Zofunikira zamakampani a semiconductor pazofunikira zakuthupi za graphite ndizokwera kwambiri, kukula kwa tinthu tating'ono ta graphite kumakhala kolondola kwambiri, kukana kutentha kwambiri, mphamvu yayikulu, kutayika pang'ono ndi zabwino zina, monga: sintered graphite mankhwala nkhungu.Chifukwa zida za graphite zomwe zimagwiritsidwa ntchito m'makampani opanga ma semiconductor (kuphatikiza ma heaters ndi ma sintered amafa) amafunikira kupirira kutenthetsa ndi kuziziritsa mobwerezabwereza, kuti awonjezere moyo wautumiki wa zida za graphite, nthawi zambiri zimafunikira kuti zida za graphite zomwe zimagwiritsidwa ntchito zizigwira ntchito mokhazikika. ndi ntchito yolimbana ndi kutentha.
01 Chalk cha graphite cha kukula kwa kristalo wa semiconductor
Njira zonse zomwe zimagwiritsidwa ntchito polima ma semiconductor makhiristo akugwira ntchito pansi pa kutentha kwambiri komanso malo owononga. Malo otentha a ng'anjo ya kukula kwa kristalo nthawi zambiri amakhala ndi zida za graphite zosagwira kutentha komanso zosachita dzimbiri, monga chotenthetsera, crucible, silinda, silinda yowongolera, electrode, crucible holder, electrode nut, etc.
Titha kupanga mbali zonse za graphite za zida zopangira ma kristalo, zomwe zitha kuperekedwa payekhapayekha kapena m'maseti, kapena magawo osinthika amitundu yosiyanasiyana malinga ndi zomwe makasitomala amafuna. Kukula kwazinthu kumatha kuyeza patsamba, ndipo phulusa lazinthu zomalizidwa likhoza kukhala locheperakopa 5ppm.
02 Zida za graphite za semiconductor epitaxy
Njira ya Epitaxial imatanthawuza kukula kwa kristalo wosanjikiza womwe uli ndi dongosolo lofanana la latisi monga gawo lapansi pagawo limodzi la kristalo. Mu njira ya epitaxial, chophikacho chimayikidwa pa graphite disk. Kuchita ndi khalidwe la graphite disk limagwira ntchito yofunika kwambiri pamtundu wa epitaxial wosanjikiza wa wafer. Pankhani yopanga epitaxial, ma graphite ambiri apamwamba kwambiri komanso ma graphite apamwamba okhala ndi zokutira za SIC amafunikira.
Kampani yathu ya graphite base for semiconductor epitaxy ili ndi ntchito zambiri, imatha kufanana ndi zida zambiri zomwe zimagwiritsidwa ntchito m'makampani, ndipo imakhala yoyera kwambiri, zokutira yunifolomu, moyo wabwino kwambiri wautumiki, komanso kukana kwamphamvu kwamankhwala komanso kukhazikika kwamafuta.
03 Zida za graphite zoyika ma ion
Ion implantation imatanthawuza njira yofulumizitsa mtengo wa plasma wa boron, phosphorous ndi arsenic ku mphamvu inayake, kenako ndikuyibaya pamwamba pa nsalu yopyapyala kuti isinthe zinthu zomwe zili pamwamba pake. Zigawo za chipangizo cha ion implantation ziyenera kupangidwa ndi zinthu zoyeretsedwa kwambiri zokhala ndi kutentha kwambiri, kutentha kwa kutentha, kutentha pang'ono chifukwa cha mtengo wa ion ndi zonyansa zochepa. Mkulu-chiyero graphite amakwaniritsa zofunika ntchito, ndipo angagwiritsidwe ntchito chubu ndege, slits zosiyanasiyana, maelekitirodi, elekitirodi chimakwirira, ngalande, terminators matabwa, etc. zida ion implantation.
Sitingangopereka chivundikiro chotchinga cha graphite pamakina osiyanasiyana oyika ma ion, komanso kupereka ma elekitirodi a graphite apamwamba kwambiri komanso magwero a ion okhala ndi kukana kwa dzimbiri kwamitundu yosiyanasiyana. Mitundu yogwiritsidwa ntchito: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM ndi zida zina. Kuphatikiza apo, titha kuperekanso zofananira za ceramic, tungsten, molybdenum, zinthu zotayidwa ndi zida zokutira.
04 Zida zotchinjiriza za graphite ndi zina
Zida zotchinjiriza zomwe zimagwiritsidwa ntchito pazida zopangira semiconductor zimaphatikizapo zomveka zolimba za graphite, zofewa, zojambula za graphite, pepala la graphite, ndi chingwe cha graphite.
Zida zathu zonse zimatumizidwa ndi graphite, zomwe zimatha kudulidwa molingana ndi kukula kwake kwa kasitomala kapena kugulitsidwa lonse.
Thireyi ya carbon-carbon imagwiritsidwa ntchito ngati chonyamulira chopaka filimu popanga ma solar monocrystalline silicon ndi ma cell a polycrystalline silicon. Mfundo yogwirira ntchito ndi: ikani tchipisi cha silicon mu thireyi ya CFC ndikutumiza mu chubu cha ng'anjo kuti mukonze zokutira filimuyo.
