Pehea e kōkua ai nā papa epitaxial i nā mea semiconductor?

ʻO ke kumu o ka inoa epitaxial wafer

ʻO ka mua, e hoʻolaha i kahi manaʻo liʻiliʻi: ʻo ka hoʻomākaukau ʻana i ka wafer e loaʻa i ʻelua mau loulou nui: ka hoʻomākaukau substrate a me ke kaʻina epitaxial. ʻO ka substrate he wafer i hana ʻia me ka semiconductor single crystal material. Hiki i ka substrate ke komo pololei i ke kaʻina hana wafer e hana i nā mea semiconductor, a i ʻole hiki ke hana ʻia e nā kaʻina epitaxial e hana i nā wafers epitaxial. ʻO ka Epitaxy e pili ana i ke kaʻina hana o ka ulu ʻana i kahi papa hou o ka aniani hoʻokahi ma luna o kahi substrate kristal hoʻokahi i mālama pono ʻia e ka ʻokiʻoki, wili, polishing, a me nā mea ʻē aʻe. mea like ʻole (homogeneous) epitaxy a heteroepitaxy). Ma muli o ka hoʻonui a ulu ʻana o ka papa aniani hoʻokahi hou e like me ke ʻano aniani o ka substrate, ua kapa ʻia ʻo ia he papa epitaxial (ʻo ka mānoanoa he mau microns ka nui, e lawe ana i ke kilika ma ke ʻano he laʻana: ʻo ke ʻano o ka ulu ʻana o ka epitaxial silicon aia ma kahi silika hoʻokahi. ʻo ka pahu aniani me kahi ʻano aniani ʻo kahi ʻāpana aniani me ka paʻa ʻana o ka lattice maikaʻi a me ke kūpaʻa like ʻole a me ka mānoanoa me ke ʻano aniani like me ka ulu ʻana o ka substrate), a me ka substrate me ka kapa ʻia ka papa epitaxial he wafer epitaxial (epitaxial wafer = papa epitaxial + substrate). Ke hana ʻia ka mea hana ma ka papa epitaxial, ua kapa ʻia ʻo ia he epitaxy maikaʻi. Inā hana ʻia ka hāmeʻa ma luna o ka substrate, ua kapa ʻia ia epitaxy reverse. I kēia manawa, hoʻokani wale ka papa epitaxial i kahi kuleana kākoʻo.

Wafer i poni ʻia

Nā ʻano ulu epitaxial

Molecular beam epitaxy (MBE): He ʻenehana ulu epitaxial semiconductor i hana ʻia ma lalo o nā kūlana ʻūhā kiʻekiʻe. Ma kēia ʻenehana, hoʻoheheʻe ʻia nā mea kumu ma ke ʻano o kahi kaola o nā ʻātoma a i ʻole nā ​​molekole a laila waiho ʻia ma kahi substrate crystalline. MBE mea he loa pololei a me controllable semiconductor thin film ulu enehana i precisely kaohi i ka mānoanoa o waiho mea ma ka atomic pae.
Metal organic CVD (MOCVD): Ma ke kaʻina MOCVD, hoʻolako ʻia ka metala organik a me ka hydride gas N i loaʻa nā mea i makemake ʻia i ka substrate ma kahi mahana kūpono, e hana i kahi hopena kemika e hana i nā mea semiconductor pono, a waiho ʻia ma ka substrate ma, ʻoiai e hoʻokuʻu ʻia nā mea i koe a me nā huahana hopena.
Vapor phase epitaxy (VPE): Vapor phase epitaxy he ʻenehana koʻikoʻi i hoʻohana mau ʻia i ka hana ʻana i nā mea semiconductor. ʻO ke kumu kumu ka lawe ʻana i ka mahu o nā mea elemental a i ʻole nā ​​​​hui i loko o ke kinoea lawe, a waiho i nā kristal ma ka substrate ma o nā hopena kemika.

He aha nā pilikia e hoʻoponopono ai ke kaʻina hana epitaxy?

ʻAʻole hiki ke hoʻokō i nā pono nui o ka hana ʻana i nā mea semiconductor like ʻole. No laila, ua hoʻomohala ʻia ka ulu ʻana o ka epitaxial, kahi ʻenehana hoʻonui ʻia ʻana o ka ʻenehana hoʻokahi aniani aniani, i ka hopena o ka makahiki 1959. No laila he aha ka hāʻawi kikoʻī o ka ʻenehana epitaxy i ka holomua o nā mea?

No ka silika, i ka wā i hoʻomaka ai ka ʻenehana ulu epitaxial silika, he manawa paʻakikī loa ia no ka hana ʻana i nā transistors kiʻekiʻe a me ka mana kiʻekiʻe. Mai ka hiʻohiʻona o nā loina transistor, no ka loaʻa ʻana o ke alapine kiʻekiʻe a me ka mana kiʻekiʻe, pono ke kiʻekiʻe ke kiʻekiʻe o ka ʻāpana o ka ʻohi a me ka liʻiliʻi o ke kūpaʻa series, ʻo ia hoʻi, liʻiliʻi ka hāʻule o ka volta saturation. Pono ka mea mua i ke kiʻekiʻe o ka resistivity o ka mea i loko o ka ʻāpana ohi, a ʻo ka mea hope e koi i ka resistivity o nā mea i loko o ka ʻohi ʻohi. Kūʻē nā panalāʻau ʻelua i kekahi i kekahi. Inā hoʻemi ʻia ka mānoanoa o ka mea i loko o ka ʻāpana ʻohi e hōʻemi i ke kūpaʻa o ka moʻo, ʻoi aku ka lahilahi a me ka palupalu o ka wafer silika e hiki ke hana ʻia. Inā ho'ēmiʻia ka resistivity o ka mea, e kū'ē i ka koi mua. Eia naʻe, ua holomua ka hoʻomohala ʻana i ka ʻenehana epitaxial. hoʻoponopono i kēia pilikia.

Pane: E hoʻoulu i kahi papa epitaxial kiʻekiʻe ma luna o kahi pani haʻahaʻa haʻahaʻa, a hana i ka mea hana ma ka papa epitaxial. ʻO kēia papa epitaxial kiʻekiʻe-resistivity e hōʻoiaʻiʻo i ka puʻupuʻu he kiʻekiʻe ka haʻihaʻi haʻahaʻa, aʻo ka substrate haʻahaʻa haʻahaʻa Hoʻemi ia i ke kū'ē o ka substrate, a laila e ho'ēmi ana i ka hāʻuleʻana o ka voltage saturation, a laila e hoʻoholo i ka kū'ē'ē ma waena o nā meaʻelua.

Eia kekahi, ua hoʻomohala nui ʻia nā ʻenehana epitaxy e like me ka vapor phase epitaxy a me ka wai epitaxy phase o GaAs a me nā mea ʻē aʻe III-V, II-VI a me nā molecular compound semiconductor material a ua lilo i kumu no ka hapa nui o nā mīkini microwave, nā mea optoelectronic, mana. He ʻenehana kaʻina hana koʻikoʻi no ka hana ʻana i nā mea hana, ʻoi aku ka maikaʻi o ka noi ʻana o ka molecular beam a me ka metal organic vapor phase epitaxy ʻenehana i nā ʻāpana lahilahi, superlattices, nā pūnāwai quantum, nā superlattices i hoʻopaʻa ʻia, a me ka epitaxy thin-layer atomic-level, he hana hou ia i ka noiʻi semiconductor. ʻO ka hoʻomohala ʻana o ka "ʻenekinia kāʻei ikehu" ma ke kahua ua kau i kahi kumu paʻa.

Ma nā hoʻohana pono, ʻaneʻane hana ʻia nā mea hana semiconductor ākea bandgap ma ka papa epitaxial, a ʻo ka silicon carbide wafer ponoʻī wale nō e lawelawe ma ke ʻano he substrate. No laila, he mea nui ka mana o ka papa epitaxial o ka ʻoihana semiconductor bandgap ākea.

7 mau mākau nui i ka ʻenehana epitaxy

1. Hiki ke hoʻoulu ʻia nā papa epitaxial kiʻekiʻe (haʻahaʻa) ma luna o nā substrate kūʻē haʻahaʻa (kiʻekiʻe).
2. Hiki ke hoʻoulu ʻia ka papa epitaxial ʻano N (P) ma luna o ka substrate ʻano P (N) e hana pololei i kahi hui PN. ʻAʻohe pilikia uku i ka wā e hoʻohana ai i ke ʻano diffusion e hana i kahi hui PN ma kahi substrate kristal hoʻokahi.
3. Hoʻohuiʻia me kaʻenehana mask, kohoʻia ka uluʻana o ka epitaxial i nā wahi i kohoʻia, e hana ana i nā kūlana no ka hanaʻana i nā'ōpuni i hoʻohuiʻia a me nā mea hana me nā hale kūikawā.
4. Hiki ke hoʻololi ʻia ke ʻano a me ka neʻe ʻana o ka doping e like me nā pono i ka wā o ka ulu ʻana o ka epitaxial. ʻO ka hoʻololi ʻana i ka noʻonoʻo hiki ke hoʻololi koke a i ʻole ka loli lohi.
5. Hiki ke ulu i ka heterogeneous, multi-layered, multi-component compounds a ultra-thin layers me nā mea hoʻololi.
6. Hiki ke hoʻokō ʻia ka ulu ʻana o ka epitaxial ma kahi wela haʻahaʻa ma mua o ka helu heheʻe o ka mea, hiki ke hoʻopaʻa ʻia ka ulu ulu ʻana, a hiki ke hoʻokō ʻia ka ulu ʻana o ka epitaxial o ka mānoanoa pae atomic.
7. Hiki iā ia ke ulu i nā mea aniani hoʻokahi i hiki ʻole ke huki ʻia, e like me GaN, nā ʻāpana aniani hoʻokahi o nā pūhui tertiary a me quaternary, etc.