Ngwa na ọganihu nyocha nke mkpuchi SiC na carbon / carbon thermal ubi ihe maka monocrystalline silicon-2

1 Ngwa na ọganihu nyocha nke mkpuchi silicon carbide n'ime ihe ọkụkụ ikuku carbon / carbon

1.1 Ọganihu ngwa na nyocha na nkwadebe crucible

Na otu kristal thermal ubi, nacarbon/carbon cruciblea na-ejikarị dị ka ụgbọ mmiri na-ebu maka ihe silicon ma na-akpọtụrụ yaquartz crucible, dị ka egosiri na foto 2. Ọnọdụ okpomọkụ nke carbon/carbon crucible bụ ihe dịka 1450℃, nke a na-edobe okpukpu abụọ nke silicon siri ike (silicon dioxide) na vapor silicon, na n'ikpeazụ, crucible na-adị gịrịgịrị ma ọ bụ nwee mgbawa mgbanaka, na-akpata ọdịda nke crucible.

A kwadebere ihe mkpuchi ihe mejupụtara carbon/carbon composite crucible site na usoro ikuku vapor na mmeghachi omume n'ime ọnọdụ. Ihe mkpuchi ahụ mejupụtara bụ mkpuchi silicon carbide (100 ~ 300μm), mkpuchi silicon (10 ~ 20μm) na silicon nitride mkpuchi (50 ~ 100μm), nke nwere ike igbochi corrosion nke vapor silicon n'elu ime nke carbon/carbon composite crucible. Na usoro mmepụta, mfu nke ihe mkpuchi carbon / carbon composite crucible bụ 0.04 mm kwa ọkụ, na ndụ ọrụ nwere ike iru 180 ọkụ ugboro.

Ndị ọrụ nyocha ahụ jiri usoro mmeghachi omume kemịkalụ mepụta mkpuchi mkpuchi silicon carbide edo edo n'elu ikuku carbon / carbon composite crucible n'okpuru ọnọdụ ọnọdụ okpomọkụ yana nchebe nke gas na-ebu, na-eji silicon dioxide na silicon metal dị ka akụrụngwa n'ime oke ọkụ na-ekpo ọkụ. ọkụ. Nsonaazụ na-egosi na ọgwụgwọ okpomọkụ dị elu ọ bụghị nanị na-eme ka ịdị ọcha na ike nke mkpuchi sic dịkwuo mma, kamakwa ọ na-eme ka nkwụsị nke elu nke carbon / carbon composite, na-egbochi corrosion nke elu nke crucible site na SiO vapor. na ikuku oxygen na-agbanwe agbanwe n'ime ọkụ silicon monocrystal. Ndụ ọrụ nke crucible na-abawanye site na 20% ma e jiri ya tụnyere nke crucible na-enweghị mkpuchi sic.

1.2 Ọganihu ngwa na nyocha na tube ntụ ntụ

Silinda ntụzịaka dị n'elu crucible (dị ka egosiri na eserese 1). N'ime usoro ịdọrọ kristal, ọdịiche dị n'etiti okpomọkụ dị n'ime na n'èzí ubi dị ukwuu, karịsịa n'elu ala dị nso na ihe silicon a wụrụ awụ, okpomọkụ dị elu, na corrosion site na silicon vapor bụ ihe kasị njọ.

Ndị na-eme nchọpụta chepụtara usoro dị mfe na ezigbo nguzogide oxidation nke ndu tube mgbochi oxidation mkpuchi na usoro nkwadebe. Nke mbụ, otu oyi akwa nke silicon carbide whisker nọ n'ọnọdụ toro na matrix nke tube ntuziaka, wee kwadebe akwa mkpuchi silicon carbide dị n'elu, nke mere na e guzobere oyi akwa mgbanwe SiCw n'etiti matriks na akwa silicon carbide dị elu. , dị ka egosiri na foto 3. Ọnụ ọgụgụ nke mgbasawanye okpomọkụ dị n'etiti matrix na silicon carbide. Ọ nwere ike belata nrụgide okpomọkụ nke ọma site na ndakọrịta nke ọnụọgụ mgbasawanye thermal.

Nyocha ahụ na-egosi na mmụba nke ọdịnaya SiCw, nha na ọnụ ọgụgụ nke mgbawa na mkpuchi na-ebelata. Mgbe 10h oxidation na 1100℃ikuku, ọnụ ọgụgụ dị arọ nke ihe mkpuchi mkpuchi bụ naanị 0.87% ~ 8.87%, na nkwụsị nke oxidation na thermal shock resistance nke silicon carbide mkpuchi na-mma nke ukwuu. A na-emecha usoro nkwadebe ahụ niile site na ntinye kemịkalụ kemịkalụ, nkwadebe nke mkpuchi silicon carbide na-adị mfe nke ukwuu, na arụmọrụ zuru oke nke nozzle dum na-ewusi ike.

Ndị nchọpụta ahụ tụrụ aro usoro nke ike matriks ike na mkpuchi elu nke tube nduzi graphite maka czohr monocrystal silicon. A na-ekpuchi slurry silicon carbide enwetara nke ọma n'elu tube ntuziaka graphite nwere ọkpụrụkpụ mkpuchi nke 30 ~ 50.μm site ahịhịa mkpuchi ma ọ bụ ịgba mkpuchi usoro, wee tinye n'ime a elu okpomọkụ ọkụ maka na-n'ọnọdụ mmeghachi omume, mmeghachi omume okpomọkụ bụ 1850 ~ 2300.℃, na nchekwa okpomọkụ bụ 2 ~ 6h. Enwere ike iji oyi akwa SiC dị na 24 in (60.96 cm) otu ọkụ na-eto kristal, na ojiji ojiji bụ 1500.℃, a na-achọpụtakwa na ọ dịghị ihe na-agbawa ma na-adaba ntụ ntụ n'elu cylinder ndu graphite mgbe 1500h gasịrị.

1.3 Ngwa na ọganihu nyocha na mkpuchi mkpuchi cylinder

Dị ka otu n'ime isi akụkụ nke monocrystalline silicon thermal field system, a na-ejikarị cylinder mkpuchi mee ihe iji belata ọnwụ okpomọkụ ma na-achịkwa gradient okpomọkụ nke gburugburu ebe okpomọkụ. Dị ka akụkụ na-akwado nke ime mgbidi mkpuchi oyi akwa nke otu ọkụ kristal, silicon vapor corrosion na-eduga na nkwụsịtụ slag na mgbawa nke ngwaahịa, nke na-emecha na-eduga ná ọdịda ngwaahịa.

Iji kwalite nguzogide silicon vapor corrosion nke C / C-sic composite insulation tube, ndị nyocha ahụ na-etinye ngwaahịa C / C-sic composite insulation tube nke a kwadebere n'ime ọkụ mmeghachi omume nke kemịkalụ, ma kwadebere mkpuchi silicon carbide siri ike na. elu nke C/C-sic composite insulation tube ngwaahịa site kemịkalụ mwepu ntinye usoro. Nsonaazụ na-egosi na, Usoro ahụ nwere ike igbochi corrosion nke carbon fiber na isi nke C / C-sic composite site na silicon vapor, na nguzogide corrosion nke silicon vapor na-abawanye site na 5 ruo 10 ugboro ma e jiri ya tụnyere carbon / carbon composite, na ndụ ọrụ nke mkpuchi mkpuchi cylinder na nchekwa nke gburugburu ebe okpomọkụ na-eme ka ọ dịkwuo mma.

2.Mmechi na atụmanya

Ihe mkpuchi silicon carbidea na-ejikarị eme ihe na carbon/carbon thermal ubi ihe n'ihi na nke magburu onwe oxidation iguzogide na elu okpomọkụ. N'ịbawanye nha nke ihe ọkụkụ carbon / carbon thermal nke ejiri na mmepụta silicon monocrystalline, otu esi emeziwanye otu mkpuchi silicon carbide n'elu ihe ọkụkụ ọkụ ma melite ndụ ọrụ nke ihe ọkụkụ carbon / carbon thermal abụrụla nsogbu dị ngwa. a ga-edozi.

N'aka nke ọzọ, na mmepe nke ụlọ ọrụ silicon monocrystalline, ọchịchọ maka ihe ọkụkụ dị ọcha nke carbon / carbon thermal na-abawanye, na SiC nanofibers na-etolitekwa na eriri carbon dị n'ime n'oge mmeghachi omume. Ọnụọgụ oke na ọnụ ọgụgụ ablation nke C/C-ZRC na C/C-sic ZrC mejupụtara ndị a kwadebere site na nnwale bụ -0.32 mg/s na 2.57μm/s, n'otu n'otu. Ọnụọgụ oke na ahịrị ablation nke C/C-sic-ZrC mejupụtara bụ -0.24mg/s na 1.66μm/s, n'otu n'otu. Ngwakọta C/C-ZRC nwere SiC nanofibers nwere ihe mgbochi ka mma. Mgbe e mesịrị, a ga-amụ mmetụta nke ihe dị iche iche carbon dị iche iche na uto nke SiC nanofibers na usoro nke SiC nanofibers na-eme ka ihe ndị na-emepụta ihe nke C/C-ZRC dị ike.

A kwadebere ihe mkpuchi ihe mejupụtara carbon/carbon composite crucible site na usoro ikuku vapor na mmeghachi omume n'ime ọnọdụ. Ihe mkpuchi ahụ mejupụtara bụ mkpuchi silicon carbide (100 ~ 300μm), mkpuchi silicon (10 ~ 20μm) na silicon nitride mkpuchi (50 ~ 100μm), nke nwere ike igbochi corrosion nke vapor silicon n'elu ime nke carbon/carbon composite crucible. Na usoro mmepụta, mfu nke ihe mkpuchi carbon / carbon composite crucible bụ 0.04 mm kwa ọkụ, na ndụ ọrụ nwere ike iru 180 ọkụ ugboro.