Gịnị mere mkpa thinning?

Na azụ-ọgwụgwụ usoro ogbo, nawafer (silicon waferya na sekit dị n'ihu) kwesịrị ịdị nro na azụ tupu dicing na-esote, ịgbado ọkụ na nkwakọ ngwaahịa iji belata ngwungwu ịrị elu, belata olu ngwugwu mgbawa, melite arụmọrụ mgbawa ọkụ nke mgbawa, arụmọrụ eletriki, akụrụngwa akụrụngwa ma belata ọnụọgụ nke dicing. Ngwunye azụ azụ nwere uru nke arụmọrụ dị elu na ọnụ ala dị ala. Ọ dochiela usoro etching mmiri mmiri na ion etching ọdịnala ka ọ bụrụ teknụzụ na-ebelata azụ kacha mkpa.

Wafer ahụ dị mkpa

Kedu ka esi adị mkpa?

Isi usoro nke wafer thinning na omenala nkwakọ ngwaahịa

The kpọmkwem nzọụkwụ nkewaferthinning bụ ijikọ wafer na-esichara na thinning film, na mgbe ahụ na-eji agụụ na-adsorb na thinning film na mgbawa na ya na porous seramiiki wafer table, mezie ime na mpụta okirikiri ụgbọ mmiri center ahịrị nke na-arụ ọrụ n'elu. wheel egweri diamond nke nwere iko ruo n'etiti wafer silicon, na wafer silicon na igwe egweri na-atụgharị gburugburu anyụike ha dị iche iche maka ịkpụ-na-egweri. Egweri na-agụnye usoro atọ: ịhịa aka n'ahụ siri ike, ichicha nke ọma na polishing.

A na-egweri wafer na-apụta site na ụlọ ọrụ wafer ka ọ dị nro ka ọ dị nha nke achọrọ maka nkwakọ ngwaahịa. Mgbe ị na-egweri wafer, ọ dị mkpa ka a na-etinye teepu n'ihu (Active Area) iji chebe mpaghara sekit, na akụkụ azụ na-agbada n'otu oge ahụ. Mgbe egwerichara, wepụ teepu ahụ wee tụọ ọkpụrụkpụ.
Usoro egweri nke etinyerela nke ọma na nkwadebe silicon wafer gụnyere ịcha tebụl rotary,silicon waferadiana egweri, abụọ-kwadoro egweri, wdg Na n'ihu mma nke elu àgwà chọrọ nke otu crystal silicon wafers, ọhụrụ egweri teknụzụ na-mgbe niile tụrụ aro, dị ka TAIKO egweri, chemical n'ibu egweri, polishing egweri na mbara ala diski egweri.

Rotary table egweri:

Tebụl egweri nke tebụl rotary (ogwe ọka rotary) bụ usoro egweri n'oge nke a na-eji na nkwadebe silicon wafer na ịbelata azụ. E gosipụtara ụkpụrụ ya na eserese 1. A na-edozi wafers silicon na iko mmiri nke tebụl na-atụgharị, na-atụgharị synchronously nke tebụl na-atụgharị. The silicon wafers onwe ha adịghị bugharia gburugburu ha axis; A na-eri nri na-egweri axially mgbe ọ na-agbagharị na oke ọsọ ọsọ, na dayameta nke igwe na-egweri dị ukwuu karịa dayameta nke silicon wafer. E nwere ụdị abụọ nke rotary table egweri: ihu imikpu egweri na ihu tangential egweri. Na ihu imikpu egweri, na egweri wheel obosara bụ ibu karịa silicon wafer dayameta, na egweri wheel spindle na-eri nri na-aga n'ihu na ya axial direction ruo mgbe ngafe na-esichara, na mgbe ahụ, silicon wafer na-atụgharị n'okpuru mbanye nke rotary table; na ihu tangential egweri, na-egweri wheel na-eri nri tinyere ya axial direction, na silicon wafer na-aga n'ihu na-atụgharị n'okpuru mbanye nke na-atụgharị diski, na egweri na-agwụ agwụ site reciprocating nri (reciprocation) ma ọ bụ creep nri (creepfeed).

Ọgụgụ 1, schematic eserese nke rotary table egweri ( ihu tangential ) ụkpụrụ

E jiri ya tụnyere usoro egweri, tebụl rotary nwere uru dị na ọnụego mwepụ dị elu, obere mmebi elu na akpaaka dị mfe. Otú ọ dị, ebe a na-egweri n'ezie (igwe nri na-arụ ọrụ) B na ịkpụ-n'akuku θ (akụkụ dị n'etiti gburugburu mpụta nke wheel na-egweri na mpụta nke silicon wafer) na-agbanwe agbanwe na-agbanwe agbanwe na ọnọdụ ịkpụ. nke igwe na-egweri, na-eme ka ike na-egweri na-adịghị akwụsi ike, na-eme ka o sie ike inweta ezigbo elu nke ọma (uru TTV dị elu), na-eme ka ọ dị mfe na-eme ka ntụpọ dị ka ọdịda ihu na ọdịda ihu. The rotary table egweri technology bụ tumadi na-eji maka nhazi nke otu-crystal silicon wafers n'okpuru 200mm. Mmụba nke otu-crystal silicon wafers etinyela ihe dị elu chọrọ maka izi ezi n'elu na izi ezi ngagharị nke akụrụngwa workbench, yabụ na-egweri tebụl rotary adịghị mma maka egweri silicon wafers otu-kristal n'elu 300mm.
Iji melite arụmọrụ egweri, ngwa ahịa ụgbọ elu tangential egweri ihe na-emekarị ihe owuwu wheel-egweri ọtụtụ. Dị ka ihe atụ, a na-eji ígwè egwe ihe ndị na-egweri ihe na ihe ndị dị mma na-egweri n’ime ngwá ọrụ ahụ, tebụl rotary na-agbakwa otu okirikiri iji rụzuo ihe ndị a na-egweri na nke ọma n’aka nke ya. Ụdị ngwá ọrụ a gụnyere G-500DS nke American GTI Company (Nyocha 2).

Ọgụgụ 2, G-500DS rotary table egweri akụrụngwa nke GTI Company na United States

Silicon wafer rotation egweri:

Iji gboo mkpa nke nkwadebe silicon wafer buru ibu na nhazi azụ azụ, wee nweta izi ezi nke elu na uru TTV dị mma. N'afọ 1988, ọkà mmụta Japan bụ Matsui tụrụ aro ka a na-eji silicon wafer rotation egweri (in-feedgrinding). E gosipụtara ụkpụrụ ya na Figure 3. The single crystal silicon wafer na cup ekara diamond egweri wheel adsorbed na workbench bugharia gburugburu ha dị iche iche anyụike, na egweri wheel na-anọgide na-eri nri tinyere axial direction n'otu oge ahụ. N'ime ha, dayameta nke wiil egweri dị ukwuu karịa dayameta nke silicon wafer a na-edozi, na gburugburu ya na-agafe n'etiti etiti silicon wafer. Iji belata ike egweri wee belata ikpo ọkụ ahụ, a na-akpụzi iko mmiri mmiri na-ekpo ọkụ ka ọ bụrụ convex ma ọ bụ concave udi ma ọ bụ akụkụ dị n'etiti mkpịsị mkpịsị egweri na axis cup spindle axis na-edozi iji hụ na ọ na-egweri ọkara kọntaktị n'etiti. wheel egweri na silicon wafer.

Onyonyo 3, Eserese atụmatụ nke ụkpụrụ ịgbagharị silicon wafer rotary

E jiri ya tụnyere okpokoro okpokoro rotary, silicon wafer rotary egweri nwere uru ndị a: ① Otu oge na-egweri otu wafer nwere ike ịhazi nnukwu ihe mkpuchi silicon dị elu karịa 300mm; ② Ebe a na-egweri n'ezie B na akụkụ ịkpụ θ na-adịgide adịgide, na ike egweri na-akwụsi ike; ③ Site n'ịgbanwe ihu ihu n'etiti axis wheel axis na silicon wafer axis, enwere ike ịchịkwa ọdịdị elu nke otu silicon wafer kristal iji nweta izi ezi n'elu ka mma. Tụkwasị na nke ahụ, ebe a na-egweri na ịkpụ angle θ nke silicon wafer rotary egweri nwekwara uru nke nnukwu ọnụ ụzọ egweri, mfe online ọkpụrụkpụ na elu àgwà nchọpụta na njikwa, kọmpat akụrụngwa Ọdịdị, mfe multi-ọdụ integrated egweri, na elu egweri arụmọrụ.
Iji melite mmepụta arụmọrụ na izute mkpa nke semiconductor mmepụta ahịrị, azụmahịa egweri ngwá dabeere na ụkpụrụ nke silicon wafer rotary egweri adopts a multi-spindle multi-ọdụ Ọdịdị, nke nwere ike mezue siri ike egweri na ezi egweri n'otu loading na ebutu. . Ejikọtara ya na ụlọ ọrụ inyeaka ndị ọzọ, ọ nwere ike ịghọta n'ụzọ zuru ezu na-egweri otu silicon wafers "akọrọ-na/akọrọ" na "kaseti na cassette".

Egweri akụkụ abụọ:

Mgbe silicon wafer rotary egweri na-arụ ọrụ nke elu na ala elu nke silicon wafer, a ga-atụgharị na workpiece na usoro, nke na-egbochi arụmọrụ. N'otu oge ahụ, silicon wafer rotary egweri nwere n'elu njehie na-eṅomi (depụtaghachiri) na egweri akara (grindingmark), na ọ gaghị ekwe omume iji rụọ ọrụ nke ọma wepụ ntụpọ dị ka waviness na taper n'elu nke otu kristal silicon wafer mgbe waya gbuchara. (multi-saw), dị ka egosiri na Figure 4. Iji merie ntụpọ ndị a dị n'elu, nkà na ụzụ na-egweri akụkụ abụọ (doublesidegrinding) pụtara na 1990, na ụkpụrụ ya gosipụtara na Figure. 5. The clamps symmetrically ekesa n'akụkụ abụọ mmachi otu crystal silicon wafer na-ejigide mgbanaka na bugharia nwayọọ nwayọọ chụpụrụ site roller. Otu ụzọ wiil ndị na-egweri diamond dị ka iko dị n'akụkụ abụọ nke otu wafer silicon kristal. N'ịbụ nke igwe eletrik na-ebu ikuku na-anya, ha na-atụgharị n'akụkụ dị iche iche wee na-eri nri axially iji nweta ntụ ọka nwere akụkụ abụọ nke otu wafer silicon kristal. Dị ka a na-ahụ site na ọnụ ọgụgụ a, egweri akụkụ abụọ nwere ike iwepụ waviness na taper n'elu otu silicon kristal wafer mgbe e gbuchara waya. Dị ka nhazi ntụziaka nke axis wheel egweri, egweri akụkụ abụọ nwere ike kehoraizin na vetikal. N'ime ha, ịhịa aka n'akụkụ abụọ nke kwụ ọtọ nwere ike belata mmetụta nke nrụrụ silicon wafer kpatara site na ịdị arọ nwụrụ anwụ nke silicon wafer na-egweri àgwà, ọ dịkwa mfe iji hụ na ọnọdụ usoro egweri n'akụkụ abụọ nke silicon silicon. wafer bụ otu, na ihe abrasive na ibe egweri adịghị mfe ịnọ n'elu otu kristal silicon wafer. Ọ bụ usoro egweri dịtụ mma.

Onyonyo 4, "Ndemi mperi" ma yikwasị ntụpọ akara na ntụgharị silicon wafer ntụgharị

Ọgụgụ 5, schematic diagram nke ụkpụrụ egweri akụkụ abụọ

Tebụl 1 na-egosi ntụnyere n'etiti ngwucha na-egweri akụkụ abụọ nke ụdị atọ dị n'elu nke otu kristal silicon wafers. A na-eji ntụ ọka nwere akụkụ abụọ eme ihe maka nhazi silicon wafer n'okpuru 200mm, ma nwee nnukwu mkpụrụ wafer. N'ihi iji wiil ndị na-egweri abrasive a na-edozi anya, nkedo nke otu silicon wafers nwere ike nweta ogo elu dị elu karịa nke okpukpu abụọ. Ya mere, ma silicon wafer rotary egweri na abụọ-akụkụ egweri nwere ike izute nhazi mma chọrọ nke mainstream 300mm silicon wafers, na ugbu a bụ ndị kasị mkpa flattening ụzọ nhazi. Mgbe ị na-ahọrọ usoro nhazi nke na-eme ka silicon wafer flattening, ọ dị mkpa ịtụle nke ọma ihe achọrọ nke nha dayameta, ịdị mma elu na teknụzụ nhazi wafer nke otu kristal silicon wafer. Ntugharị azụ nke wafer nwere ike họrọ naanị usoro nhazi akụkụ, dị ka usoro egweri nke silikoni wafer rotary.

Na mgbakwunye na-ahọpụta usoro egweri na silicon wafer egweri, ọ dịkwa mkpa iji chọpụta nhọrọ nke ezi uche usoro parameters dị ka nti mgbali, egweri wheel ọka size, egweri ihe nkedo wiil, egweri wheel ọsọ, silicon wafer ọsọ, egweri mmiri viscosity na. ọsọ ọsọ, wdg, ma chọpụta ụzọ usoro ezi uche dị na ya. Ọtụtụ mgbe, a na-eji usoro egweri nkewa nkewa gụnyere ịhịa aka siri ike, ihe na-emecha nke ọma, ịmecha ihe, ịcha ọkụ na-enweghị ọkụ na nkwado ngwa ngwa iji nweta otu kristal silicon wafers nwere nnukwu nhazi nhazi, elu elu elu na mmebi ala dị ala.