SiC coated graphite bases feem ntau yog siv los txhawb thiab kub ib leeg siv lead ua substrates hauv cov khoom siv hlau-organic chemical vapor deposition (MOCVD). Lub thermal stability, thermal uniformity thiab lwm yam kev ua tau zoo ntawm SiC coated graphite puag ua lub luag haujlwm txiav txim siab hauv kev loj hlob ntawm cov khoom siv epitaxial, yog li nws yog qhov tseem ceeb ntawm cov khoom siv MOCVD.
Nyob rau hauv tus txheej txheem ntawm wafer manufacturing, epitaxial khaubncaws sab nraud povtseg yog ntxiv tsim nyob rau hauv ib co wafer substrates los pab txhawb kev tsim khoom. Cov khoom siv LED teeb pom kev zoo yuav tsum tau npaj cov txheej txheem epitaxial ntawm GaAs ntawm silicon substrates; SiC epitaxial txheej yog zus nyob rau hauv lub conductive SiC substrate rau kev tsim kho cov cuab yeej xws li SBD, MOSFET, thiab lwm yam, rau high voltage, siab tam sim no thiab lwm yam kev siv fais fab; GaN epitaxial txheej yog tsim los ntawm semi-insulated SiC substrate los tsim HEMT thiab lwm yam khoom siv rau kev siv RF xws li kev sib txuas lus. Cov txheej txheem no yog sib cais los ntawm cov khoom siv CVD.
Hauv cov khoom siv CVD, lub substrate tsis tuaj yeem muab tso ncaj qha rau ntawm cov hlau lossis tsuas yog muab tso rau ntawm lub hauv paus rau epitaxial deposition, vim hais tias nws cuam tshuam cov roj ntws (kab rov tav, ntsug), kub, siab, kho, tshem tawm cov pa phem thiab lwm yam. cov yam cuam tshuam. Yog li ntawd, nws yog ib qho tsim nyog yuav tsum siv lub hauv paus, thiab tom qab ntawd muab lub substrate rau ntawm lub disc, thiab tom qab ntawd siv CVD technology rau epitaxial deposition ntawm lub substrate, uas yog SiC coated graphite puag (tseem hu ua lub tais).
SiC coated graphite bases feem ntau yog siv los txhawb thiab kub ib leeg siv lead ua substrates hauv cov khoom siv hlau-organic chemical vapor deposition (MOCVD). Lub thermal stability, thermal uniformity thiab lwm yam kev ua tau zoo ntawm SiC coated graphite puag ua lub luag haujlwm txiav txim siab hauv kev loj hlob ntawm cov khoom siv epitaxial, yog li nws yog qhov tseem ceeb ntawm cov khoom siv MOCVD.
Hlau-organic chemical vapor deposition (MOCVD) yog cov thev naus laus zis tseem ceeb rau kev loj hlob epitaxial ntawm GaN zaj duab xis hauv xiav LED. Nws muaj qhov zoo ntawm kev ua haujlwm yooj yim, tswj tau qhov kev loj hlob thiab siab purity ntawm GaN films. Raws li ib qho tseem ceeb nyob rau hauv cov tshuaj tiv thaiv chamber ntawm MOCVD cov cuab yeej, cov bearing puag siv rau GaN zaj duab xis epitaxial loj hlob yuav tsum muaj qhov zoo ntawm kub tsis kam, uniform thermal conductivity, zoo tshuaj stability, muaj zog thermal shock resistance, thiab lwm yam. cov xwm txheej saum toj no.
Raws li ib qho ntawm cov khoom tseem ceeb ntawm MOCVD cov cuab yeej, graphite puag yog cov cab kuj thiab cua sov lub cev ntawm lub substrate, uas ncaj qha txiav txim siab lub uniformity thiab purity ntawm cov ntaub ntawv zaj duab xis, yog li nws zoo cuam tshuam ncaj qha rau kev npaj ntawm daim ntawv epitaxial, thiab tib yam. lub sij hawm, nrog rau kev nce ntawm tus naj npawb ntawm kev siv thiab kev hloov ntawm kev ua hauj lwm tej yam kev mob, nws yog heev yooj yim mus hnav, teej tug mus rau consumables.
Txawm hais tias graphite muaj cov thermal conductivity zoo thiab kev ruaj ntseg, nws muaj qhov zoo kom zoo raws li lub hauv paus ntawm MOCVD cov cuab yeej, tab sis nyob rau hauv cov txheej txheem ntau lawm, graphite yuav corrode cov hmoov vim cov residue ntawm corrosive gases thiab metallic organics, thiab cov kev pab cuam lub neej. graphite puag yuav txo qis heev. Nyob rau tib lub sijhawm, cov hmoov poob graphite yuav ua rau muaj kuab paug rau cov nti.
Qhov tshwm sim ntawm txheej txheej txheej txheem tuaj yeem muab cov hmoov av fixation, txhim khu thermal conductivity, thiab sib npaug ntawm cov cua sov, uas tau dhau los ua cov thev naus laus zis tseem ceeb los daws qhov teeb meem no. Graphite puag hauv MOCVD cov cuab yeej siv ib puag ncig, graphite puag txheej txheej yuav tsum ua tau raws li cov yam ntxwv hauv qab no:
(1) Lub hauv paus graphite tuaj yeem qhwv tag nrho, thiab qhov ceev yog qhov zoo, txwv tsis pub lub graphite puag yog yooj yim rau corroded hauv cov roj corrosive.
(2) Lub zog sib xyaw ua ke nrog lub hauv paus graphite siab kom ntseeg tau tias cov txheej txheem tsis yooj yim poob tawm tom qab ob peb qhov kub thiab txias tsis tshua muaj.
(3) Nws muaj cov tshuaj lom neeg ruaj khov zoo kom tsis txhob muaj txheej txheej tsis ua haujlwm hauv qhov kub thiab txias.
SiC muaj qhov zoo ntawm kev tiv thaiv corrosion, siab thermal conductivity, thermal shock resistance thiab siab tshuaj stability, thiab tuaj yeem ua haujlwm zoo hauv GaN epitaxial cua. Tsis tas li ntawd, cov thermal expansion coefficient ntawm SiC txawv me ntsis ntawm cov graphite, yog li SiC yog cov khoom nyiam rau cov txheej txheej ntawm graphite puag.
Tam sim no, SiC hom feem ntau yog 3C, 4H thiab 6H hom, thiab SiC siv ntau hom siv lead ua sib txawv. Piv txwv li, 4H-SiC tuaj yeem tsim cov khoom siv hluav taws xob siab; 6H-SiC yog qhov ruaj khov tshaj plaws thiab tuaj yeem tsim cov khoom siv hluav taws xob photoelectric; Vim tias nws cov qauv zoo sib xws rau GaN, 3C-SiC tuaj yeem siv los tsim GaN epitaxial txheej thiab tsim cov khoom siv SiC-GaN RF. 3C-SiC kuj feem ntau hu ua β-SiC, thiab ib qho tseem ceeb ntawm kev siv β-SiC yog cov khoom siv zaj duab xis thiab txheej, yog li β-SiC yog tam sim no cov khoom tseem ceeb rau txheej.
Post lub sij hawm: Aug-04-2023