Ko te paninga SiC ka taea te whakarite ma te whakahekenga kohu matū (CVD), te huringa o mua, te rehu plasma, me etahi atu. Te whakamahi i te methyl trichlosilane. (CHzSiCl3, WhM) hei puna silicon, ko te paninga SiC kua whakaritea e te tikanga CVD he tikanga pakeke mo te tono o tenei paninga.
Ko te paninga SiC me te graphite he pai te hototahi matū, he iti te rereketanga o te whakareatanga whakareatanga waiariki i waenga i a raatau, ma te whakamahi i te paninga SiC ka taea te whakapai ake i te aukati kakahu me te aukati waiariki o nga rawa graphite. I roto ia ratou, ko te ōwehenga stoichiometric, te pāmahana tauhohenga, te hau waimeha, te hau poke me etahi atu tikanga he nui te awe ki te tauhohenga.
Te wa tuku: Sep-14-2022