Sputtering lub hom phiajFeem ntau yog siv rau hauv cov khoom siv hluav taws xob thiab cov ntaub ntawv kev lag luam, xws li kev sib xyaw ua ke, cov ntaub ntawv khaws cia, cov khoom siv lead ua kua, cov cim laser, cov khoom siv hluav taws xob tswj, thiab lwm yam. Lawv kuj tuaj yeem siv rau hauv cov iav txheej, nrog rau hnav-resistant. cov ntaub ntawv, high-temperature corrosion kuj, high-end hniav khoom thiab lwm yam lag luam.
Sputtering yog ib qho ntawm cov txheej txheem tseem ceeb rau kev npaj cov ntaub ntawv nyias nyias.Nws siv cov ions tsim los ntawm cov khoom siv ion los ua kom nrawm thiab sib sau ua ke hauv lub tshuab nqus tsev los tsim lub zog ceev ion kab teeb, foob pob rau cov khoom nto, thiab pauv lub zog kinetic ntawm ions thiab cov khoom atoms. Cov atoms ntawm cov khoom nto tawm ntawm cov khoom thiab tso rau ntawm qhov chaw ntawm lub substrate. Lub foob pob tawg yog cov khoom siv raw rau tso cov yeeb yaj kiab nyias los ntawm sputtering, uas yog hu ua sputtering phiaj. Ntau hom sputtered nyias zaj duab xis cov ntaub ntawv tau dav siv nyob rau hauv semiconductor integrated circuits, kaw xov xwm, flat-panel qhia thiab workpiece nto coatings.
Ntawm txhua daim ntawv thov kev lag luam, kev lag luam semiconductor muaj cov kev cai nruj tshaj plaws rau lub hom phiaj sputtering films.High-purity hlau sputtering lub hom phiaj yog tsuas yog siv nyob rau hauv wafer manufacturing thiab advanced ntim txheej txheem. Ua ib qho piv txwv, peb tuaj yeem pom tias los ntawm silicon wafer mus rau ib nti, nws yuav tsum tau mus txog 7 txheej txheem loj, xws li diffusion (Thermal Process), Photo-lithography (Photo-lithography), Etch (Etch), Ion Implantation (IonImplant), Nyias zaj duab xis loj hlob (Dielectric Deposition), Chemical Mechanical Polishing (CMP), Metalization (Metalization) Cov txheej txheem sib ib los ntawm ib tug. Lub hom phiaj sputtering yog siv nyob rau hauv tus txheej txheem ntawm "metallization". Lub hom phiaj yog bombarded nrog high-zog hais los ntawm nyias zaj duab xis deposition khoom thiab ces ib txheej hlau nrog tshwj xeeb functions yog tsim nyob rau hauv silicon wafer, xws li conductive txheej, barrier txheej. Tos.Txij li cov txheej txheem ntawm tag nrho cov semiconductors muaj ntau qhov sib txawv ces qee qhov xwm txheej yuav tsum tau ua kom paub tseeb tias qhov system muaj tseeb yog li peb xav tau qee yam ntawm cov khoom siv dummy ntawm qee theem ntawm kev tsim khoom kom paub meej cov teebmeem.
Post lub sij hawm: Jan-17-2022