Kev siv ntawm silicon carbide ceramics hauv semiconductor teb

Cov khoom uas nyiam rau precision qhov chaw ntawm photolithography tshuab

Hauv kev lag luam semiconductor,silicon carbide ceramicCov ntaub ntawv no tsuas yog siv rau hauv cov cuab yeej tseem ceeb rau kev tsim hluav taws xob sib xyaw ua ke, xws li silicon carbide worktable, cov lus qhia,reflectors, ceramic suction chuck, caj npab, sib tsoo discs, fixtures, thiab lwm yam rau lithography tshuab.

Silicon carbide ceramic qhov chawrau semiconductor thiab optical khoom

● Silicon carbide ceramic sib tsoo disc. Yog tias qhov sib tsoo disc yog ua los ntawm cov hlau cam khwb cia lossis carbon hlau, nws lub neej kev pabcuam luv luv thiab nws cov thermal expansion coefficient loj. Thaum lub sij hawm ua cov silicon wafers, tshwj xeeb tshaj yog thaum lub sij hawm high-speed sib tsoo los yog polishing, hnav thiab thermal deformation ntawm kev sib tsoo disc ua rau nws nyuaj los xyuas kom meej lub flatness thiab parallelism ntawm silicon wafer. Kev sib tsoo disc ua los ntawm silicon carbide ceramics muaj siab hardness thiab tsis tshua muaj hnav, thiab thermal expansion coefficient yeej zoo ib yam li cov silicon wafers, yog li nws tuaj yeem ua hauv av thiab polished ntawm kev kub ceev.
● Silicon carbide ceramic fixture. Tsis tas li ntawd, thaum silicon wafers raug tsim, lawv yuav tsum tau mus rau qhov kub thiab txias kev kho mob thiab feem ntau thauj siv silicon carbide fixtures. Lawv yog cov cua sov-resistant thiab tsis muaj kev puas tsuaj. Pob zeb diamond zoo li cov pa roj carbon (DLC) thiab lwm yam txheej txheej tuaj yeem siv rau ntawm qhov chaw los txhim kho kev ua tau zoo, txo qhov kev puas tsuaj ntawm wafer, thiab tiv thaiv kom tsis txhob kis kab mob.
● Silicon carbide worktable. Noj lub rooj ua haujlwm hauv lub tshuab lithography ua piv txwv, lub rooj ua haujlwm feem ntau yog lub luag haujlwm ua kom tiav qhov kev txav mus los, yuav tsum muaj kev kub ceev, loj-stroke, rau-degree-of-freedom nano-level ultra-precision txav. Piv txwv li, rau lub tshuab lithography nrog qhov kev daws teeb meem ntawm 100nm, qhov tseeb overlay ntawm 33nm, thiab kab dav ntawm 10nm, lub worktable positioning precision yuav tsum ncav cuag 10nm, lub npog ntsej muag-silicon wafer ib txhij stepping thiab scanning ceev yog 150nm / s. thiab 120nm / s feem, thiab lub ntsej muag scanning ceev yog ze rau 500nm / s, thiab lub rooj ua haujlwm yuav tsum muaj cov lus tsa suab siab thiab ruaj khov.

Schematic daim duab ntawm lub worktable thiab micro-motion table (ib feem)

● Silicon carbide ceramic square iav. Cov khoom tseem ceeb hauv cov khoom siv hluav taws xob tseem ceeb xws li cov tshuab lithography muaj cov duab zoo, qhov ntev, thiab cov qauv hollow lub teeb, ua rau nws nyuaj rau kev npaj cov khoom siv silicon carbide ceramic. Tam sim no, cov khoom siv hluav taws xob thoob ntiaj teb sib xyaw ua ke, xws li ASML hauv Netherlands, NIKON thiab CANON hauv Nyij Pooj, siv ntau cov ntaub ntawv xws li microcrystalline iav thiab cordierite los npaj cov iav square, cov khoom tseem ceeb ntawm cov tshuab lithography, thiab siv silicon carbide. ceramics los npaj lwm cov qauv kev ua haujlwm siab nrog cov duab yooj yim. Txawm li cas los xij, cov kws tshaj lij los ntawm Tuam Tshoj Cov Khoom Siv Tshawb Fawb Lub Tsev Haujlwm tau siv cov tswv yim npaj ua kom tiav qhov kev npaj ntawm qhov loj-loj, complex-zoo li tus, hnyav hnyav, tag nrho cov khoom siv silicon carbide ceramic square tsom iav thiab lwm yam khoom siv kho qhov muag thiab ua haujlwm rau cov tshuab lithography.