ya zida zamakanema zopyapyala zakhala zikugwiritsidwa ntchito kwambiri m'mabwalo ophatikizika a semiconductor, zojambulira zojambulira, zowonetsera pagulu lathyathyathya ndi zokutira zapa workpiece.

Pakati pa mafakitale onse ogwiritsira ntchito, makampani a semiconductor ali ndi zofunikira zolimba kwambiri za mafilimu omwe amawombera. Kutenga chip kupanga mwachitsanzo, titha kuwona kuti kuchokera pa silicon wafer kupita ku chip, imayenera kudutsa njira zazikulu 7 zopangira, zomwe ndi kufalikira (Njira Yotentha), Photo-lithography (Photo-lithography), Etch (Etch), Ion Implantation (IonImplant), Kukula kwa Mafilimu Ochepa (Dielectric Deposition), Chemical Mechanical Polishing (CMP), Metalization (Metalization) Njira zimayenderana imodzi ndi imodzi. Cholinga cha sputtering chimagwiritsidwa ntchito popanga "metallization". Chandamalecho chimawomberedwa ndi tinthu tambiri tambiri timene timagwiritsa ntchito filimu yopyapyala ndiyeno chitsulo chosanjikizana chomwe chili ndi ntchito zinazake chimapangidwa pa silicon wafer, monga conductive layer, chotchinga wosanjikiza. Wait.Popeza momwe ma semiconductors onse amasiyanasiyana ndiye kuti nthawi zina pamafunika kutsimikizira kuti makinawo alipo molondola, ndiye kuti timafuna mitundu ina ya zida zodulira pamagawo ena opanga kuti titsimikizire zotsatira zake.