Hoʻohana ʻia nā pahuhopu sputtering i nā kaapuni hoʻohui semiconductor

Sputtering targetshoʻohana nui ʻia i nā ʻoihana uila a me nā ʻike ʻike, e like me nā kaapuni i hoʻohui ʻia, ka mālama ʻana i ka ʻike, nā hōʻike aniani wai, nā hoʻomanaʻo laser, nā mana uila uila, a me nā mea ʻē aʻe. nā mea waiwai, ke kū'ē i ka corrosion kiʻekiʻe , nā huahana hoʻonani kiʻekiʻe a me nāʻoihana'ē aʻe.

ʻO ka sputtering kekahi o nā hana nui no ka hoʻomākaukau ʻana i nā mea kiʻiʻoniʻoni lahilahi.Hoʻohana ʻo ia i nā ion i hana ʻia e nā kumu ion e hoʻolalelale a hōʻuluʻulu ʻia i loko o kahi hakahaka e hana ai i nā kaola ion ikehu kiʻekiʻe, hoʻopā i ka ʻili paʻa, a hoʻololi i ka ikehu kinetic ma waena o nā ion a me nā ʻāpana ʻili paʻa. Haʻalele nā ​​ʻātoma ma ka ʻili paʻa i ka paʻa a waiho ʻia ma ka ʻili o ka substrate. ʻO ka paʻa paʻa ʻia ka mea maka no ka waiho ʻana i nā kiʻiʻoniʻoni lahilahi ma o ka sputtering, i kapa ʻia ʻo sputtering target. Ua hoʻohana nui ʻia nā ʻano mea kiʻiʻoniʻoni lahilahi sputtered i nā kaapuni semiconductor i hoʻohui ʻia, ka media hoʻopaʻa leo, nā hōʻike pālahalaha a me nā uhi ʻili o ka mea hana.

Ma waena o nā ʻoihana noi a pau, loaʻa i ka ʻoihana semiconductor nā koi koʻikoʻi koʻikoʻi no nā kiʻi ʻoniʻoni sputtering. ʻO ka lawe ʻana i ka hana chip ma ke ʻano he laʻana, hiki iā mākou ke ʻike mai kahi wafer silicon a i kahi chip, pono ia e hele i nā kaʻina hana nui 7, ʻo ia hoʻi ka diffusion (Thermal Process), Photo-lithography (Photo-lithography), Etch (Etch), Hoʻokomo ʻia ʻo Ion (IonImplant), Hoʻoulu Kiʻiʻoniʻoni ʻoniʻoni (Dielectric Deposition), Chemical Mechanical Polishing (CMP), Metalization (Metalization) Kūlike nā kaʻina hana i kēlā me kēia. Hoʻohana ʻia ka pahuhopu sputtering i ke kaʻina o ka "metalization". Hoʻopiʻi ʻia ka pahuhopu me nā ʻāpana ikaika kiʻekiʻe e nā mea hoʻoheheʻe kiʻi ʻoniʻoni lahilahi a laila hoʻokumu ʻia kahi papa metala me nā hana kikoʻī ma luna o ka wafer silicon, e like me ka conductive layer, barrier layer. E kali. No ka mea ua ʻokoʻa nā kaʻina hana o nā semiconductor holoʻokoʻa a laila pono kekahi mau manawa no ka hōʻoia ʻana i ke ola pono ʻana o ka ʻōnaehana no laila koi mākou i kekahi ʻano mea dummy i kekahi mau pae o ka hana e hōʻoia i nā hopena.