Thawj tiam ntawm cov khoom siv semiconductor yog sawv cev los ntawm cov tsoos silicon (Si) thiab germanium (Ge), uas yog lub hauv paus rau kev tsim hluav taws xob sib xyaw. Lawv tau dav siv nyob rau hauv low-voltage, low-frequency, thiab low-power transistors thiab detectors. Ntau tshaj 90% ntawm cov khoom siv semiconductor yog ua los ntawm cov khoom siv silicon;
Cov khoom siv semiconductor thib ob yog sawv cev los ntawm gallium arsenide (GaAs), indium phosphide (InP) thiab gallium phosphide (GaP). Piv nrog cov khoom siv silicon, lawv muaj cov khoom siv hluav taws xob ntau zaus thiab kev kub ceev optoelectronic thiab tau siv dav hauv kev lag luam optoelectronics thiab microelectronics. ;
Lub cim thib peb ntawm cov khoom siv semiconductor yog sawv cev los ntawm cov khoom siv tshiab xws li silicon carbide (SiC), gallium nitride (GaN), zinc oxide (ZnO), pob zeb diamond (C), thiab txhuas nitride (AlN).
Silicon carbideyog ib qho tseem ceeb ntawm cov khoom siv rau kev loj hlob ntawm kev lag luam semiconductor thib peb. Silicon carbide cov khoom siv hluav taws xob tuaj yeem ua tau raws li kev ua haujlwm siab, miniaturization thiab lub teeb yuag ntawm lub zog hluav taws xob hluav taws xob nrog lawv cov kev ua haujlwm siab-voltage zoo, kub tsis kam, tsis tshua muaj zog thiab lwm yam khoom.
Vim tias nws cov khoom zoo tshaj plaws ntawm lub cev: qhov sib txawv ntawm qhov siab (raws li kev tawg hluav taws xob siab thiab lub zog siab ceev), hluav taws xob conductivity siab, thiab siab thermal conductivity, nws yuav tsum yog cov khoom siv dav tshaj plaws rau kev ua semiconductor chips yav tom ntej. . Tshwj xeeb tshaj yog nyob rau hauv lub teb ntawm lub zog tshiab tsheb, photovoltaic zog tiam, rail transit, ntse daim phiaj thiab lwm yam teb, nws muaj cuab kev zoo.
SiC cov txheej txheem tsim khoom tau muab faib ua peb kauj ruam loj: SiC ib leeg siv lead ua kev loj hlob, epitaxial txheej kev loj hlob thiab kev tsim khoom siv, uas sib haum rau plaub qhov txuas loj ntawm cov saw hlau:substrate, epitaxy, pab kiag li lawm thiab modules.
Txoj kev tseem ceeb ntawm kev tsim substrates ua ntej siv lub cev vapor sublimation txoj kev los sublimate cov hmoov nyob rau hauv ib tug high-temperature nqus tsev vacuum, thiab loj hlob silicon carbide crystals nyob rau saum npoo ntawm cov noob siv lead ua los ntawm kev tswj ntawm qhov kub thiab txias. Siv cov silicon carbide wafer ua lub substrate, tshuaj vapor deposition yog siv los tso ib txheej ntawm ib tug siv lead ua rau lub wafer los ua ib tug epitaxial wafer. Ntawm lawv, kev loj hlob ntawm silicon carbide epitaxial txheej ntawm cov khoom siv hluav taws xob silicon carbide substrate tuaj yeem ua rau cov khoom siv hluav taws xob, uas feem ntau yog siv hauv tsheb fais fab, photovoltaics thiab lwm yam; loj hlob ib txheej gallium nitride epitaxial ntawm ib nrab-insulatingsilicon carbide substratetuaj yeem ua ntxiv rau hauv xov tooj cua zaus, siv hauv 5G kev sib txuas lus thiab lwm yam.
Txog tam sim no, silicon carbide substrates muaj cov txheej txheem siab tshaj plaws hauv kev lag luam silicon carbide saw, thiab silicon carbide substrates yog qhov nyuaj tshaj plaws los tsim.
Kev tsim cov fwj ntawm SiC tsis tau daws tag nrho, thiab cov khoom siv raw khoom siv lead ua zoo tsis ruaj khov thiab muaj teeb meem tawm los, uas ua rau cov nqi siab ntawm SiC. Nws tsuas yog siv sijhawm li 3 hnub rau cov khoom siv silicon loj hlob mus rau hauv cov pas nrig siv lead ua, tab sis nws yuav siv sij hawm ib lub lis piam rau silicon carbide siv lead ua pas nrig. Feem ntau silicon siv lead ua pas nrig tuaj yeem loj hlob 200cm ntev, tab sis silicon carbide siv lead ua qws tuaj yeem loj hlob 2cm ntev. Ntxiv mus, SiC nws tus kheej yog ib qho nyuaj thiab nkig, thiab wafers ua los ntawm nws yog feem ntau mus rau ntug chipping thaum siv tsoos mechanical txiav wafer dicing, uas cuam tshuam rau cov khoom yield thiab kev ntseeg tau. SiC substrates yog qhov txawv ntawm cov tsoos silicon ingots, thiab txhua yam los ntawm cov khoom siv, txheej txheem, ua rau txiav yuav tsum tau tsim los tswj silicon carbide.
Cov saw hlau silicon carbide kev lag luam feem ntau muab faib ua plaub qhov txuas loj: substrate, epitaxy, khoom siv thiab kev siv. Cov ntaub ntawv substrate yog lub hauv paus ntawm kev lag luam saw, cov ntaub ntawv epitaxial yog tus yuam sij rau kev tsim khoom, cov khoom siv yog cov tseem ceeb ntawm cov saw hlau kev lag luam, thiab kev siv yog lub zog tsav rau kev tsim kho. Kev lag luam sab saud siv cov khoom siv raw los ua cov ntaub ntawv substrate los ntawm lub cev vapor sublimation txoj kev thiab lwm txoj hauv kev, thiab tom qab ntawd siv cov tshuaj vapor deposition txoj kev thiab lwm txoj hauv kev los loj hlob cov ntaub ntawv epitaxial. Kev lag luam nruab nrab siv cov khoom siv ntws los ua cov xov tooj cua zaus, cov cuab yeej hluav taws xob thiab lwm yam khoom siv, uas yog siv thaum kawg hauv kev sib txuas lus hauv qab 5G. , hluav taws xob tsheb, kev tsheb ciav hlau, thiab lwm yam. Ntawm lawv, substrate thiab epitaxy account rau 60% ntawm tus nqi ntawm kev lag luam saw thiab yog tus nqi tseem ceeb ntawm kev lag luam saw.
SiC substrate: SiC crystals feem ntau yog tsim los ntawm Lely txoj kev. Cov khoom lag luam thoob ntiaj teb tau hloov pauv los ntawm 4 ntiv mus rau 6 ntiv tes, thiab 8-inch conductive substrate khoom tau tsim. Cov substrates hauv tsev feem ntau yog 4 ntiv tes. Txij li thaum uas twb muaj lawm 6-nti silicon wafer cov kab ntau lawm tuaj yeem hloov kho thiab hloov pauv los tsim SiC cov cuab yeej, cov khoom lag luam siab ntawm 6-nti SiC substrates yuav khaws cia ntev.
Cov txheej txheem silicon carbide substrate yog complex thiab nyuaj rau tsim. Silicon carbide substrate yog cov khoom siv semiconductor ib qho khoom siv lead ua uas muaj ob lub ntsiab lus: carbon thiab silicon. Tam sim no, kev lag luam feem ntau yog siv high-purity carbon hmoov thiab high-purity silicon hmoov ua raw cov ntaub ntawv los ua ke silicon carbide hmoov. Nyob rau hauv qhov chaw tshwj xeeb qhov kub thiab txias, txoj kev loj hlob ntawm lub cev vapor kis tau tus mob (PVT txoj kev) yog siv los loj hlob silicon carbide ntawm ntau qhov sib txawv hauv qhov cub siv lead ua. Cov siv lead ua ingot thaum kawg ua tiav, txiav, hauv av, polished, ntxuav thiab lwm yam txheej txheem los tsim cov silicon carbide substrate.
Post lub sij hawm: May-22-2024