Recrystalizedsilicon carbide (RSiC) ceramicsyog ahigh-performance ceramic khoom. Vim nws zoo heev kub tsis kam, oxidation tsis kam, corrosion kuj thiab siab hardness, nws tau dav siv nyob rau hauv ntau lub teb, xws li semiconductor manufacturing, photovoltaic kev lag luam, kub kub furnaces thiab chemical khoom. Nrog rau kev thov ntau ntxiv rau cov ntaub ntawv ua tau zoo hauv kev lag luam niaj hnub no, kev tshawb fawb thiab kev loj hlob ntawm recrystallized silicon carbide ceramics yog tob zuj zus.
1. Kev npaj technology ntawmrecrystallized silicon carbide ceramics
Kev npaj technology ntawm recrystallizedsilicon carbide ceramicsFeem ntau suav nrog ob txoj kev: hmoov sintering thiab vapor deposition (CVD). Ntawm lawv, cov hmoov sintering txoj kev yog sinter silicon carbide hmoov nyob rau hauv qhov kub thiab txias ib puag ncig kom silicon carbide hais tsim ib tug ntom qauv los ntawm diffusion thiab recrystallization ntawm nplej. Txoj kev vapor deposition yog tso silicon carbide rau ntawm qhov chaw ntawm lub substrate los ntawm cov tshuaj vapor cov tshuaj tiv thaiv ntawm qhov kub thiab txias, yog li tsim ib tug high-purity silicon carbide zaj duab xis los yog structural qhov chaw. Ob lub technologies no muaj lawv tus kheej zoo. Cov hmoov sintering txoj kev yog tsim rau loj-scale ntau lawm thiab muaj nqi tsawg, thaum lub vapor deposition txoj kev yuav muab siab dua purity thiab denser qauv, thiab yog dav siv nyob rau hauv lub semiconductor teb.
2. Cov khoom siv ntawmrecrystallized silicon carbide ceramics
Cov yam ntxwv zoo ntawm recrystallized silicon carbide ceramics yog nws cov kev ua tau zoo heev hauv qhov kub thiab txias. Lub melting point ntawm cov khoom no yog siab li 2700 ° C, thiab nws muaj zoo txhua yam muaj zog ntawm kub kub. Tsis tas li ntawd, recrystallized silicon carbide kuj muaj oxidation zoo heev thiab corrosion kuj, thiab tuaj yeem nyob ruaj khov nyob rau hauv huab cua ib puag ncig. Yog li ntawd, RSiC ceramics tau dav siv nyob rau hauv cov teb ntawm high-temperature furnaces, high-temperature refractory cov ntaub ntawv, thiab cov khoom siv tshuaj.
Tsis tas li ntawd, recrystallized silicon carbide muaj cov thermal conductivity thiab muaj peev xwm ua tau zoo cua sov, uas ua rau nws muaj ib qho tseem ceeb daim ntawv thov nqi nyob rau hauvMOCVD reactorsthiab cov khoom siv kho cua sov hauv semiconductor wafer manufacturing. Nws cov thermal conductivity siab thiab thermal poob siab ua haujlwm kom ntseeg tau tias kev ua haujlwm ruaj khov ntawm cov khoom siv nyob rau hauv huab cua.
3. Daim ntawv thov teb ntawm recrystallized silicon carbide ceramics
Kev tsim khoom semiconductor: Hauv kev lag luam semiconductor, recrystallized silicon carbide ceramics yog siv los tsim cov substrates thiab kev txhawb nqa hauv MOCVD reactors. Vim nws qhov kub thiab txias tsis kam, corrosion tsis kam, thiab thermal conductivity, RSiC cov ntaub ntawv tuaj yeem tswj kev ua haujlwm ruaj khov hauv cov tshuaj lom neeg cov tshuaj tiv thaiv ib puag ncig, kom ntseeg tau qhov zoo thiab cov txiaj ntsig ntawm semiconductor wafers.
Kev lag luam photovoltaic: Hauv kev lag luam photovoltaic, RSiC yog siv los tsim cov qauv kev txhawb nqa ntawm cov khoom siv siv lead ua loj hlob. Txij li thaum siv lead ua loj hlob yuav tsum tau nqa tawm ntawm qhov kub thiab txias thaum lub sij hawm tsim cov txheej txheem ntawm photovoltaic hlwb, lub tshav kub tsis kam ntawm recrystallized silicon carbide ua kom lub sij hawm ntev ruaj khov ntawm cov khoom siv.
Lub qhov cub kub kub: RSiC ceramics kuj tau siv dav hauv cov cua kub kub, xws li cov hauv ob sab phlu thiab cov khoom ntawm lub tshuab nqus tsev vacuum, melting furnaces thiab lwm yam khoom siv. Nws cov thermal poob siab tsis kam thiab oxidation kuj ua rau nws yog ib qho ntawm cov khoom siv tsis tuaj yeem hloov pauv hauv kev lag luam kub kub.
4. Kev tshawb fawb kev taw qhia ntawm recrystallized silicon carbide ceramics
Nrog rau kev thov loj hlob rau cov ntaub ntawv ua tau zoo, kev tshawb fawb kev taw qhia ntawm recrystallized silicon carbide ceramics tau maj mam ua kom pom tseeb. Kev tshawb fawb yav tom ntej yuav tsom mus rau cov hauv qab no:
Txhim kho cov ntaub ntawv purity: Yuav kom ua tau raws li cov kev xav tau purity siab dua hauv cov khoom siv hluav taws xob thiab cov khoom siv hluav taws xob photovoltaic, cov kws tshawb fawb tab tom tshawb nrhiav txoj hauv kev los txhim kho cov purity ntawm RSiC los ntawm kev txhim kho vapor deposition technology los yog qhia cov ntaub ntawv tshiab, yog li txhim kho nws daim ntawv thov nqi hauv cov high-tech fields. .
Optimizing microstructure: Los ntawm kev tswj cov sintering tej yam kev mob thiab kev faib ntawm cov hmoov hais, lub microstructure ntawm recrystallized silicon carbide yuav ua tau ntxiv optimized, yog li kev txhim kho nws cov cuab yeej cuab tam thiab thermal shock kuj.
Cov khoom siv sib xyaw ua haujlwm: Txhawm rau hloov mus rau qhov chaw siv ntau dua, cov kws tshawb fawb tau sim ua ke RSiC nrog lwm cov ntaub ntawv los tsim cov ntaub ntawv sib xyaw nrog cov khoom siv ntau yam, xws li recrystallized silicon carbide-raws li cov ntaub ntawv sib xyaw nrog ntau dua hnav tsis kam thiab hluav taws xob conductivity.
5. Cov lus xaus
Raws li cov khoom siv ua haujlwm siab, recrystallized silicon carbide ceramics tau siv dav hauv ntau lub teb vim lawv cov khoom zoo heev hauv qhov kub thiab txias, oxidation tsis kam thiab corrosion kuj. Kev tshawb fawb yav tom ntej yuav tsom mus rau kev txhim kho cov khoom siv purity, optimizing microstructure thiab tsim cov khoom siv sib xyaw kom tau raws li qhov kev xav tau ntawm kev lag luam loj hlob. Los ntawm cov thev naus laus zis tshiab no, recrystallized silicon carbide ceramics yuav tsum tau ua lub luag haujlwm ntau dua hauv kev ua haujlwm siab dua.
Post lub sij hawm: Oct-24-2024