Koj tuaj yeem nkag siab nws txawm tias koj tsis tau kawm physics lossis lej, tab sis nws yooj yim me ntsis thiab tsim nyog rau cov pib tshiab. Yog tias koj xav paub ntau ntxiv txog CMOS, koj yuav tsum nyeem cov ntsiab lus ntawm qhov teeb meem no, vim tias tsuas yog tom qab nkag siab txog cov txheej txheem ntws (uas yog, cov txheej txheem ntau lawm ntawm diode) koj tuaj yeem nkag siab cov ntsiab lus hauv qab no. Tom qab ntawd cia peb kawm txog yuav ua li cas lub CMOS no yog tsim nyob rau hauv lub tuam txhab foundry hauv qhov teeb meem no (kev noj cov txheej txheem tsis ua ntej ua piv txwv, CMOS ntawm cov txheej txheem siab heev yog qhov sib txawv hauv cov qauv thiab cov qauv tsim khoom).
Ua ntej tshaj plaws, koj yuav tsum paub tias cov wafers uas lub foundry tau txais los ntawm tus neeg muag khoom (silicon wafertus neeg muag khoom) yog ib qho los ntawm ib qho, nrog lub vojvoog ntawm 200mm (8-inchHoobkas) los yog 300mm (12-ntiHoobkas). Raws li pom hauv daim duab hauv qab no, nws zoo ib yam li lub ncuav mog qab zib loj, uas peb hu ua substrate.
Txawm li cas los xij, nws tsis yooj yim rau peb saib nws li no. Peb saib los ntawm hauv qab mus rau sab saud thiab saib ntawm qhov hla ntu saib, uas dhau los ua daim duab hauv qab no.
Tom ntej no, cia saib seb tus qauv CMOS zoo li cas. Txij li cov txheej txheem tiag tiag xav tau ntau txhiab tus kauj ruam, kuv yuav tham txog cov kauj ruam tseem ceeb ntawm qhov yooj yim 8-nti wafer ntawm no.
Ua Zoo thiab Inversion Txheej:
Ntawd yog, qhov dej yog cog rau hauv lub substrate los ntawm ion implantation (Ion Implantation, hereinafter hu ua imp). Yog tias koj xav ua NMOS, koj yuav tsum cog cov qhov dej P-hom. Yog tias koj xav ua PMOS, koj yuav tsum cog N-hom qhov dej. Rau koj yooj yim, cia peb coj NMOS ua piv txwv. ion implantation tshuab implants P-hom ntsiab yuav tsum tau cog rau hauv lub substrate mus rau ib tug tshwj xeeb qhov tob, thiab ces heats lawv ntawm kub kub nyob rau hauv lub cub tawg raj kom qhib tau cov ions thiab diffuse lawv nyob ib ncig ntawm. Qhov no ua kom tiav cov khoom ntawm lub qhov dej. Qhov no yog qhov zoo li tom qab kev tsim khoom tiav.
Tom qab ua lub qhov dej, muaj lwm yam ion implantation cov kauj ruam, lub hom phiaj yog los tswj qhov loj ntawm cov channel tam sim no thiab qhov pib voltage. Txhua tus tuaj yeem hu nws cov txheej txheem inversion. Yog tias koj xav ua NMOS, txheej inversion yog cog nrog P-hom ions, thiab yog tias koj xav ua PMOS, txheej inversion yog cog nrog N-hom ions. Tom qab implantation, nws yog cov qauv hauv qab no.
Muaj ntau cov ntsiab lus ntawm no, xws li lub zog, lub kaum ntse ntse, ion concentration thaum ion implantation, thiab lwm yam, uas tsis suav nrog hauv qhov teeb meem no, thiab kuv ntseeg tias yog koj paub cov khoom no, koj yuav tsum yog tus neeg sab hauv, thiab koj. yuav tsum muaj txoj kev kawm lawv.
Ua SiO2:
Silicon dioxide (SiO2, tom qab no hu ua oxide) yuav ua tom qab. Hauv CMOS txheej txheem ntau lawm, muaj ntau txoj hauv kev los ua oxide. Ntawm no, SiO2 siv nyob rau hauv lub rooj vag, thiab nws cov tuab ncaj qha cuam tshuam qhov loj ntawm qhov pib voltage thiab qhov loj ntawm cov channel tam sim no. Yog li ntawd, feem ntau cov foundries xaiv lub cub tawg oxidation txoj kev nrog lub siab tshaj plaws zoo, meej meej thickness tswj, thiab qhov zoo tshaj plaws uniformity ntawm cov kauj ruam no. Qhov tseeb, nws yog qhov yooj yim heev, uas yog, nyob rau hauv lub cub hluav taws xob raj nrog oxygen, kub kub yog siv los tso pa oxygen thiab silicon rau cov tshuaj lom neeg los tsim SiO2. Nyob rau hauv txoj kev no, ib txheej nyias ntawm SiO2 yog tsim rau saum npoo ntawm Si, raws li qhia hauv daim duab hauv qab no.
Tau kawg, tseem muaj ntau cov ntaub ntawv tshwj xeeb ntawm no, xws li yuav tsum muaj pes tsawg degrees, yuav tsum muaj cov pa oxygen ntau npaum li cas, xav tau qhov kub thiab txias ntev npaum li cas, thiab lwm yam. Cov no tsis yog qhov peb tab tom xav txog tam sim no, cov no yog tshwj xeeb dhau.
Tsim cov rooj vag kawg Poly:
Tab sis tseem tsis tau tas. SiO2 tsuas yog sib npaug rau cov xov, thiab lub rooj vag tiag (Poly) tseem tsis tau pib. Yog li peb cov kauj ruam tom ntej yog nteg ib txheej ntawm polysilicon ntawm SiO2 (polysilicon kuj yog tsim los ntawm ib qho silicon caij, tab sis cov txheej txheem lattice sib txawv. Tsis txhob nug kuv tias vim li cas lub substrate siv tib lub siv lead ua silicon thiab lub rooj vag siv polysilicon. yog ib phau ntawv hu ua Semiconductor Physics Koj tuaj yeem kawm txog nws qhov txaj muag. Poly kuj tseem yog qhov txuas tseem ceeb hauv CMOS, tab sis cov khoom ntawm poly yog Si, thiab nws tsis tuaj yeem tsim los ntawm cov tshuaj tiv thaiv ncaj qha nrog Si substrate zoo li loj hlob SiO2. Qhov no yuav tsum muaj cov lus dab neeg CVD (Chemical Vapor Deposition), uas yog los ua tshuaj lom neeg hauv lub tshuab nqus tsev thiab ua kom cov khoom tsim tawm ntawm lub wafer. Hauv qhov piv txwv no, cov khoom tsim tawm yog polysilicon, thiab tom qab ntawd los nag rau ntawm lub wafer (ntawm no kuv yuav tsum hais tias poly yog tsim nyob rau hauv lub cub hluav taws xob raj los ntawm CVD, yog li tiam ntawm poly tsis yog ua los ntawm lub tshuab ntshiab CVD).
Tab sis cov polysilicon tsim los ntawm txoj kev no yuav raug precipitated rau tag nrho wafer, thiab nws zoo li no tom qab nag lossis daus.
Kev nthuav tawm ntawm Poly thiab SiO2:
Ntawm cov kauj ruam no, cov qauv ntsug peb xav tau tiag tiag tau tsim, nrog poly rau saum, SiO2 nyob rau hauv qab, thiab lub substrate nyob rau hauv qab. Tab sis tam sim no tag nrho wafer yog zoo li no, thiab peb tsuas yog xav tau ib txoj hauj lwm tshwj xeeb los ua "faucet" qauv. Yog li ntawd muaj cov kauj ruam tseem ceeb tshaj plaws nyob rau hauv tag nrho cov txheej txheem - raug.
Peb thawj zaug kis ib txheej ntawm photoresist rau saum npoo ntawm wafer, thiab nws yuav zoo li no.
Tom qab ntawd muab lub npog ntsej muag (cov qauv hauv Circuit Court tau txhais ntawm lub npog ntsej muag) rau ntawm nws, thiab thaum kawg irradiate nws nrog lub teeb ntawm ib lub wavelength tshwj xeeb. Lub photoresist yuav qhib rau hauv thaj chaw irradiated. Txij li cov cheeb tsam thaiv los ntawm lub npog ntsej muag tsis tau teeb pom kev los ntawm lub teeb ci, qhov no ntawm photoresist tsis qhib.
Txij li cov activated photoresist yog tshwj xeeb tshaj yog yooj yim los ntxuav tawm los ntawm ib tug tshwj xeeb tshuaj kua, thaum lub unactivated photoresist tsis tuaj yeem ntxuav tam sim ntawd, tom qab irradiation, ib tug tshwj xeeb kua yog siv los ntxuav tawm lub activated photoresist, thiab thaum kawg nws yuav zoo li no, tawm hauv lub activated photoresist. photoresist qhov twg Poly thiab SiO2 yuav tsum tau khaws cia, thiab tshem tawm cov photoresist qhov twg nws tsis tas yuav khaws cia.
Post lub sij hawm: Aug-23-2024