Nā paepae i hoʻohana mau ʻia no ka epitaxy phase vapor

I ka wā o ka vapor phase epitaxy (VPE), ʻo ke kuleana o ka pedestal ke kākoʻo i ka substrate a hōʻoia i ka hoʻomehana ʻana i ka wā o ka ulu ʻana. Kūpono nā ʻano ʻano pedestal no nā kūlana ulu like ʻole a me nā ʻōnaehana waiwai. Eia kekahi o nā ʻano paepae maʻamau i ka pae mahuepitaxy:

Paepae pahu

Hoʻohana maʻamau ʻia nā paepae barela i nā ʻōnaehana epitaxy pae a i ʻole nā ​​hiʻohiʻona. Hiki iā lākou ke hoʻopaʻa i ka substrate a ʻae i ka holo ʻana o ke kinoea ma luna o ka substrate, e kōkua ana e hoʻokō i ka ulu epitaxial like.

Pedest-like disc (pae kūwae)

He kūpono nā paepae i ke ʻano o ka disc no nā ʻōnaehana epitaxy phase vapor vertical, kahi i hoʻonoho ʻia ai ka substrate ma ke kū pololei. Kōkua kēia hoʻolālā e hōʻemi i ka wahi hoʻopili ma waena o ka substrate a me ka susceptor, a laila e hōʻemi ana i ka nalo wela a me ka hoʻohaumia ʻana.

Horizontal susceptor

ʻAʻole maʻamau ka susceptors horizontal i ka epitaxy phase vapor, akā hiki ke hoʻohana ʻia i kekahi mau ʻōnaehana ulu kikoʻī e ʻae i ka ulu ʻana o ka epitaxial ma kahi kuhikuhi.

Monolithic epitaxial reaction susceptor

Hoʻolālā ʻia ka monolithic epitaxial reaction susceptor no ka substrate hoʻokahi, hiki ke hāʻawi i ka mana o ka wela kūpono a me ka hoʻokaʻawale wela maikaʻi, kūpono no ka ulu ʻana o nā papa epitaxial kiʻekiʻe.

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