Txoj kev loj hlob ntawm monocrystalline silicon yog ua tiav nyob rau hauv thermal teb. Lub tshav kub zoo yog qhov tsim nyog rau kev txhim kho cov khoom siv lead ua zoo thiab muaj cov crystallization ntau dua. Tus tsim ntawm lub tshav kub thermal feem ntau txiav txim siab qhov kev hloov ntawm qhov kub thiab txias gradients nyob rau hauv lub dynamic thermal teb thiab ntws ntawm cov roj nyob rau hauv lub cub tawg chamber. Qhov sib txawv ntawm cov khoom siv hauv thermal teb ncaj qha txiav txim siab lub neej kev pab cuam ntawm lub tshav kub thermal. Lub tshav kub tsis tsim nyog tsis yog tsuas yog nyuaj rau kev loj hlob muaju uas ua tau raws li qhov yuav tsum tau ua, tab sis kuj tsis tuaj yeem loj hlob tiav monocrystalline raws li qee cov txheej txheem yuav tsum tau ua. Qhov no yog vim li cas qhov kev lag luam ncaj qha rub monocrystalline silicon suav nrog thermal teb tsim raws li cov thev naus laus zis tshaj plaws thiab nqis peev ntau cov neeg ua haujlwm thiab cov khoom siv hauv thermal teb kev tshawb fawb thiab kev loj hlob.
Lub thermal system yog tsim los ntawm ntau yam khoom siv thermal teb. Peb tsuas yog qhia luv luv cov ntaub ntawv siv hauv thermal teb. Raws li rau qhov kub thiab txias faib nyob rau hauv thermal teb thiab nws cov kev cuam tshuam rau siv lead ua rub, peb yuav tsis soj ntsuam nws ntawm no. Cov khoom siv thermal teb hais txog cov qauv thiab thermal rwb thaiv tsev ib feem nyob rau hauv lub tshuab nqus tsev vacuum chamber ntawm siv lead ua kev loj hlob, uas yog ib qho tseem ceeb rau tsim ib tug tsim nyog kub tis nyob ib ncig ntawm lub semiconductor yaj thiab siv lead ua.
1. Cov khoom siv thermal teb
Cov khoom txhawb nqa yooj yim rau txoj kev ncaj qha rub txoj kev loj hlob monocrystalline silicon yog high-purity graphite. Cov ntaub ntawv graphite ua lub luag haujlwm tseem ceeb hauv kev lag luam niaj hnub no. Lawv tuaj yeem siv los ua cov khoom siv hluav taws xob hauv tshav kub xws licua sov, coj cov raj, crucibles, rwb thaiv tsev raj, crucible tais, thiab lwm yam nyob rau hauv kev npaj ntawm monocrystalline silicon los ntawm txoj kev Czochralski.
Cov ntaub ntawv graphiteraug xaiv vim lawv yooj yim los npaj hauv cov ntim loj, tuaj yeem ua tiav thiab tiv taus qhov kub thiab txias. Carbon nyob rau hauv daim ntawv ntawm pob zeb diamond los yog graphite muaj ib tug siab melting point tshaj tej yam los yog compound. Graphite cov ntaub ntawv muaj zog heev, tshwj xeeb tshaj yog thaum kub kub, thiab lawv cov hluav taws xob thiab thermal conductivity kuj zoo heev. Nws cov hluav taws xob conductivity ua rau nws haum raws li ib tuglub tshuab cua sovkhoom. Nws muaj qhov ua tau zoo thermal conductivity coefficient, uas tso cai rau cov cua sov uas tsim los ntawm lub rhaub kom sib npaug rau cov khoom siv hluav taws xob thiab lwm qhov chaw ntawm tshav kub. Txawm li cas los xij, ntawm qhov kub thiab txias, tshwj xeeb tshaj yog nyob rau qhov ntev, lub ntsiab cua sov hloov hom yog hluav taws xob.
Graphite qhov chaw yog thawj zaug ua los ntawm cov nplua carbonaceous hais tov nrog ib tug binder thiab tsim los ntawm extrusion los yog isostatic nias. High-zoo graphite qhov chaw feem ntau yog isostatically nias. Tag nrho cov khoom yog thawj carbonized thiab ces graphitized ntawm kub heev, ze rau 3000 ° C. Cov khoom ua tiav los ntawm tag nrho cov khoom no feem ntau yog purified nyob rau hauv ib qho chaw uas muaj chlorine ntawm qhov kub thiab txias kom tshem tawm cov hlau tsis huv kom ua tau raws li cov kev cai ntawm kev lag luam semiconductor. Txawm li cas los xij, txawm tias tom qab kev ua kom huv si zoo, theem ntawm cov hlau tsis huv yog ntau qhov kev txiav txim siab ntau dua li qhov tso cai rau cov khoom siv silicon monocrystalline. Yog li ntawd, kev saib xyuas yuav tsum tau ua nyob rau hauv lub thermal teb tsim los tiv thaiv kev kis kab mob ntawm cov khoom no los ntawm kev nkag mus rau hauv lub yaj los yog siv lead ua nto.
Cov ntaub ntawv graphite yog me ntsis permeable, uas ua rau nws yooj yim rau cov hlau seem sab hauv kom ncav cuag qhov chaw. Tsis tas li ntawd, cov silicon monoxide tam sim no nyob rau hauv cov pa pururge nyob ib ncig ntawm lub graphite nto tuaj yeem nkag mus rau hauv cov ntaub ntawv feem ntau thiab hnov mob.
Thaum ntxov monocrystalline silicon rauv rhaub tau ua los ntawm cov hlau refractory xws li tungsten thiab molybdenum. Nrog rau kev loj hlob ntawm graphite txheej txheem thev naus laus zis, cov khoom siv hluav taws xob ntawm kev sib txuas ntawm cov khoom siv graphite tau ua kom ruaj khov, thiab cov tshuab hluav taws xob monocrystalline silicon rauv tau hloov tag nrho tungsten, molybdenum thiab lwm yam khoom siv cua sov. Tam sim no, cov khoom siv graphite feem ntau siv yog isostatic graphite. kuv lub teb chaws isostatic graphite npaj tshuab yog rov qab, thiab feem ntau ntawm cov khoom siv graphite siv nyob rau hauv kev lag luam photovoltaic hauv tsev yog tuaj ntawm txawv teb chaws. Cov tuam txhab txawv teb chaws isostatic graphite feem ntau suav nrog lub teb chaws Yelemees SGL, Nyiv Tokai Carbon, Nyiv Toyo Tanso, thiab lwm yam. Hauv Czochralski monocrystalline silicon furnaces, C / C cov ntaub ntawv siv tau qee zaum siv, thiab lawv tau pib siv los tsim bolts, ceev, crucibles, load phaj thiab lwm yam khoom. Carbon / carbon (C / C) composites yog carbon fiber reinforced carbon-raws li composites nrog ib tug series ntawm zoo heev zog xws li muaj zog tshwj xeeb, siab tshwj xeeb modulus, tsis tshua muaj thermal expansion coefficient, zoo hluav taws xob conductivity, siab tawg toughness, tsis tshua muaj lub ntiajteb txawj nqus, thermal shock kuj, corrosion kuj, thiab kub kuj. Tam sim no, lawv tau siv dav hauv aerospace, kev sib tw, biomaterials thiab lwm yam kev lag luam raws li cov khoom siv hluav taws xob kub-resistant tshiab. Tam sim no, lub ntsiab bottlenecks ntsib los ntawm domestic C / C composites tseem nqi thiab industrialization teeb meem.
Muaj ntau lwm cov ntaub ntawv siv los ua thermal teb. Carbon fiber reinforced graphite muaj cov khoom siv zoo dua qub; tab sis nws kim dua thiab muaj lwm yam kev xav tau rau kev tsim.Silicon carbide (SiC)yog cov khoom siv zoo dua li graphite hauv ntau yam, tab sis nws kim dua thiab nyuaj rau kev npaj cov khoom loj. Txawm li cas los xij, SiC feem ntau siv los ua ib qhoCVD txheejtxhawm rau ua kom lub neej ntawm graphite qhov chaw raug corrosive silicon monoxide gas, thiab tseem tuaj yeem txo qhov paug ntawm graphite. Qhov ntom ntom CVD silicon carbide txheej zoo tiv thaiv cov kab mob hauv cov khoom siv graphite microporous los ntawm qhov chaw.
Lwm qhov yog CVD carbon, uas tuaj yeem tsim cov txheej tuab saum toj ntawm graphite. Lwm cov ntaub ntawv kub kub resistant, xws li molybdenum los yog ceramic cov ntaub ntawv uas tuaj yeem ua ke nrog ib puag ncig, tuaj yeem siv rau qhov uas tsis muaj kev pheej hmoo ntawm kev sib kis ntawm cov yaj. Txawm li cas los xij, oxide ceramics feem ntau txwv rau lawv qhov kev siv tau rau cov khoom siv graphite ntawm qhov kub thiab txias, thiab muaj ob peb lwm yam kev xaiv yog tias yuav tsum tau rwb thaiv tsev. Ib qho yog hexagonal boron nitride (qee zaum hu ua dawb graphite vim muaj cov khoom zoo sib xws), tab sis cov khoom siv tshuab tsis zoo. Molybdenum feem ntau yog siv tsim nyog rau qhov kub thiab txias vim tias nws cov nqi nruab nrab, qis diffusion tus nqi hauv silicon crystals, thiab qhov sib cais qis heev ntawm li 5 × 108, uas tso cai rau qee qhov molybdenum paug ua ntej rhuav tshem cov qauv siv lead ua.
2. Cov khoom siv thermal rwb thaiv tsev
Cov khoom siv rwb thaiv tsev feem ntau yog cov pa roj carbon muaj nyob hauv ntau hom. Cov pa roj carbon zoo yog ua los ntawm cov fibers nyias, uas ua raws li rwb thaiv tsev vim tias lawv thaiv cov hluav taws xob thermal ntau zaus hauv qhov luv luv. Cov pa roj carbon mos mos yog woven rau hauv cov ntaub ntawv nyias nyias, uas tom qab ntawd txiav mus rau hauv cov duab uas xav tau thiab nruj nreem khoov rau hauv lub vojvoog tsim nyog. Kho cov ntaub ntawv yog tsim los ntawm cov khoom siv fiber ntau zoo sib xws, thiab cov ntaub ntawv uas muaj cov pa roj carbon monoxide yog siv los txuas cov fibers dispersed mus rau hauv ib qho khoom zoo thiab zoo li qub. Kev siv cov tshuaj vapor deposition ntawm carbon es tsis txhob ntawm ib tug binder tuaj yeem txhim kho cov khoom ntawm cov khoom.
Feem ntau, sab nrauv ntawm lub thermal rwb thaiv tsev curing xav yog coated nrog ib tug nruam graphite txheej los yog ntawv ci kom txo tau yaig thiab hnav nrog rau cov pa paug. Lwm hom ntawm cov khoom siv thermal rwb thaiv tsev kuj tseem muaj, xws li cov pa roj carbon monoxide. Feem ntau, cov ntaub ntawv graphitized yog pom tseeb dua vim tias graphitization zoo heev txo qhov chaw ntawm cov fiber ntau. Lub outgassing ntawm cov ntaub ntawv saum npoo av no tau txo qis heev, thiab nws yuav siv sij hawm tsawg dua los tso lub qhov cub rau lub tshuab nqus tsev. Lwm qhov yog C / C cov khoom siv sib xyaw, uas muaj cov yam ntxwv zoo xws li lub teeb yuag, siab ua kom puas thiab siab zog. Siv nyob rau hauv thermal teb los hloov graphite qhov tseem ceeb txo qhov zaus ntawm graphite qhov chaw hloov, txhim kho monocrystalline zoo thiab ntau lawm stability.
Raws li kev faib cov khoom siv raw, cov pa roj carbon zoo tuaj yeem muab faib ua polyacrylonitrile-raws li carbon xav, viscose-raws li carbon xav, thiab suab-raws li carbon xav.
Polyacrylonitrile-based carbon xav tau muaj cov hmoov tshauv loj. Tom qab kev kho kub kub, ib qho fiber ntau ua nkig. Thaum lub sijhawm ua haujlwm, nws yog ib qho yooj yim los tsim cov plua plav kom ua paug rau qhov chaw sov. Nyob rau tib lub sijhawm, fiber ntau tuaj yeem nkag mus rau hauv lub qhov hws thiab ua pa ntawm tib neeg lub cev, uas ua rau muaj kev phom sij rau tib neeg kev noj qab haus huv. Viscose-based carbon xav tau zoo thermal rwb thaiv tsev ua haujlwm. Nws yog qhov muag muag tom qab kev kho cua sov thiab tsis yooj yim los tsim cov plua plav. Txawm li cas los xij, ntu ntu ntawm cov viscose-raws li raw fiber ntau yog qhov tsis sib xws, thiab muaj ntau qhov zawj ntawm qhov chaw fiber ntau. Nws yog ib qho yooj yim los tsim cov pa roj xws li C02 nyob rau hauv qhov chaw oxidizing ntawm CZ silicon rauv, ua rau nag lossis daus ntawm cov pa oxygen thiab cov ntsiab lus hauv cov khoom siv monocrystalline silicon. Cov tuam txhab tseem ceeb suav nrog German SGL thiab lwm lub tuam txhab. Tam sim no, feem ntau siv hauv kev lag luam semiconductor monocrystalline yog pitch-raws li cov pa roj carbon monoxide, uas muaj cov thermal rwb thaiv tsev zoo dua li cov pa roj carbon viscose-raws li kev xav, tab sis pitch-raws li cov pa roj carbon monoxide muaj ntau dua purity thiab qis dua cov plua plav tawm. Cov neeg tsim khoom suav nrog Nyiv Kureha Tshuaj thiab Osaka Gas.
Vim tias cov duab ntawm cov pa roj carbon zoo tsis yog kho, nws tsis yooj yim rau kev khiav lag luam. Tam sim no ntau lub tuam txhab tau tsim cov khoom siv thermal rwb thaiv tsev tshiab raws li cov pa roj carbon zoo-kho cov pa roj carbon zoo. Kho cov pa roj carbon monoxide, tseem hu ua kev xav tawv, yog cov pa roj carbon zoo nrog qee yam duab thiab nws tus kheej txhawb nqa khoom tom qab muag muag yog impregnated nrog resin, laminated, kho thiab carbonized.
Kev loj hlob zoo ntawm monocrystalline silicon yog cuam tshuam ncaj qha los ntawm ib puag ncig thermal, thiab carbon fiber thermal rwb thaiv tsev cov ntaub ntawv ua lub luag haujlwm tseem ceeb hauv qhov chaw no. Cov pa roj carbon fiber ntau thermal rwb thaiv tsev muag muag tseem muaj qhov zoo dua hauv kev lag luam photovoltaic semiconductor vim nws cov nqi kom zoo dua, zoo thermal rwb thaiv tsev nyhuv, hloov tau yooj yim tsim thiab cov duab customizable. Tsis tas li ntawd, carbon fiber nyuaj thermal rwb thaiv tsev xav tias yuav muaj qhov chaw loj dua hauv cov khoom siv thermal ua lag luam vim nws lub zog thiab kev ua haujlwm siab dua. Peb tau cog lus rau kev tshawb fawb thiab kev loj hlob nyob rau hauv lub tshav pob ntawm thermal rwb thaiv tsev cov ntaub ntawv, thiab tsis tu ncua optimize cov khoom ua tau zoo los txhawb txoj kev vam meej thiab kev loj hlob ntawm photovoltaic semiconductor kev lag luam.
Post lub sij hawm: Jun-12-2024