1 Te tono me te rangahau i te ahunga whakamua o te paninga carbide silicon i roto i nga rawa waro/waro waiariki
1.1 Te tono me te rangahau i te ahunga whakamua i roto i te whakareri rewa
I roto i te mara waiariki karaihe kotahi, tewaro / waro ipute nuinga whakamahia hei oko kawe mo te silicon rauemi me te i roto i te whakapā ki tewhariki kiripaka, e whakaatuhia ana i te Whakaahua 2. Ko te pamahana mahi o te waro / waro waro he tata ki te 1450℃, ka pangia ki te horohanga rua o te silicon totoka (silicon dioxide) me te kohu silicon, ka mutu ka angiangi te ipu, he kapiti mowhiti ranei, na te korenga o te ipu.
He waro whakakikorua hiato/waohanga hiato ipu he mea whakarite na roto i te tukanga uruhanga kohu matū me te tauhohenga i roto i te waahi. Ko te paninga hiato i titoa ki te paninga carbide silicon (100~300μm), te paninga silicon (10~20μm) me te paninga nitride silicon (50~100μm), ka taea te aukati i te waikura o te kohu silicon ki runga i te mata o roto o te waro / waro hiato ipu. I roto i te tukanga whakaputa, te mate o te waro whakakikoruatia waro / waro hiato crucible he 0.04 mm ia oumu, a ka taea e te ora ratonga tae 180 wa oumu.
I whakamahia e nga kairangahau he tikanga tauhohenga matū ki te whakaputa i te paninga kirikiri carbide rite ki runga i te mata o te waro / waro hiato ipu i raro i etahi ahuatanga o te pāmahana me te whakamarumaru o te hau kaikawe, ma te whakamahi i te silicon dioxide me te silicon whakarewa hei rauemi mata i roto i te whakamaarama teitei. oumu. Ko nga hua e whakaatu ana ko te maimoatanga teitei o te pāmahana ehara i te mea anake te whakapai ake i te ma me te kaha o te paninga sic, engari ka tino whakapai ake hoki i te aukati kakahu o te mata o te waro / waro hiato, me te aukati i te pirau o te mata o te ipu na te kohu SiO me nga ngota hāora karekau i roto i te oumu silicon monocrystal. Ko te oranga mahi o te parapara ka piki ake ma te 20% ka whakatauritea ki tera o te parapara kaore he paninga sic.
1.2 Te tono me te ahunga whakamua rangahau i roto i te ngongo arataki rere
Kei runga ake te rango arataki (penei i te Whakaaturanga 1). I roto i te tukanga o te toia karaihe, he nui te rereketanga o te pāmahana i waenga i roto me waho o te mara, ina koa ko te mata o raro e tata ana ki te rauemi silicon whakarewa, ko te teitei te teitei, me te pirau na te kohu silicon te tino kino.
I hangaia e nga kairangahau he tukanga ngawari me te pai o te aukati i te waikura o te ngongo arataki whakakikorua ki te whakakikorua me te tikanga whakarite. Tuatahi, he paparanga o te kirikiri carbide whisker i tipu ki runga i te matrix o te ngongo aratohu, katahi ka whakaritea he paparanga o waho o te carbide silicon carbide, kia hanga he apa whakawhiti SiCw i waenganui i te matrix me te paparanga mata kirikiri carbide. , e whakaatuhia ana i te Whakaahua 3. Ko te whakarea o te roha wera i waenga i te matrix me te carbide silicon. Ka taea e ia te whakaiti i te ahotea waiariki na te kore o te tauritenga o te whakarea roha waiariki.
Ko te tātaritanga e whakaatu ana na te pikinga o te ihirangi SiCw, ka heke te rahi me te maha o nga kapiti o te paninga. Whai muri i te 10h te waikura i te 1100℃hau, ko te 0.87% ~ 8.87% anake te taumaha o te mate o te tauira paninga, a, kua tino pai ake te aukati waiora me te awangawanga waiariki o te paninga carbide silicon. Ka oti te katoa o nga mahi whakareri ma te tuunga kohu matū, ka tino ngawari te whakarite o te paninga carbide silicon, ka whakapakarihia te mahi matawhānui o te puha katoa.
I whakaarohia e nga kairangahau he tikanga mo te whakapakari matrix me te paninga mata o te ngongo aratohu kauwhata mo te czohr monocrystal silicon. Ko te slurry silicon carbide i whakakikoruatia i runga i te mata o te ngongo aratohu kauwhata me te matotoru paninga o te 30~50μm na roto i te paninga paraihe, i te rehu ranei i te tikanga paninga, katahi ka tuu ki roto i te oumu teitei mo te tauhohenga i roto i te waahi, ko te 1850~2300 te pāmahana tauhohenga.℃, a ko te tiaki wera he 2~6h. Ka taea te whakamahi i te paparanga o waho o te SiC i roto i te 24 in(60.96 cm) te oumu tipu karaihe kotahi, a ko te pāmahana whakamahinga ko te 1500℃, a ka kitea kaore he pakaru me te paura e hinga ana i runga i te mata o te rango aratohu kauwhata i muri i te 1500h.
1.3 Te tono me te rangahau i te ahunga whakamua i roto i te rango whakamatao
I te mea ko tetahi o nga waahanga matua o te punaha papa waiariki monocrystalline silicon, ka whakamahia te rango whakamatao ki te whakaiti i te mate wera me te whakahaere i te rōnaki pāmahana o te taiao papaa wera. Hei waahanga tautoko o te paparanga whakamaarama o te pakitara o roto o te oumu karaihe kotahi, ko te waikura kohu silicon e arahi ana ki te heke me te pakaru o te hua, ka mutu ka kore te hua.
Kia pai ake ai te whakakaha ake i te parenga waikura kohu silicon o te ngongo whakahiato hiato C/C-sic, ka tukuna e nga kairangahau nga hua ngongo whakahiato hiato C/C-sic kua rite ki roto i te oumu tauhohenga matū matū, me te whakarite i te paninga carbide silicon carbide ki runga i te mata o te C/C-sic hiato hua ngongo whakamatao na roto i te tukanga waipara matū kohu. Ko nga hua e whakaatu ana, Ka taea e te tukanga te whakakore i te pirau o te muka waro i runga i te matua o te C / C-sic composite na te kohu silicon, me te kaha o te aukati o te kohu silicon ki te 5 ki te 10 nga wa ka whakaritea ki te waro / waro hiato, a ko te oranga o te ratonga o te puoto whakamatao me te haumaru o te waahi waiariki kua tino pai ake.
2.Whakamutunga me te tumanako
paninga Silicon carbidehe nui ake te whakamahia i roto i te waro / waro waaa rauemi mara na te mea he pai te aukati i te waiora i te pāmahana teitei. Na te nui haere o nga rawa waro / waro waiariki waariki e whakamahia ana i roto i te hanga silicon monocrystalline, me pehea te whakapai ake i te riterite o te paninga carbide silicon ki runga i te mata o nga rauemi papa waiariki me te whakapai ake i te oranga o te waro / waro waiariki rauemi mara he raru ohorere. kia whakaotia.
I tetahi atu taha, me te whakawhanaketanga o te ahumahi silicon monocrystalline, kei te piki haere hoki te hiahia mo nga taputapu waro waro / waro wera teitei, a ka tipu ano nga SiC nanofibers i runga i nga muka waro o roto i te wa o te tauhohenga. Ko nga reiti whakaheke papatipu me nga reeti whakaheke raina o C/ C-ZRC me C/ C-sic ZrC hiato kua whakaritea e nga whakamatautau he -0.32 mg/s me te 2.57μm/s, ia. Ko te papatipu me te reeti whakaheke raina o C/ C-sic -ZrC composites he -0.24mg/s me te 1.66μm/s, ia. Ko te C/ C-ZRC composites me SiC nanofibers he pai ake nga ahuatanga ablative. I muri mai, ka akohia nga paanga o nga puna waro rereke i runga i te tipu o te SiC nanofibers me te tikanga o te SiC nanofibers e whakapakari ana i nga ahuatanga ablative o C / C-ZRC composites.
He waro whakakikorua hiato/waohanga hiato ipu he mea whakarite na roto i te tukanga uruhanga kohu matū me te tauhohenga i roto i te waahi. Ko te paninga hiato i titoa ki te paninga carbide silicon (100~300μm), te paninga silicon (10~20μm) me te paninga nitride silicon (50~100μm), ka taea te aukati i te waikura o te kohu silicon ki runga i te mata o roto o te waro / waro hiato ipu. I roto i te tukanga whakaputa, te mate o te waro whakakikoruatia waro / waro hiato crucible he 0.04 mm ia oumu, a ka taea e te ora ratonga tae 180 wa oumu.
Wā tuku: Feb-22-2024