ʻO ke kaʻina ulu ʻana o ka ʻenehana silika carbide a me ka ʻenehana lako

1. SiC kristal ulu 'enehana ala

PVT (ʻano sublimation),

HTCVD (CVD wela kiʻekiʻe),

LPE(ke ʻano hana wai)

ʻekolu mau mea maʻamauKilika SiCnāʻano ulu;

ʻO ke ala i ʻike ʻia ma ka ʻoihana ʻo ke ʻano PVT, a ʻoi aku ma mua o 95% o nā kristal hoʻokahi SiC i ulu ʻia e ke ʻano PVT;

Hana ʻiaKilika SiCHoʻohana ka umu ulu i ke ala ʻenehana PVT nui o ka ʻoihana.

2. ʻO ke kaʻina hana ulu aniani SiC

ʻO ka hoʻoheheʻe ʻana o ka pauka-ka mālama ʻana i nā hua kristal-ka ulu ʻana o ka kristal-ingot annealing-waferhana ʻana.

3. ʻO ke ala PVT e ulu aiʻO nā kristal SiC

Hoʻokomo ʻia ka mea maka SiC ma lalo o ke kīʻaha graphite, a ʻo ke aniani hua SiC aia ma ka piko o ka crucible graphite. Ma ka hoʻoponopono ʻana i ka insulation, ʻoi aku ka kiʻekiʻe o ka mahana ma ka SiC raw material a ʻoi aku ka haʻahaʻa o ka mahana ma ka crystal seed. ʻO ka SiC maka mea ma ka wela kiʻekiʻe sublimates a decomposes i loko o ke kinoea mea mea i laweia i ka hua kristal me ka haʻahaʻa wela a crystallize e hana i ka SiC kristal. ʻO ke kaʻina hana ulu kumu ʻekolu mau kaʻina: decomposition a sublimation o nā mea maka, ka hoʻoili nui ʻana, a me ka crystallization ma nā kristal hua.

Decomposition a me ka sublimation o nā mea maka:

SiC(S)= Si(g)+C(S)

2SiC(S)= Si(g)+ SiC2(g)

2SiC(S)=C(S)+SiC2(g)

I ka wā o ka hoʻoili nui ʻana, ua hana hou ʻo Si vapor me ka paia crucible graphite e hana ai iā SiC2 a me Si2C:

Si(g)+2C(S) =SiC2(g)

2Si(g) +C(S)=Si2C(g)

Ma luna o ka ʻili o ke aniani hua, e ulu ana nā ʻāpana kinoea ʻekolu ma o nā kumu ʻelua e hana ai i nā kristal carbide silika:

SiC2_(g)+Si2C_(g)=3SiC_(s)

Si_(g)+SiC2_(g)=2SiC_(S)

4. ʻO ke ala PVT e ulu ai i ka SiC crystal ulu ala ʻenehana ala

I kēia manawa, ʻo ka hoʻomehana induction kahi ala ʻenehana maʻamau no ke ʻano PVT ʻano SiC crystal growth furnaces;

ʻO ka coil external induction heating a me ka graphite resistance heating ʻo ia ke kuhikuhi hoʻomohala oKilika SiCnā kapuahi ulu.

5. 8-ʻīniha SiC induction pumehana ulu umu

(1) Hoʻomehana i kagraphite crucible mea hoʻomehanama o ka hoʻokomo ʻana i ke kahua magnetic; hoʻoponopono i ke kahua wela ma ka hoʻoponopono ʻana i ka mana hoʻomehana, ke kūlana coil, a me ke ʻano insulation;

(2) Hoʻomāhana i ka graphite crucible ma o ka graphite resistance hoʻomehana a me ka hoʻoheheʻe ʻana i ka wela; ka mālama ʻana i ka pā wela ma ka hoʻoponopono ʻana i ke ʻano o ka mea hoʻomehana graphite, ke ʻano o ka mea wela, a me ka mana o kēia manawa;