High-purity graphite Cheebtsam yog qhov tseem ceeb raucov txheej txheem hauv semiconductor, LED thiab hnub ci kev lag luam. Peb muab ntau yam ntawm graphite consumables rau siv lead ua loj hlob kub zones (heaters, crucible susceptors, rwb thaiv tsev), mus rau high-precision graphite Cheebtsam rau wafer ua khoom, xws li silicon carbide coated graphite susceptors rau Epitaxy los yog MOCVD. Qhov no yog qhov uas peb cov graphite tshwj xeeb los ua si: isostatic graphite yog qhov tseem ceeb rau kev tsim cov txheej txheem semiconductor.Cov no yog tsim nyob rau hauv "kub cheeb tsam" nyob rau hauv huab cua kub thaum lub sij hawm hu ua epitaxy, los yog MOCVD txheej txheem. Lub rotating carrier uas cov wafers coated nyob rau hauv lub reactor, muaj silicon carbide-coated isostatic graphite. Tsuas yog qhov no ntshiab heev, homogeneous graphite ua tau raws li qhov yuav tsum tau ua hauv cov txheej txheem txheej.
Tnws lub hauv paus ntsiab lus ntawm LED epitaxial wafer kev loj hlob yog: ntawm lub substrate (feem ntau sapphire, SiC thiab Si) rhuab mus rau qhov kub thiab txias, cov khoom siv gaseous InGaAlP raug thauj mus rau lub substrate nto nyob rau hauv ib qho kev tswj kom loj hlob ib tug tshwj xeeb siv lead ua zaj duab xis. Tam sim no, kev loj hlob thev naus laus zis ntawm LED epitaxial wafer tsuas yog siv cov organic hlau chemical vapor deposition.
LED epitaxial substrate khoomyog lub hauv paus ntawm kev txhim kho thev naus laus zis ntawm semiconductor teeb pom kev lag luam. Cov khoom sib txawv ntawm cov khoom siv substrate xav tau sib txawv LED epitaxial wafer txoj kev loj hlob technology, chip processing technology thiab ntaus ntawv ntim tshuab. Cov ntaub ntawv substrate txiav txim siab txoj kev txhim kho ntawm semiconductor teeb pom kev lag luam.
Cov yam ntxwv ntawm LED epitaxial wafer substrate khoom xaiv:
1. Cov khoom siv epitaxial muaj cov qauv siv lead ua zoo ib yam lossis zoo sib xws nrog cov substrate, me me lattice tas li tsis sib haum, zoo crystallinity thiab qhov tsis xws luag.
2. Cov yam ntxwv zoo sib xws, ua rau lub nucleation ntawm cov ntaub ntawv epitaxial thiab muaj zog adhesion
3. Nws muaj tshuaj lom neeg ruaj khov thiab tsis yooj yim rau decompose thiab corrode nyob rau hauv qhov kub thiab txias ntawm epitaxial kev loj hlob
4. Kev ua haujlwm zoo thermal, nrog rau cov thermal conductivity zoo thiab thermal tsis sib haum
5. Zoo conductivity, tuaj yeem ua rau sab sauv thiab qis 6, kev ua haujlwm kho qhov muag zoo, thiab lub teeb tawm los ntawm cov khoom siv fabricated yog tsawg absorbed los ntawm substrate.
7. Cov khoom siv kho tshuab zoo thiab kev ua haujlwm yooj yim ntawm cov khoom siv, suav nrog thinning, polishing thiab txiav
8. Tus nqi qis.
9. Loj loj. Feem ntau, txoj kab uas hla yuav tsum tsis pub tsawg tshaj 2 ntiv tes.
10. Nws yog ib qho yooj yim kom tau txais cov duab zoo li niaj zaus substrate (tshwj tsis yog muaj lwm yam tshwj xeeb), thiab cov khoom siv substrate zoo ib yam li lub tais qhov ntawm cov khoom siv epitaxial tsis yooj yim rau kev ua tsis zoo eddy tam sim no, thiaj li cuam tshuam rau cov epitaxial zoo.
11. Nyob rau hauv lub ntsiab lus ntawm tsis cuam tshuam rau lub epitaxial zoo, lub machinability ntawm lub substrate yuav tsum tau raws li qhov yuav tsum tau ntawm cov chips tom ntej thiab ntim khoom kom deb li deb tau.
Nws yog ib qho nyuaj heev rau kev xaiv ntawm substrate kom tau raws li saum toj no kaum ib yam nyob rau tib lub sij hawm. Yog li ntawd, tam sim no, peb tsuas tuaj yeem hloov kho rau R & D thiab tsim cov khoom siv hluav taws xob semiconductor ntawm cov substrates sib txawv los ntawm kev hloov pauv ntawm epitaxial kev loj hlob technology thiab kev hloov kho ntawm cov cuab yeej ua tshuab. Muaj ntau cov ntaub ntawv substrate rau kev tshawb fawb gallium nitride, tab sis tsuas muaj ob lub substrates uas tuaj yeem siv rau kev tsim khoom, xws li sapphire Al2O3 thiab silicon carbide.SiC substrate.
Post lub sij hawm: Feb-28-2022