Ua raws li kev xav ntawm "kev ua tau zoo, kev pabcuam, kev ua haujlwm thiab kev loj hlob", peb tau txais kev ntseeg siab thiab kev qhuas los ntawm cov neeg siv khoom hauv tsev thiab thoob ntiaj teb rau IOS Certificate Tuam Tshoj 99.5%Sic Ceramic TargetSilicon Carbide Sputtering Target rau Txheej, Peb lub hom phiaj tseem ceeb yog muab peb cov neeg siv khoom thoob ntiaj teb nrog cov khoom zoo, tus nqi sib tw, txaus siab xa thiab cov kev pabcuam zoo heev.
Ua raws li kev xav ntawm "kev ua tau zoo, kev pabcuam, kev ua haujlwm thiab kev loj hlob", peb tau txais kev ntseeg siab thiab kev qhuas los ntawm cov neeg siv khoom hauv tsev thiab thoob ntiaj teb rauTuam Tshoj Silicon Carbide Sputtering Target, Sic Ceramic Target, Peb tam sim no muaj kev tswj hwm nruj thiab ua tiav, uas ua kom ntseeg tau tias txhua yam khoom tuaj yeem ua tau raws li cov neeg siv khoom zoo. Dhau li ntawd, tag nrho peb cov khoom tau raug soj ntsuam nruj me ntsis ua ntej xa zaub mov.
Cov pa roj carbon / carbon composites(tom qab no hu ua "C / C lossis CFC") yog ib hom khoom sib xyaw uas yog raws li cov pa roj carbon thiab txhawb nqa los ntawm carbon fiber thiab nws cov khoom (carbon fiber preform). Nws muaj ob qho tib si inertia ntawm carbon thiab siab zog ntawm carbon fiber. Nws muaj cov khoom siv zoo, ua haujlwm kub, tiv thaiv corrosion, kev sib txhuam damping thiab thermal thiab hluav taws xob conductivity yam ntxwv
CVD-SiCtxheej txheej muaj cov yam ntxwv ntawm cov qauv zoo, cov khoom siv compact, kub tsis kam, oxidation tsis kam, siab purity, acid & alkali tsis kam thiab organic reagent, nrog lub cev ruaj khov thiab tshuaj lom neeg.
Piv nrog cov khoom siv graphite siab, graphite pib oxidize ntawm 400C, uas yuav ua rau poob ntawm cov hmoov vim oxidation, ua rau ib puag ncig muaj kuab paug rau peripheral li thiab lub tshuab nqus tsev chamber, thiab ua rau impurities ntawm high-purity ib puag ncig.
Txawm li cas los xij, SiC txheej tuaj yeem tswj lub cev thiab tshuaj lom neeg ruaj khov ntawm 1600 degrees, Nws yog dav siv hauv kev lag luam niaj hnub, tshwj xeeb tshaj yog hauv kev lag luam semiconductor.
Peb lub tuam txhab muab SiC txheej txheej txheem kev pab cuam los ntawm CVD txoj kev nyob rau saum npoo ntawm graphite, ceramics thiab lwm yam ntaub ntawv, kom tshwj xeeb gases uas muaj carbon thiab silicon react ntawm kub kom tau siab purity SiC molecules, molecules tso rau saum npoo ntawm cov ntaub ntawv coated, tsim SIC tiv thaiv txheej. SIC tsim yog ruaj khov rau graphite puag, muab cov graphite puag tshwj xeeb, yog li ua rau saum npoo ntawm graphite compact, Porosity-dawb, kub tsis kam, corrosion kuj thiab oxidation kuj.
Cov yam ntxwv tseem ceeb:
1. Kub oxidation kuj:
oxidation kuj tseem zoo heev thaum kub siab li 1600 C.
2. High purity: ua los ntawm cov tshuaj vapor deposition nyob rau hauv siab kub chlorination mob.
3. Erosion kuj: siab hardness, compact nto, zoo hais.
4. Corrosion kuj: acid, alkali, ntsev thiab organic reagents.
Main Specifications ntawm CVD-SIC Txheej:
| SiC-CVD | ||
| Qhov ntom | (g / cc)
| 3.21 |
| Flexural zog | (Mpa)
| 470 |
| Thermal expansion | (10-6 / K) | 4
|
| Thermal conductivity | (W / mK) | 300
|
