Semiconductor kev lag luam kev xav tau ntawm cov khoom siv graphite tshwj xeeb yog siab, nplua particle loj ntawm graphite muaj siab precision, kub tsis kam, siab zog, me me poob thiab lwm yam zoo, xws li: sintered graphite khoom pwm.Vim tias cov khoom siv graphite siv nyob rau hauv kev lag luam semiconductor (xws li cov cua sov thiab lawv cov sintered tuag) yuav tsum tau tiv thaiv cov txheej txheem cua sov thiab cua txias dua, txhawm rau txhawm rau txuas lub neej kev pab cuam ntawm cov khoom siv graphite, feem ntau yuav tsum muaj cov khoom siv graphite uas siv tau ruaj khov. thiab kub resistant cuam tshuam muaj nuj nqi.
01 Graphite accessories rau semiconductor siv lead ua kev loj hlob
Tag nrho cov txheej txheem siv los loj hlob semiconductor muaju yog ua haujlwm nyob rau hauv qhov kub thiab txias ib puag ncig. Qhov kub ntawm qhov cub siv lead ua kev loj hlob feem ntau yog nruab nrog kub-resistant thiab corrosion-resistant high-purity graphite Cheebtsam, xws li rhaub, crucible, rwb thaiv tsev lub tog raj kheej, coj lub tog raj kheej, electrode, crucible tuav, electrode txiv ntoo, thiab lwm yam.
Peb tuaj yeem tsim txhua qhov graphite ntawm cov khoom siv siv lead ua khoom siv, uas tuaj yeem muab rau tus kheej lossis hauv cov teeb tsa, lossis customized graphite qhov chaw ntawm ntau qhov ntau thiab tsawg raws li cov neeg siv khoom xav tau. Qhov loj ntawm cov khoom tuaj yeem ntsuas ntawm qhov chaw, thiab cov hmoov tshauv ntawm cov khoom tiav tuaj yeem tsawg duaua 5ppm.
02 Graphite accessories rau semiconductor epitaxy
Epitaxial txheej txheem yog hais txog kev loj hlob ntawm ib txheej ntawm ib qho khoom siv lead ua nrog tib lub lattice kev npaj raws li cov substrate ntawm ib qho siv lead ua substrate. Nyob rau hauv cov txheej txheem epitaxial, lub wafer yog loaded ntawm graphite disk. Kev ua tau zoo thiab qhov zoo ntawm graphite disk ua lub luag haujlwm tseem ceeb hauv qhov zoo ntawm cov txheej txheem epitaxial ntawm wafer. Nyob rau hauv lub teb ntawm epitaxial ntau lawm, ntau ntawm ultra-high purity graphite thiab siab purity graphite puag nrog SIC txheej yog xav tau.
Peb lub tuam txhab graphite puag rau semiconductor epitaxy muaj ntau yam kev siv, tuaj yeem phim feem ntau ntawm cov cuab yeej siv hauv kev lag luam, thiab muaj purity siab, txheej txheej, kev pab cuam zoo heev, thiab cov tshuaj tiv thaiv siab thiab thermal stability.
03 Graphite accessories rau ion implantation
Ion implantation yog hais txog cov txheej txheem ntawm kev ua kom lub plasma beam ntawm boron, phosphorus thiab arsenic rau ib qho zog, thiab tom qab ntawd txhaj nws mus rau hauv txheej txheej ntawm cov khoom siv wafer los hloov cov khoom ntawm cov txheej txheem saum npoo. Lub Cheebtsam ntawm ion implantation ntaus ntawv yuav tsum yog ua los ntawm high-purity cov ntaub ntawv uas zoo heev tshav kub tsis kam, thermal conductivity, tsawg corrosion tshwm sim los ntawm ion beam thiab tsis muaj impurity cov ntsiab lus. High-purity graphite ua tau raws li qhov yuav tsum tau ua ntawm daim ntawv thov, thiab tuaj yeem siv rau lub raj ya davhlau, ntau yam slits, electrodes, electrode npog, conduits, beam terminators, thiab lwm yam ntawm ion implantation khoom.
Peb tuaj yeem tsis tsuas yog muab graphite shielding npog rau ntau yam ion implantation tshuab, tab sis kuj muab high-purity graphite electrodes thiab ion qhov chaw nrog corrosion kuj ntawm ntau yam specifications. Cov qauv siv tau: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM thiab lwm yam khoom siv. Tsis tas li ntawd, peb tuaj yeem muab cov khoom sib xws xws li ceramic, tungsten, molybdenum, aluminium khoom thiab coated qhov chaw.
04 Graphite rwb thaiv tsev cov ntaub ntawv thiab lwm yam
Cov khoom siv hluav taws xob hluav taws xob siv hauv cov khoom siv hluav taws xob semiconductor muaj xws li graphite nyuaj siab, mos mos, graphite foil, graphite ntawv, thiab graphite hlua.
Tag nrho peb cov ntaub ntawv raw yog graphite ntshuam, uas tuaj yeem txiav raws li qhov loj me ntawm cov neeg siv khoom xav tau lossis muag tag nrho.
Cov pa roj carbon-carbon phaj yog siv los ua cov khoom siv rau cov txheej txheem ntawm cov txheej txheem ntawm hnub ci monocrystalline silicon thiab polycrystalline silicon cell. Lub hauv paus ntsiab lus ntawm kev ua haujlwm yog: ntxig cov silicon nti rau hauv CFC tais thiab xa mus rau hauv lub tshuab hluav taws xob los ua cov txheej txheem zaj duab xis.
