Ka hoʻohana ʻana i nā seramika silicon carbide ma ke kahua semiconductor

ʻO ka mea i makemake ʻia no nā ʻāpana pololei o nā mīkini photolithography

Ma ke kahua semiconductor,silika carbide keramikaHoʻohana nui ʻia nā mea hana i nā mea hana nui no ka hana ʻana i ka circuit circuit, e like me ka silicon carbide worktable, alakaʻi ala,nā mea hoʻomanaʻo, pahu hoʻoheheʻe keramika, nā lima, nā diski wili, nā mea paʻa, a pēlā aku no nā mīkini lithography.

ʻO nā ʻāpana seramika Silicon carbideno nā mea semiconductor a me nā mea hana optical

● Silicon carbide ceramic wili disc. Inā hana ʻia ka disc wili i ka hao a i ʻole ke kila kalapona, pōkole kona ola lawelawe a nui kona koena hoʻonui wela. I ka wā o ka hana ʻana i nā wafer silika, ʻoi loa i ka wā o ka wili kiʻekiʻe a i ʻole ka polishing, ʻo ka ʻaʻahu a me ka hoʻololi ʻana o ka wela o ka disc wili i mea paʻakikī e hōʻoia i ka palahalaha a me ka like o ka wafer silicon. ʻO ka disc wili i hana ʻia me ka silicon carbide ceramics he kiʻekiʻe ka paʻakikī a me ke kapa haʻahaʻa, a ʻo ka coefficient hoʻonui wela ka mea like me nā wafers silicon, no laila hiki ke hoʻopaʻa ʻia a hoʻoliʻi ʻia i ka wikiwiki.
● Silicon carbide ceramic fixture. Eia kekahi, i ka wā e hana ʻia ai nā wafer silika, pono lākou e hoʻomaʻamaʻa i ka wela wela a lawe pinepine ʻia me ka hoʻohana ʻana i ka silicon carbide fixtures. He pale wela lākou a ʻaʻole luku. Hiki ke hoʻohana ʻia ke kalapona e like me ke daimana (DLC) a me nā mea uhi ʻē aʻe ma luna o ka ʻili e hoʻomaikaʻi i ka hana, hoʻēmi i ka pōʻino wafer, a pale i ka palaha ʻana.
● Silicon carbide papa hana. ʻO ka lawe ʻana i ka papa hana ma ka mīkini lithography ma ke ʻano he laʻana, ʻo ka papa hana ke kuleana nui no ka hoʻopau ʻana i ka neʻe ʻana, e koi ana i ka neʻe ultra-precision kiʻekiʻe, nui-stroke, ʻeono degere-o-kūʻokoʻa. No ka laʻana, no ka mīkini lithography me ka hoʻonā o 100nm, kahi overlay pololei o 33nm, a me kahi laina laina o 10nm, pono ka pololei o ka hoʻonohonoho ʻana i ka papa hana a hiki i 10nm, ʻo ka mask-silicon wafer i ka manawa like a me ka wikiwiki scanning he 150nm/s. a me 120nm/s i kēlā me kēia, a ua kokoke ka wikiwiki scan mask 500nm / s, a me ka papa hana pono e loaʻa kiʻekiʻe kiʻekiʻe ka neʻe pololei a me ka paʻa.

Kiʻikuhi kiʻi o ka papa hana a me ka pākaukau micro-motion (ʻāpana hapa)

● Silicon carbide ceramic square aniani. ʻO nā ʻāpana koʻikoʻi o nā lako kaapuni hoʻohui nui e like me nā mīkini lithography he ʻano paʻakikī, nā ana paʻakikī, a me nā hale māmā māmā, e paʻakikī ai ka hoʻomākaukau ʻana i nā ʻāpana ceramic silicon carbide. I kēia manawa, hoʻohana nui nā mea hana e like me ASML ma Netherlands, NIKON a me CANON i Iapana, e like me ke aniani microcrystalline a me cordierite e hoʻomākaukau ai i nā aniani square, nā mea nui o nā mīkini lithography, a hoʻohana i ka silicon carbide. nā seramika e hoʻomākaukau i nā mea hana kiʻekiʻe me nā ʻano maʻalahi. Eia naʻe, ua hoʻohana ka poʻe loea mai ka China Building Materials Research Institute i ka ʻenehana hoʻomākaukau ponoʻī e hoʻokō i ka hoʻomākaukau ʻana i ka nui-nui, paʻakikī, ʻano māmā, paʻa piha i ka silicon carbide ceramic square mirrors a me nā ʻāpana optical structural a me nā mea hana no nā mīkini lithography.