Ngwa nke ceramik silicon carbide na mpaghara semiconductor

Ihe kachasị amasị maka akụkụ ziri ezi nke igwe fotolithography

Na mpaghara semiconductor,silicon carbide seramiikiA na-ejikarị ihe eji eme ihe maka nrụpụta sekit agbakwunyere, dị ka silicon carbide worktable, okporo ụzọ ntuziaka,reflectors, seramiiki mmiri mmiri, ogwe aka, diski egweri, ihe ndozi, wdg maka igwe lithography.

Akụkụ nke seramiiki silicon carbidemaka semiconductor na ngwa anya

● Silicon carbide seramiiki egweri diski. Ọ bụrụ na e ji ígwè nkedo ma ọ bụ carbon ígwè mee diski egweri, ndụ ọrụ ya dị mkpụmkpụ na ọnụọgụ mgbasawanye okpomọkụ ya dị ukwuu. N'oge nhazi nke silicon wafers, karịsịa n'oge elu-ọsọ egweri ma ọ bụ polishing, eyi na thermal deformation nke egweri diski na-eme ka o sie ike ịhụ na flatness na myirịta nke silicon wafer. Disiki egweri nke ceramik carbide nke silicon carbide nwere ike siri ike na ịdị ala dị ala, yana ọnụọgụ mgbasawanye thermal bụ otu ihe ahụ nke silicon wafers, yabụ enwere ike ịkụ ya ma na-egbu maramara na oke ọsọ.
● Silicon carbide ihe ndozi seramiiki. Tụkwasị na nke ahụ, mgbe a na-emepụta ihe ndị na-emepụta silicon, ha kwesịrị ịmalite ọgwụgwọ okpomọkụ dị elu ma na-ebufekarị ya site na iji silicon carbide fixtures. Ha na-eguzogide okpomọkụ na ndị na-adịghị ebibi. Enwere ike itinye diamond dị ka carbon (DLC) na mkpuchi ndị ọzọ n'elu iji kwalite arụmọrụ, belata mmebi wafer, ma gbochie mmetọ ịgbasa.
● Silicon carbide worktable. Na-ewere worktable na lithography igwe dị ka ihe atụ, worktable bụ tumadi maka imecha ikpughe ije, na-achọ elu-ọsọ, nnukwu-stroke, isii ogo-nke nnwere onwe nano-larịị ultra-nkenke ije. Dịka ọmụmaatụ, maka igwe lithography nke nwere mkpebi 100nm, ihe nkpuchi nke 33nm, yana obosara ahịrị 10nm, achọrọ nguzozi nke worktable iji ruo 10nm, ihe nkpuchi-silicon wafer n'otu oge na ọsọ nyocha bụ 150nm / s. na 120nm / s n'otu n'otu, yana ọsọ nyocha ihe nkpuchi dị nso 500nm / s, na The worktable a chọrọ ka nwere nnọọ elu ngagharị ziri ezi na nkwụsi ike.

Eserese eserese nke tebụl na-arụ ọrụ na tebụl micro-motion (akụkụ akụkụ)

● Silicon carbide ceramic square mirror. Ihe ndị dị mkpa na akụrụngwa sekit agbakwunyere isi dị ka igwe lithography nwere udi dị mgbagwoju anya, akụkụ dị mgbagwoju anya, na ihe arụ dị fechaa, na-eme ka o sie ike ịkwadebe ihe ndị dị otú ahụ siliki carbide seramiiki. Ka ọ dị ugbu a, ndị na-emepụta ngwa sekit nke mba dị iche iche, dị ka ASML na Netherlands, NIKON na CANON na Japan, na-eji nnukwu ihe dị ka iko microcrystalline na cordierite na-akwadebe enyo square, ihe ndị bụ isi nke igwe lithography, ma jiri silicon carbide. ceramics iji dozie ihe ndị ọzọ na-arụ ọrụ dị elu nwere ụdị dị mfe. Agbanyeghị, ndị ọkachamara sitere na China Building Materials Research Institute ejirila teknụzụ nkwadebe nkeonwe iji nweta nkwadebe nke nnukwu nha, ụdị dị mgbagwoju anya, dị oke fechaa, enyo seramiiki silicon carbide kpuchiri nke ọma na ihe ndị ọzọ na-arụ ọrụ na ngwa anya maka igwe lithography.