YUAV UA LI CAS SILICON WAFER
A waferyog ib daim ntawm silicon roughly 1 millimeter tuab uas muaj ib tug heev tiaj tus nto ua tsaug rau cov txheej txheem uas yog technically xav tau heev. Kev siv tom qab txiav txim siab seb cov txheej txheem loj hlob siv lead ua yuav tsum ua haujlwm li cas. Nyob rau hauv cov txheej txheem Czochralski, piv txwv li, cov polycrystalline silicon yog yaj thiab xaum-thin noob siv lead ua yog dipped rau hauv silicon molten. Cov noob siv lead ua yog ces tig thiab maj mam rub upwards. Ib colossus hnyav heev, monocrystal, tshwm sim. Nws muaj peev xwm xaiv cov monocrystal cov yam ntxwv hluav taws xob los ntawm kev ntxiv me me ntawm high-purity dopants. Cov crystals yog doped raws li cov neeg siv khoom specifications thiab ces polished thiab txiav mus rau hauv slices. Tom qab ntau yam kev tsim khoom ntxiv, cov neeg siv khoom tau txais nws cov wafers tshwj xeeb hauv ntim, uas tso cai rau cov neeg siv khoom siv wafer tam sim ntawd hauv nws cov kab ntau lawm.
CZOCCHRALSKI PROCESS
Niaj hnub no, ib feem loj ntawm silicon monocrystals yog zus raws li cov txheej txheem Czochralski, uas koom nrog melting polycrystalline high-purity silicon nyob rau hauv ib tug hyperpure quartz crucible thiab ntxiv cov dopant (feem ntau B, P, As, Sb). Ib tug nyias, monocrystalline noob siv lead ua yog dipped rau hauv silicon molten. Ib tug loj CZ siv lead ua ces tsim los ntawm no nyias siv lead ua. Cov kev cai nruj ntawm cov molten silicon kub thiab ntws, siv lead ua thiab crucible rotation, raws li zoo raws li cov siv lead ua rub ceev ua rau ib qho zoo heev monocrystalline silicon ingot.
FLOAT ZONE txoj kev
Monocrystals tsim raws li txoj kev float zone yog zoo tagnrho rau siv nyob rau hauv lub hwj chim semiconductor Cheebtsam, xws li IGBTs. Ib tug cylindrical polycrystalline silicon ingot yog mounted tshaj ib tug induction kauj. Ib lub xov tooj cua zaus electromagnetic teb pab yaj cov silicon los ntawm qhov qis ntawm tus pas nrig. Lub electromagnetic teb tswj cov silicon ntws los ntawm ib lub qhov me me hauv induction coil thiab mus rau monocrystal uas nyob hauv qab no (float zone method). Cov doping, feem ntau nrog B lossis P, yog ua tiav los ntawm kev ntxiv cov tshuaj gaseous.
Post lub sij hawm: Jun-07-2021