No ke aha mākou e hoʻohana ai i ka tape UV no ka dicing wafer? | VET Energy

Ma hope o kawaferua hele ma ke kaʻina hana mua, ua hoʻopau ʻia ka hoʻomākaukau ʻana i ka chip, a pono e ʻoki ʻia e hoʻokaʻawale i nā ʻāpana ma ka wafer, a hoʻopaʻa hope ʻia. ʻO kawaferʻokoʻa ke kaʻina hana ʻoki i koho ʻia no nā wafers o nā mānoanoa like ʻole:

▪Waferame ka mānoanoa o ka oi ma mua o 100um ua oki maʻamau me nā lau;

▪Waferame ka mānoanoa o ka emi ma lalo o 100um ua oki maʻamau me nā lasers. Hiki i ka ʻoki ʻoki laser ke hoʻemi i nā pilikia o ka peeling a me ka haki ʻana, akā i ka wā ma luna o 100um, e hoʻemi nui ʻia ka hana hana;

▪Waferame ka mānoanoa o lalo o 30um ua ʻoki ʻia me ka plasma. He wikiwiki ka ʻoki ʻana o ka plasma a ʻaʻole e hōʻino i ka ʻili o ka wafer, e hoʻomaikaʻi ai i ka hua, akā ʻoi aku ka paʻakikī o kāna kaʻina;

I ka wā o ka ʻoki ʻana i ka wafer, e hoʻopili ʻia kahi kiʻiʻoniʻoni i ka wafer ma mua e hōʻoia i ka "singling" palekana. ʻO kāna mau hana nui e like me kēia.

Hoʻoponopono a pale i ka wafer

I ka wā o ka hana dicing, pono e ʻoki pono ʻia ka wafer.Waferahe lahilahi a he palupalu. Hiki i ka tape UV ke hoʻopaʻa paʻa i ka wafer i ke kiʻi a i ʻole ke kahua wafer e pale ai i ka wafer mai ka neʻe ʻana a haʻalulu i ka wā o ka ʻoki ʻana, e hōʻoia i ka pololei a me ka pololei o ka ʻoki ʻana.
Hiki iā ia ke hāʻawi i ka pale kino maikaʻi no ka wafer, pale i ka pōʻino i kawaferma muli o ka hopena ikaika o waho a me ke kuʻi ʻana e hiki mai ana i ka wā o ka ʻoki ʻana, e like me nā māwae, ka hāʻule ʻana o ka lihi a me nā hemahema ʻē aʻe, a me ka pale ʻana i ke ʻano o ka chip a me ka pōʻai ma ka ʻili o ka wafer.

Hana ʻoki maʻalahi

ʻO ka tape UV he elasticity kūpono a me ka maʻalahi, a hiki ke hoʻololi i ka wā e ʻoki ai ka ʻoki ʻoki, e hoʻomaʻamaʻa i ke kaʻina ʻokiʻoki, e hōʻemi ana i nā hopena ʻino o ka ʻoki ʻana i ka pale a me ka wafer, a kōkua i ka hoʻomaikaʻi ʻana i ka maikaʻi o ka ʻoki ʻana a me ke ola lawelawe. ka maka. ʻO kona mau hiʻohiʻona e hiki ai i ka ʻōpala i hana ʻia e ka ʻoki ʻana e pili pono i ka lipine me ka ʻole o ka pipiʻi ʻana a puni, kahi kūpono no ka hoʻomaʻemaʻe ʻana o ka ʻoki ʻana, mālama i ka maʻemaʻe o ka hana, a pale i nā ʻōpala mai ka hoʻohaumia ʻana a i ʻole ke keʻakeʻa ʻana i ka wafer a me nā mea hana ʻē aʻe. .

Maʻalahi e mālama ma hope

Ma hope o ka ʻoki ʻia ʻana o ka wafer, hiki ke hoʻemi koke ʻia ka lipine UV i ka viscosity a i ʻole nalowale loa ma ka hoʻomālamalama ʻana iā ia me ke kukui ultraviolet o kahi lōʻihi a me ka ikaika, i hiki ke hoʻokaʻawale ʻia ka ʻoki ʻoki mai ka lipine, kahi kūpono no ka hope. puʻupuʻu chip, hoʻāʻo a me nā kaʻina hana ʻē aʻe, a he haʻahaʻa loa kēia kaʻina hoʻokaʻawale i ka pōʻino i ka chip.