Semiconductor ụlọ ọrụ chọrọ nke graphite ihe onwunwe chọrọ bụ karịsịa elu, ezi urughuru size nke graphite nwere elu nkenke, elu okpomọkụ na-eguzogide, elu ike, obere ọnwụ na ndị ọzọ uru, dị ka: sintered graphite ngwaahịa ebu.N'ihi na akụrụngwa graphite a na-eji na ụlọ ọrụ semiconductor (gụnyere ndị na-ekpo ọkụ na ndị na-anwụ anwụ ha) chọrọ ka ọ na-eguzogide usoro kpo oku ugboro ugboro, iji gbasaa ndụ ọrụ graphite, a na-achọkarị na ihe ndị graphite na-eji arụ ọrụ kwụsiri ike. na ọrụ mmetụta na-eguzogide okpomọkụ.
01 Ngwa eserese maka uto kristal semiconductor
Usoro niile eji emepụta kristal semiconductor na-arụ ọrụ n'okpuru oke okpomọkụ yana gburugburu ebe na-emebi emebi. Mpaghara na-ekpo ọkụ nke ọkụ ọkụ kristal na-ejikarị ihe ndị na-ekpo ọkụ na-ekpo ọkụ na corrosion na-eguzogide graphite dị ọcha, dị ka ikpo ọkụ, crucible, mkpuchi mkpuchi, cylinder ndu, electrode, njide crucible, electrode nut, wdg.
Anyị nwere ike ịmepụta akụkụ graphite niile nke ngwaọrụ mmepụta kristal, nke enwere ike ịnye ya n'otu n'otu ma ọ bụ na nhazi, ma ọ bụ akụkụ graphite ahaziri nke nha dị iche iche dịka ihe ndị ahịa chọrọ. Enwere ike ịlele nha ngwaahịa na saịtị, yana ọdịnaya ash nke ngwaahịa emechara nwere ike ịdị ntakịrịkarịa 5ppm.
Ngwa 02 Graphite maka epitaxy semiconductor
Usoro epitaxial na-ezo aka na uto nke oyi akwa nke otu ihe kristal nwere otu nhazi lattice dị ka mkpụrụ na otu mkpụrụ kristal. Na usoro epitaxial, a na-etinye wafer na diski graphite. Ịrụ ọrụ na àgwà nke diski graphite na-arụ ọrụ dị mkpa n'ịdị mma nke epitaxial oyi akwa nke wafer. N'ọhịa nke mmepụta epitaxial, a chọrọ ọtụtụ graphite ultra-high dị ọcha na isi graphite dị elu na mkpuchi SIC.
Ụlọ ọrụ graphite nke ụlọ ọrụ anyị maka semiconductor epitaxy nwere ngwa dịgasị iche iche, nwere ike dakọtara ọtụtụ n'ime ngwá ọrụ ndị a na-ejikarị eme ihe na ụlọ ọrụ ahụ, ma nwee ịdị ọcha dị elu, mkpuchi edo, ndụ ọrụ magburu onwe ya, na nnukwu nguzogide kemịkalụ na nkwụsi ike.
03 Ngwa eserese maka ntinye ion
Ntinye ion ion na-ezo aka na usoro nke ịgbatị eriri plasma nke boron, phosphorus na arsenic na ike ụfọdụ, wee tinye ya n'ime akwa oyi akwa nke ihe wafer iji gbanwee ihe onwunwe nke oyi akwa elu. A ga-eme ihe ndị dị na ngwaọrụ ntinye ion nke ihe dị elu dị ọcha nke nwere ezigbo okpomọkụ na-eguzogide, okpomọkụ conductivity, obere corrosion nke ion beam na obere adịghị ọcha ọdịnaya. Grafite dị elu na-adị ọcha na-ezute ngwa a chọrọ, a pụkwara iji ya mee ihe maka tube ụgbọ elu, slits dị iche iche, electrodes, electrode cover, conduits, beam terminators, etc. nke ion implantation akụrụngwa.
Anyị nwere ike ọ bụghị nanị na-enye graphite mkpuchi mkpuchi maka dị iche iche ion implantation igwe, ma na-enye elu-ọcha graphite electrodes na ion isi mmalite na elu corrosion iguzogide nke dị iche iche nkọwa. Ụdị ọdabara: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM na ngwa ndị ọzọ. Na mgbakwunye, anyị nwekwara ike ịnye seramiiki dabara adaba, tungsten, molybdenum, ngwaahịa aluminum na akụkụ mkpuchi.
04 Ihe mkpuchi graphite na ndị ọzọ
Ihe mkpuchi ọkụ ejiri na akụrụngwa mmepụta semiconductor gụnyere graphite siri ike mmetụta, mmetụta dị nro, foil graphite, akwụkwọ graphite, na eriri graphite.
A na-ebubata akụrụngwa anyị niile graphite, nke enwere ike ịkpụ dị ka ihe ndị ahịa chọrọ ma ọ bụ ree ya n'ozuzu ya.
A na-eji tray carbon-carbon dị ka onye na-ebu maka mkpuchi ihe nkiri na usoro mmepụta nke silicon monocrystalline nke anyanwụ na mkpụrụ ndụ silicon polycrystalline. Ụkpụrụ na-arụ ọrụ bụ: tinye mgbawa silicon n'ime tray CFC wee ziga ya n'ime ọkụ ọkụ iji hazie mkpuchi ihe nkiri ahụ.
