Graphite nwere mkpuchi TaC

I. Usoro nyocha nke oke

1. TaCl5-C3H6-H2-Ar usoro

2. Okpomọkụ nkwụnye ego:

Dị ka usoro thermodynamic si kwuo, a na-agbakọ ya na mgbe okpomọkụ dị elu karịa 1273K, ike nke Gibbs nke mmeghachi omume dị ntakịrị na mmeghachi omume zuru oke. Mmeghachi omume KP na-adịgide adịgide dị ukwuu na 1273K ma na-abawanye ngwa ngwa na okpomọkụ, ọnụ ọgụgụ uto na-eji nwayọọ nwayọọ na-agbada na 1773K.

Mmetụta dị n'elu morphology nke mkpuchi: Mgbe okpomọkụ adịghị adabara (oke elu ma ọ bụ dị ala), elu na-enye morphology carbon free ma ọ bụ oghere rụrụ arụ.

(1) Na elu okpomọkụ, ije ọsọ nke nọ n'ọrụ reactant atọm ma ọ bụ otu dị oke ngwa ngwa, nke ga-eduga na-ezighị ezi nkesa n'oge ìgwè ihe, na ọgaranya na ogbenye ebe enweghị ike were were mgbanwe, na-akpata pores.

(2) Enwere ihe dị iche n'etiti mmeghachi omume pyrolysis nke alkanes na mbelata mmeghachi omume nke tantalum pentachloride. Carbon pyrolysis karịrị akarị, enweghị ike ijikọ ya na tantalum n'oge, na-eme ka carbon kechie elu ya.

Mgbe okpomọkụ kwesịrị ekwesị, elu nkeMkpuchi TaCdị oke.

TaCahụ gbazee na-agbakọta na onye ọ bụla ọzọ, na kristal ụdị zuru ezu, na ọka ókè n'ife were were.

3. Mmiri mmiri:

Na mgbakwunye, enwere ọtụtụ ihe na-emetụta ogo mkpuchi:

- Substrate elu àgwà

- Ebe nchekwa gas

-The ogo nke uniformity nke reactant gas Ịgwakọta

II. Ụdị ntụpọ nketantalum carbide mkpuchi

1. mkpuchi mkpuchi na peeling

Ọnụọgụ mgbasawanye ọkụ Linear linear CTE:

2. Ntụle adịghị mma:

(1) N'ihi:

(2) Usoro njirimara

① Jiri teknụzụ diffraction X-ray wee tụọ udi nke fọdụrụ.

② Jiri iwu Hu Ke mee ka mgbakasị ahụ fọdụrụ.

(3) Usoro ndị metụtara ya

3.Enhance n'ibu ndakọrịta nke mkpuchi na substrate

(1) Mkpuchi ibu ibu dị n'elu

Nkwado mmeghachi omume okpomọkụ na teknụzụ mgbasa ozi TRD

Usoro nnu gbazere

Mee ka usoro mmepụta ihe dị mfe

Belata okpomọkụ mmeghachi omume

Ọnụ ego dị obere

More na gburugburu ebe obibi enyi na enyi

Kwesịrị ekwesị maka mmepụta ụlọ ọrụ buru ibu

(2) Mkpuchi mgbanwe ngwakọta

Usoro ntinye ego

CVDusoro

Ihe mkpuchi ọtụtụ akụkụ

Na-ejikọta uru nke akụkụ ọ bụla

Na-agbanwe agbanwe na-agbanwe ihe mkpuchi mkpuchi na oke

4. Mwepụta mmeghachi omume okpomọkụ na teknụzụ mgbasa ozi TRD

(1) Usoro mmeghachi omume

A na-akpọkwa teknụzụ TRD usoro ntinye, nke na-eji boric acid-tantalum pentoxide-sodium fluoride-boron oxide-boron carbide system iji kwadebe.tantalum carbide mkpuchi.

① boric acid a wụrụ awụ na-agbaze tantalum pentoxide;

② Tantalum pentoxide na-ebelata ka ọ bụrụ tantalum atọ na-arụ ọrụ ma na-agbasa n'elu graphite;

③ A na-ekesa atọm tantalum na-arụ ọrụ n'elu graphite wee meghachi omume na atom carbon iji mepụta.tantalum carbide mkpuchi.

(2) Igodo mmeghachi omume

Ụdị mkpuchi nke carbide ga-egbo ihe achọrọ na nhazi oxidation n'efu nke ihe na-emepụta carbide dị elu karịa nke boron oxide.

Ike Gibbs nke carbide dị obere (ma ọ bụghị ya, boron ma ọ bụ boride nwere ike ịmepụta).

Tantalum pentoxide bụ oxide na-anọpụ iche. N'ime borax mgbaze na-ekpo ọkụ, ọ nwere ike imeghachi omume na alkaline oxide sodium oxide siri ike na-emepụta sodium tantalate, si otú ahụ belata okpomọkụ mmeghachi omume mbụ.