SiC coated graphite qhov chaw rau SiC epitaxial khoom los ntawm LPE Ltalis
Khoom taw qhia thiab kev siv: SiC epitaxial khoom tshuaj tiv thaiv chamber lwm qhov chaw ntawm lub tsheb, tswj kub
Ntaus qhov chaw ntawm cov khoom: nyob rau hauv cov tshuaj tiv thaiv chamber, tsis nyob rau hauv ncaj qha kev sib cuag nrog lub wafer
Cov khoom tseem ceeb hauv qab: cov khoom siv hluav taws xob
Kev lag luam tseem ceeb ntawm lub davhlau ya nyob twg: tsheb tshiab zog