SiC coated graphite bases feem ntau yog siv los txhawb thiab kub ib leeg siv lead ua substrates hauv cov khoom siv hlau-organic chemical vapor deposition (MOCVD). Lub thermal stability, thermal uniformity thiab lwm yam kev ua tau zoo ntawm SiC coated graphite puag ua lub luag haujlwm txiav txim siab hauv kev loj hlob ntawm cov khoom siv epitaxial, yog li nws yog qhov tseem ceeb ntawm cov khoom siv MOCVD.
Nyob rau hauv tus txheej txheem ntawm wafer manufacturing, epitaxial khaubncaws sab nraud povtseg yog ntxiv tsim nyob rau hauv ib co wafer substrates los pab txhawb kev tsim khoom. Cov khoom siv LED teeb pom kev zoo yuav tsum tau npaj cov txheej txheem epitaxial ntawm GaAs ntawm silicon substrates; SiC epitaxial txheej yog zus nyob rau hauv lub conductive SiC substrate rau kev tsim kho cov cuab yeej xws li SBD, MOSFET, thiab lwm yam, rau high voltage, siab tam sim no thiab lwm yam kev siv fais fab; GaN epitaxial txheej yog tsim los ntawm semi-insulated SiC substrate los tsim HEMT thiab lwm yam khoom siv rau kev siv RF xws li kev sib txuas lus. Cov txheej txheem no yog sib cais los ntawm cov khoom siv CVD.
Hauv cov khoom siv CVD, lub substrate tsis tuaj yeem muab tso ncaj qha rau ntawm cov hlau lossis tsuas yog muab tso rau ntawm lub hauv paus rau epitaxial deposition, vim hais tias nws cuam tshuam cov roj ntws (kab rov tav, ntsug), kub, siab, kho, tshem tawm cov pa phem thiab lwm yam. cov yam cuam tshuam. Yog li ntawd, yuav tsum muaj lub hauv paus, thiab tom qab ntawd lub substrate yog muab tso rau ntawm lub disc, thiab tom qab ntawd lub epitaxial deposition yog nqa tawm ntawm lub substrate siv CVD technology, thiab lub hauv paus no yog SiC coated graphite puag (tseem hu ua lub tais).
SiC coated graphite bases feem ntau yog siv los txhawb thiab kub ib leeg siv lead ua substrates hauv cov khoom siv hlau-organic chemical vapor deposition (MOCVD). Lub thermal stability, thermal uniformity thiab lwm yam kev ua tau zoo ntawm SiC coated graphite puag ua lub luag haujlwm txiav txim siab hauv kev loj hlob ntawm cov khoom siv epitaxial, yog li nws yog qhov tseem ceeb ntawm cov khoom siv MOCVD.
Hlau-organic chemical vapor deposition (MOCVD) yog cov thev naus laus zis tseem ceeb rau kev loj hlob epitaxial ntawm GaN zaj duab xis hauv xiav LED. Nws muaj qhov zoo ntawm kev ua haujlwm yooj yim, tswj tau qhov kev loj hlob thiab siab purity ntawm GaN films. Raws li ib qho tseem ceeb nyob rau hauv cov tshuaj tiv thaiv chamber ntawm MOCVD cov cuab yeej, cov bearing puag siv rau GaN zaj duab xis epitaxial loj hlob yuav tsum muaj qhov zoo ntawm kub tsis kam, uniform thermal conductivity, zoo tshuaj stability, muaj zog thermal shock resistance, thiab lwm yam. cov xwm txheej saum toj no.
Raws li ib qho ntawm cov khoom tseem ceeb ntawm MOCVD cov cuab yeej, graphite puag yog cov cab kuj thiab cua sov lub cev ntawm lub substrate, uas ncaj qha txiav txim siab lub uniformity thiab purity ntawm cov ntaub ntawv zaj duab xis, yog li nws zoo cuam tshuam ncaj qha rau kev npaj ntawm daim ntawv epitaxial, thiab tib yam. lub sij hawm, nrog rau kev nce ntawm tus naj npawb ntawm kev siv thiab kev hloov ntawm kev ua hauj lwm tej yam kev mob, nws yog heev yooj yim mus hnav, teej tug mus rau consumables.
Txawm hais tias graphite muaj cov thermal conductivity zoo thiab kev ruaj ntseg, nws muaj qhov zoo kom zoo raws li lub hauv paus ntawm MOCVD cov cuab yeej, tab sis nyob rau hauv cov txheej txheem ntau lawm, graphite yuav corrode cov hmoov vim cov residue ntawm corrosive gases thiab metallic organics, thiab cov kev pab cuam lub neej. graphite puag yuav txo qis heev. Nyob rau tib lub sijhawm, cov hmoov poob graphite yuav ua rau muaj kuab paug rau cov nti.
Qhov tshwm sim ntawm txheej txheej txheej txheem tuaj yeem muab cov hmoov av fixation, txhim khu thermal conductivity, thiab sib npaug ntawm cov cua sov, uas tau dhau los ua cov thev naus laus zis tseem ceeb los daws qhov teeb meem no. Graphite puag hauv MOCVD cov cuab yeej siv ib puag ncig, graphite puag txheej txheej yuav tsum ua tau raws li cov yam ntxwv hauv qab no:
(1) Lub hauv paus graphite tuaj yeem qhwv tag nrho, thiab qhov ceev yog qhov zoo, txwv tsis pub lub graphite puag yog yooj yim rau corroded hauv cov roj corrosive.
(2) Lub zog sib xyaw ua ke nrog lub hauv paus graphite siab kom ntseeg tau tias cov txheej txheem tsis yooj yim poob tawm tom qab ob peb qhov kub thiab txias tsis tshua muaj.
(3) Nws muaj cov tshuaj lom neeg ruaj khov zoo kom tsis txhob muaj txheej txheej tsis ua haujlwm hauv qhov kub thiab txias.
SiC muaj qhov zoo ntawm kev tiv thaiv corrosion, siab thermal conductivity, thermal shock resistance thiab siab tshuaj stability, thiab tuaj yeem ua haujlwm zoo hauv GaN epitaxial cua. Tsis tas li ntawd, cov thermal expansion coefficient ntawm SiC txawv me ntsis ntawm cov graphite, yog li SiC yog cov khoom nyiam rau cov txheej txheej ntawm graphite puag.
Tam sim no, SiC hom feem ntau yog 3C, 4H thiab 6H hom, thiab SiC siv ntau hom siv lead ua sib txawv. Piv txwv li, 4H-SiC tuaj yeem tsim cov khoom siv hluav taws xob siab; 6H-SiC yog qhov ruaj khov tshaj plaws thiab tuaj yeem tsim cov khoom siv hluav taws xob photoelectric; Vim tias nws cov qauv zoo sib xws rau GaN, 3C-SiC tuaj yeem siv los tsim GaN epitaxial txheej thiab tsim cov khoom siv SiC-GaN RF. 3C-SiC kuj feem ntau hu ua β-SiC, thiab ib qho tseem ceeb ntawm kev siv β-SiC yog cov khoom siv zaj duab xis thiab txheej, yog li β-SiC yog tam sim no cov khoom tseem ceeb rau txheej.
Txoj kev npaj silicon carbide txheej
Tam sim no, cov txheej txheem kev npaj ntawm SiC txheej feem ntau suav nrog gel-sol txoj kev, embedding txoj kev, txhuam txheej txheej txheem, plasma spraying method, chemical gas reaction method (CVR) thiab chemical vapor deposition method (CVD).
Txoj kev embedding:
Cov txheej txheem yog ib hom kub kub khoom theem sintering, uas feem ntau yog siv cov hmoov sib tov ntawm Si hmoov thiab C hmoov raws li cov embedding hmoov, graphite matrix yog muab tso rau hauv cov hmoov embedding, thiab kub sintering yog nqa tawm nyob rau hauv lub inert roj. , thiab thaum kawg lub SiC txheej yog tau nyob rau saum npoo ntawm graphite matrix. Cov txheej txheem yog qhov yooj yim thiab kev sib xyaw ua ke ntawm cov txheej txheej thiab cov substrate yog qhov zoo, tab sis qhov sib xws ntawm txheej raws li cov thickness kev taw qhia tsis zoo, uas yog ib qho yooj yim los tsim ntau qhov thiab ua rau tsis zoo oxidation tsis kam.
Txhuam txheej txheej txheem:
Cov txheej txheem txhuam txheej yog tsuas yog txhuam cov kua raw khoom ntawm qhov chaw ntawm graphite matrix, thiab tom qab ntawd kho cov khoom siv raw ntawm qhov kub thiab txias los npaj cov txheej. Cov txheej txheem yog qhov yooj yim thiab tus nqi qis, tab sis cov txheej txheem npaj los ntawm txhuam txheej txheej tsis muaj zog ua ke nrog cov substrate, txheej txheej tsis zoo, txheej txheej yog nyias thiab oxidation tsis kam, thiab lwm yam kev xav tau los pab. nws.
Plasma txau txoj kev:
Cov txheej txheem plasma txau yog tsuas yog tshuaj tsuag cov khoom siv los yog cov khoom siv semi-melted rau saum npoo ntawm cov graphite matrix nrog rab phom plasma, thiab tom qab ntawd ua kom khov thiab sib zog los tsim cov txheej txheem. Txoj kev no yooj yim rau kev khiav lag luam thiab tuaj yeem npaj cov txheej txheem silicon carbide, tab sis cov txheej txheem silicon carbide npaj los ntawm cov txheej txheem feem ntau tsis muaj zog thiab ua rau tsis muaj zog oxidation, yog li nws feem ntau yog siv rau kev npaj ntawm SiC composite txheej los txhim kho. qhov zoo ntawm cov txheej.
Gel-sol txoj kev:
Txoj kev gel-sol feem ntau yog los npaj ib qho kev sib xyaw thiab pob tshab sol tov npog qhov chaw ntawm matrix, ziab rau hauv gel thiab ces sintering kom tau ib txheej. Txoj kev no yooj yim rau kev khiav lag luam thiab tsis tshua muaj nqi, tab sis cov txheej txheem tsim muaj qee qhov tsis zoo xws li thermal shock tsis kam thiab yooj yim tawg, yog li nws tsis tuaj yeem siv dav.
Chemical Gas Reaction (CVR):
CVR feem ntau tsim SiC txheej los ntawm kev siv Si thiab SiO2 hmoov los tsim SiO chav ntawm qhov kub thiab txias, thiab cov tshuaj lom neeg tshwm sim nyob rau saum npoo ntawm C cov ntaub ntawv substrate. SiC txheej npaj los ntawm txoj kev no yog sib txuas nrog rau lub substrate, tab sis cov tshuaj tiv thaiv kub yog siab dua thiab tus nqi siab dua.
Chemical Vapor Deposition (CVD):
Tam sim no, CVD yog lub thev naus laus zis tseem ceeb rau kev npaj SiC txheej ntawm substrate nto. Cov txheej txheem tseem ceeb yog cov tshuaj tiv thaiv lub cev thiab tshuaj lom neeg ntawm cov khoom siv roj theem reactant ntawm lub substrate nto, thiab thaum kawg SiC txheej yog npaj los ntawm deposition ntawm lub substrate nto. SiC txheej npaj los ntawm CVD thev naus laus zis tau sib raug zoo rau saum npoo ntawm substrate, uas tuaj yeem txhim kho oxidation tsis kam thiab ablative tsis kam ntawm cov khoom siv substrate, tab sis lub sij hawm tso tawm ntawm txoj kev no ntev dua, thiab cov tshuaj tiv thaiv roj muaj qee yam tshuaj lom. gas.
Qhov teeb meem kev lag luam ntawm SiC coated graphite puag
Thaum cov tuam txhab txawv teb chaws pib ntxov, lawv muaj cov hmoov txhuas ntshiab thiab muaj kev lag luam siab. Thoob ntiaj teb, cov khoom lag luam tseem ceeb ntawm SiC coated graphite puag yog Dutch Xycard, Lub Tebchaws Yelemees SGL Carbon (SGL), Nyiv Toyo Carbon, Tebchaws Meskas MEMC thiab lwm lub tuam txhab, uas pib tuav lub lag luam thoob ntiaj teb. Txawm hais tias Tuam Tshoj tau tawg los ntawm cov thev naus laus zis tseem ceeb ntawm kev loj hlob zoo ntawm SiC txheej rau ntawm qhov chaw ntawm graphite matrix, cov khoom zoo graphite matrix tseem cia siab rau German SGL, Nyiv Toyo Carbon thiab lwm cov lag luam, cov graphite matrix muab los ntawm cov lag luam hauv tsev cuam tshuam rau cov kev pabcuam. lub neej vim thermal conductivity, elastic modulus, nruj modulus, lattice defects thiab lwm yam teeb meem zoo. Cov khoom siv MOCVD tsis tuaj yeem ua tau raws li qhov yuav tsum tau ua ntawm kev siv SiC coated graphite puag.
Tuam Tshoj txoj kev lag luam semiconductor tab tom txhim kho sai, nrog kev maj mam nce ntawm MOCVD cov khoom siv epitaxial localization tus nqi, thiab lwm yam txheej txheem kev siv nthuav dav, yav tom ntej SiC coated graphite cov khoom lag luam yuav tsum loj hlob sai. Raws li kev kwv yees ua ntej kev lag luam, kev lag luam graphite hauv tsev yuav tshaj 500 lab yuan hauv ob peb xyoos tom ntej no.
SiC coated graphite puag yog lub hauv paus tseem ceeb ntawm cov khoom siv semiconductor industrialization, mastering cov thev naus laus zis tseem ceeb ntawm nws cov khoom tsim thiab kev tsim khoom, thiab paub qhov chaw ntawm tag nrho cov khoom siv raw-txheej txheem-cov cuab yeej kev lag luam cov saw hlau yog qhov tseem ceeb rau kev txhim kho kev lag luam. Tuam Tshoj txoj kev lag luam semiconductor. Lub teb ntawm domestic SiC coated graphite puag yog booming, thiab cov khoom zoo tuaj yeem ncav cuag thoob ntiaj teb qib siab sai sai.
Post lub sij hawm: Lub Xya hli ntuj-24-2023