CVD Silicon Carbide Coated Graphite nplhaib

Lus piav qhia luv luv:

VET Energy silicon carbide coated graphite nplhaib yog cov khoom ua tau zoo tsim los muab kev ua tau zoo thiab txhim khu kev qha nyob rau lub sijhawm ntev. Nws muaj super zoo kub tsis kam thiab thermal uniformity, siab purity, yaig kuj, ua rau nws zoo meej tov rau wafer ua daim ntaub ntawv.

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Khoom cim npe

Yam Khoom Ntawm Base Graphite Khoom:

Pom pom Density:	1.85g / cm3
Hluav taws xob Resistivity:	11 μΩ
Flexural zog:	49 MPa (500kgf / cm2)
Ntug Hardness:	58
Tshauv:	<5 ppm
Thermal conductivity:	116 W / mK (100 kcal / mhr-℃)

Peb muab ntau yam susceptors thiab graphite Cheebtsam rau tag nrho cov tam sim no epitaxy reactors. Peb cov khoom suav nrog cov twj tso kua mis rau LPE units, pancake susceptors rau LPE, CSD, thiab Gemini units, thiab ib leeg-wafer susceptors rau thov thiab ASM units.

Los ntawm kev sib koom ua ke muaj kev koom tes nrog kev ua lag luam OEMs, kev paub txog cov ntaub ntawv thiab kev paub txog kev tsim khoom, vet muab cov qauv tsim zoo rau koj daim ntawv thov.

VET Energy yog tustiag tiag chaw tsim tshuaj paus ntawm customized graphite thiab silicon carbide khoom nrog CVD txheej,tuaj yeem muab tauntau yamcustomized qhov chaw rau semiconductor thiab photovoltaic kev lag luam. Our pab neeg ua haujlwm los ntawm cov tsev kawm tshawb fawb sab saum toj, tuaj yeem muab cov kev daws teeb meem zoo tshaj plawsrau koj.

Fnoj ntawm peb cov khoom:

1. Kub kub oxidation tsis kam mus txog 1700℃.
2. High purity thiabthermal uniformity
3. Zoo heev corrosion kuj: acid, alkali, ntsev thiab organic reagents.
4. High hardness, compact nto, zoo hais.
5. Lub neej ua haujlwm ntev dua thiab ruaj khov dua

CVD SiC薄膜基本物理性能 Basic Physical Properties ntawm CVD SiCtxheej
性质 / Khoom	典型数值 / Tus nqi
晶体结构 / Crystal Structure	FCC β theem多晶, 主要为(111) Ib
密度 / Ceev	3.21 g / cm³
硬度 / Hardness	2500 维氏硬度 (500g load)
晶粒大小 / Grain SiZe	2 ~ 10 hli
纯度 / Tshuaj Purity	99.99995%
Cov duab / Kub Muaj Peev Xwm	6 40j kg^-1· K^-1
升华温度 / Sublimation kub	2700 ℃
抗弯强度 / Flexural zog	415 MPa RT 4-point
杨氏模量 / Young's Modulus	430 Gpa 4pt khoov, 1300 ℃
导热系数 / KublKev coj ua	300 Wm^-1· K^-1
热膨胀系数 / Thermal Expansion (CTE)	4.5 × 10^-6K^-1