Usoro uto nke silicon carbide kristal na teknụzụ akụrụngwa

1. Ụzọ teknụzụ uto SiC kristal

PVT (usoro sublimation),

HTCVD (CVD okpomọkụ dị elu),

LPE(usoro mmiri mmiri)

bụ atọ nkịtịSiC crystalụzọ uto;

Usoro a kacha mara amara na ụlọ ọrụ bụ usoro PVT, na ihe karịrị 95% nke otu kristal SiC na-eto site na usoro PVT;

Emepụtara ụlọ ọrụ mmepụta iheSiC crystalIgwe ọkụ na-eto eto na-eji ụzọ teknụzụ PVT bụ isi nke ụlọ ọrụ ahụ.

2. SiC crystal usoro uto

Nchikota ntụ ntụ- ọgwụgwọ mkpụrụ kristal-crystal growth-ingot annealing-wafernhazi.

3. PVT usoro na-eto etoSiC kristal

A na-etinye akụrụngwa SiC na ala nke graphite crucible, na SiC mkpụrụ crystal dị n'elu nke graphite crucible. Site n'ịgbanwe ihe mkpuchi ahụ, okpomọkụ dị na akụrụngwa SiC dị elu na okpomọkụ dị na kristal mkpụrụ dị ala. Akụrụngwa SiC na oke okpomọkụ na-ebuwanye ibu ma na-emebi n'ime ihe ndị na-emepụta gas, nke a na-ebuga na kristal mkpụrụ nwere okpomọkụ dị ala na crystallize iji mepụta kristal SiC. Usoro ntolite bụ isi na-agụnye usoro atọ: mwepu na sublimation nke akụrụngwa, nnyefe oke, na crystallization na kristal mkpụrụ.

Nbibi na sublimation nke akụrụngwa:

SiC(S)= Si(g)+C(S)

2SiC(S)= Si(g)+ SiC2(g)

2SiC(S)=C(S)+SiC2(g)

N'oge mbufe oke, Si vapo na-emeghachi omume na mgbidi graphite crucible iji mepụta SiC2 na Si2C:

Si(g)+2C(S) =SiC2(g)

2Si(g) +C(S)=Si2C(g)

N'elu kristal mkpụrụ, usoro gas atọ ahụ na-eto site na usoro abụọ ndị a iji mepụta kristal silicon carbide:

SiC2_(g)+ Si2C_(g)= 3 SiC_(s)

Si_(g)+ SiC2_(g)= 2SiC_(S)

4. PVT usoro na-eto eto SiC crystal ibu technology ụzọ

Ka ọ dị ugbu a, kpo oku induction bụ ụzọ teknụzụ a na-ahụkarị maka usoro PVT SiC kristal ibu ọkụ;

Coil mpụga induction kpo oku na graphite na-eguzogide okpomọkụ bụ ntụziaka mmepe nkeSiC crystalọkụ ọkụ.

5. 8-inch SiC induction ọkụ ọkụ

(1) Na-ekpo ọkụgraphite crucible ihe kpo okusite na ntinye oghere magnet; na-ahazi ebe okpomọkụ site n'ịgbanwe ike ọkụ, ọnọdụ mkpuchi, na mkpuchi mkpuchi;

(2) Na-ekpo ọkụ graphite crucible site graphite iguzogide kpo oku na thermal radieshon conduction; ịchịkwa mpaghara okpomọkụ site n'ịgbanwe ugbu a nke ikpo ọkụ graphite, nhazi nke ikpo ọkụ, na mpaghara mpaghara ugbu a;