He aha ka ʻokoʻa ma waena o PECVD a me LPCVD i nā lako semiconductor CVD?

ʻO ka waiho ʻana o ka mahu kemika (CVD) pili i ke kaʻina hana o ka waiho ʻana i kahi kiʻiʻoniʻoni paʻa ma ka ʻili o kahi silikoniwaferma o ka hopena kemika o ka hui kinoea. E like me nā ʻano hoʻohālikelike like ʻole (pressure, precursor), hiki ke hoʻokaʻawale ʻia i nā ʻano mea hana like ʻole.

He aha nā kaʻina hana i hoʻohana ʻia ai kēia mau mea hana ʻelua?

PECVD(Plasma Enhanced) mea lako ka nui loa a hoʻohana pinepine ʻia, hoʻohana ʻia i ka OX, Nitride, metala puka, amorphous carbon, etc.; Hoʻohana pinepine ʻia ʻo LPCVD (Low Power) ma Nitride, poly, TEOS.
He aha ke kumu?
PECVD-he kaʻina hana e hoʻohui pono i ka ikehu plasma a me CVD. Hoʻohana ka ʻenehana PECVD i ka plasma wela haʻahaʻa no ka hoʻoulu ʻana i ka ʻālohilohi ma ka cathode o ke keʻena kaʻina hana (ʻo ia hoʻi, ka pahu hāpana) ma lalo o ke kaomi haʻahaʻa. Hiki i kēia hoʻokuʻu ʻana a i ʻole nā ​​mea hoʻomehana ʻē aʻe ke hoʻokiʻekiʻe i ka mahana o ka hāpana i kahi pae i koho mua ʻia, a laila hoʻokomo i ka nui o ke kaʻina hana. Loaʻa kēia kinoea i ke ʻano o nā hopena kemika a me ka plasma, a ma hope e hana i kahi kiʻiʻoniʻoni paʻa ma ka ʻili o ka hāpana.

LPCVD - Hoʻolālā ʻia ka hoʻoheheʻe ʻana o ka mahu kemika haʻahaʻa haʻahaʻa (LPCVD) e hoʻemi i ke kaomi hana o ke kinoea hopena i loko o ka reactor ma kahi o 133Pa a i ʻole.

He aha nā ʻano o kēlā me kēia?

PECVD - He kaʻina hana e hoʻohui pono i ka ikehu plasma a me CVD: 1) Ka hana haʻahaʻa haʻahaʻa (e pale i ka pōʻino o ka wela i nā mea hana); 2) Hoʻonui kiʻiʻoniʻoni wikiwiki; 3) ʻAʻole koho e pili ana i nā mea, OX, Nitride, metala puka, amorphous carbon hiki ke ulu a pau; 4) Aia kahi ʻōnaehana nānā i-situ, hiki ke hoʻoponopono i ka meaʻai ma o nā ʻāpana ion, ka holo ʻana o ke kinoea, ka mahana a me ka mānoanoa kiʻiʻoniʻoni.
LPCVD - ʻO nā kiʻiʻoniʻoni lahilahi i waiho ʻia e LPCVD e ʻoi aku ka maikaʻi o ka uhi ʻana, maikaʻi ka haku mele ʻana a me ka hoʻoponopono ʻana i ka hale, ka nui o ka waiho ʻana a me ka hoʻopuka. Eia hou, ʻaʻole koi ʻo LPCVD i ke kinoea lawe lawe, no laila e hoʻemi nui i ke kumu o ka pollution particle a hoʻohana nui ʻia i nā ʻoihana semiconductor kiʻekiʻe waiwai no ka waiho ʻana i nā kiʻiʻoniʻoni lahilahi.

 

Welina mai i nā mea kūʻai mai a puni ka honua e kipa mai iā mākou no kahi kūkākūkā hou aku!

https://www.vet-china.com/

https://www.vet-china.com/cvd-coating/

https://www.vet-china.com/silicon-carbide-sic-ceramic/