N'oge usoro vapor phase epitaxy (VPE), ọrụ nke pedestal bụ ịkwado mkpụrụ ma hụ na kpo oku otu n'oge usoro uto. Ụdị pedestal dị iche iche dị mma maka ọnọdụ uto dị iche iche na usoro ihe onwunwe. Ndị a bụ ụfọdụ ụdị pedestal a na-ejikarị n'oge uzuokuepitaxy:
Ụgbọ mmiri gbọmgbọm
A na-ejikarị pedestal barel eme ihe n'usoro epitaxy vepor phase ma ọ bụ gbagọrọ agbagọ. Ha nwere ike ijide mkpụrụ osisi ahụ ma kwe ka gas na-asọfe n'elu mkpụrụ ahụ, nke na-enyere aka nweta uto epitaxial otu.
Pedestal yiri diski (ebe kwụ ọtọ)
Oghere ụkwụ ndị nwere ụdị diski dabara adaba maka sistemu vapor phase epitaxy vetikal, nke etinyere mkpụrụ n'ime ya kwụ ọtọ. Nhazi a na-enyere aka belata mpaghara kọntaktị dị n'etiti mkpụrụ na ihe ndị na-akpata ya, si otú ahụ belata ọnwụ okpomọkụ na mmetọ nwere ike ime.
Susceptor kwụ ọtọ
A na-ahụkarị ihe ndị na-eche ihu n'ihu n'ime akụkụ nke vapor epitaxy, mana enwere ike iji ya na usoro uto ụfọdụ akọwapụtara iji kwe ka uto epitaxial n'ụzọ kwụ ọtọ.
Monolithic epitaxial mmeghachi omume susceptor
Emebere susceptor monolithic epitaxial susceptor maka otu mkpụrụ, nke nwere ike inye njikwa okpomọkụ nke ọma na ikewapụ okpomọkụ ka mma, dabara maka uto nke akwa epitaxial dị elu.
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Oge nzipu: Jul-30-2024