Tantalum carbide coated susceptor rau wafer

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VET Energy Tantalum carbide coated susceptor rau wafer yog cov khoom ua tau zoo tsim los muab kev ua tau zoo thiab txhim khu kev qha nyob rau lub sijhawm ntev. Nws muaj super zoo kub tsis kam thiab thermal uniformity, siab purity, yaig kuj, ua rau nws zoo meej tov rau wafer ua daim ntaub ntawv.


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Khoom cim npe

TaC txheej yog ib hom tantalum carbide (TaC) txheej npaj los ntawm lub cev vapor deposition tshuab, nws muaj cov yam ntxwv hauv qab no:

1. High hardness: TaC txheej hardness yog siab, feem ntau muaj peev xwm ncav cuag 2500-3000HV, yog ib qho zoo heev txheej txheej.

2. Hnav tsis kam: TaC txheej yog hnav-resistant, uas tuaj yeem txo qhov hnav thiab kev puas tsuaj ntawm cov khoom siv kho tshuab thaum siv.

3. Zoo kub tsis kam: TaC txheej kuj tuaj yeem tswj nws qhov kev ua tau zoo nyob rau hauv qhov kub thiab txias.

4. Kev ruaj ntseg tshuaj zoo: TaC txheej muaj tshuaj lom neeg ruaj khov thiab tuaj yeem tiv taus ntau yam tshuaj lom neeg, xws li acids thiab bases.

6 (3)
Tantalum Carbide CVD Txheej EPI Susceptor_Semicera (1)

碳化钽涂层物理特性物理特性

Lub cev muaj zog ntawm TaC txheej

密度/ Ceev

14.3 (g / cm³)

比辐射率 / Tshwj xeeb emissivity

0.3

热膨胀系数 / Thermal expansion coefficient

6.3 10-6/K

努氏硬度/ Hardness (HK)

2000 HK

电阻 / Tsis kam

1 × 10-5 Aw* cm

热稳定性 / Thermal stability

<2500 ℃

石墨尺寸变化 / Graphite loj hloov

-10 ~ 20 hli

涂层厚度 / Txheej thickness

≥20um tus nqi raug (35um ± 10um)

 

Ningbo VET Energy Technology Co., Ltd yog lub tuam txhab high-tech tsom rau kev tsim khoom thiab muag khoom ntawm cov khoom siv siab kawg, cov ntaub ntawv thiab thev naus laus zis npog graphite, silicon carbide, ceramics, kho deg thiab lwm yam. Cov khoom siv dav siv hauv photovoltaic, semiconductor, lub zog tshiab, metallurgy, thiab lwm yam ..

Peb pab neeg ua haujlwm los ntawm cov tsev kawm tshawb fawb saum toj kawg nkaus hauv tebchaws, tuaj yeem muab cov ntaub ntawv tshaj lij tshaj lij rau koj.

Zoo siab txais tos koj tuaj xyuas peb lub Hoobkas, cia peb tham ntxiv!

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