He kiʻekiʻe loa nā koi o ka ʻoihana Semiconductor o nā pono graphite, ʻoi aku ka pololei o ka nui o ka graphite, ke kūpaʻa wela kiʻekiʻe, ka ikaika kiʻekiʻe, nā poho liʻiliʻi a me nā pono ʻē aʻe, e like me: sintered graphite products mold.No ka mea, ʻo nā mea hana graphite i hoʻohana ʻia i ka ʻoihana semiconductor (me nā mea wela a me kā lākou sintered make) pono e kū i nā kaʻina hana hoʻomehana a me ka hoʻoluʻu, i mea e hoʻonui ai i ke ola lawelawe o nā mea hana graphite, ʻoi aku ka maʻamau o nā mea graphite i hoʻohana ʻia i ka hana paʻa. a me ka hana hopena pale wela.
01 Nā mea hana graphite no ka ulu ʻana o ke aniani semiconductor
Ke hana nei nā kaʻina hana a pau no ka ulu ʻana i nā kristal semiconductor ma lalo o ka wela kiʻekiʻe a me ke kaiapuni corrosive. Hoʻolako pinepine ʻia ka wahi wela o ka umu ulu kristal me nā ʻāpana graphite hoʻomaʻemaʻe kiʻekiʻe a me ka corrosion, e like me ka heater, crucible, insulation cylinder, guide cylinder, electrode, crucible holder, electrode nut, etc.
Hiki iā mākou ke hana i nā ʻāpana graphite āpau o nā mea hana kristal, hiki ke hoʻolako ʻia i kēlā me kēia a i ʻole i nā pūʻulu, a i ʻole nā ʻāpana graphite maʻamau o nā ʻano nui e like me nā koi o ka mea kūʻai aku. Hiki ke ana ʻia ka nui o nā huahana ma ka pūnaewele, a ʻoi aku ka liʻiliʻi o ka lehu o nā huahana i hoʻopau ʻiama mua o 5ppm.
02 Nā mea hana graphite no ka epitaxy semiconductor
ʻO ke kaʻina hana epitaxial e pili ana i ka ulu ʻana o kahi papa o nā mea aniani hoʻokahi me ka hoʻonohonoho lattice like me ka substrate ma ka substrate kristal hoʻokahi. Ma ke kaʻina hana epitaxial, hoʻouka ʻia ka wafer ma ka disk graphite. ʻO ka hana a me ka maikaʻi o ka diski graphite he kuleana koʻikoʻi i ka maikaʻi o ka papa epitaxial o ka wafer. Ma ke kahua o ka hana epitaxial, he nui ka ultra-high purity graphite a me ka hoʻomaʻemaʻe kiʻekiʻe graphite kumu me ka SIC coating e pono ai.
ʻO ke kumu graphite o kā mākou hui no ka semiconductor epitaxy he nui nā noi, hiki ke hoʻohālikelike i ka hapa nui o nā mea hana maʻamau i ka ʻoihana, a loaʻa ka maʻemaʻe kiʻekiʻe, ka uhi like ʻole, ke ola lawelawe maikaʻi loa, a me ke kūpaʻa kemika kiʻekiʻe a me ke kūpaʻa wela.
03 Nā mea hana graphite no ka hoʻokomo ʻana i ka ion
ʻO ka hoʻokomo ʻana o Ion e pili ana i ke kaʻina hana o ka wikiwiki ʻana i ka beam plasma o boron, phosphorus a me arsenic i kekahi ikehu, a laila hoʻokomo ʻia i loko o ka ʻili o ka mea wafer e hoʻololi i nā waiwai waiwai o ka papa honua. E hana ʻia nā ʻāpana o ka implantation i nā mea maʻemaʻe kiʻekiʻe me ke kūpaʻa wela maikaʻi loa, ka conductivity thermal, ka liʻiliʻi o ka corrosion i kumu ʻia e ka ion beam a me ka haʻahaʻa haʻahaʻa haumia. ʻO ka graphite maʻemaʻe kiʻekiʻe e hoʻokō i nā koi noi, a hiki ke hoʻohana ʻia no ka paipu lele, nā ʻāpana like ʻole, nā electrodes, nā uhi electrode, conduits, beam terminator, etc. o nā lako implantation ion.
ʻAʻole hiki iā mākou ke hāʻawi wale i ka uhi pale graphite no nā mīkini implantation ion, akā hāʻawi pū kekahi i nā electrodes graphite maʻemaʻe kiʻekiʻe a me nā kumu ion me ke kūpaʻa corrosion kiʻekiʻe o nā kikoʻī like ʻole. Nā hiʻohiʻona kūpono: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM a me nā mea hana ʻē aʻe. Eia kekahi, hiki iā mākou ke hāʻawi i ka seramika like, tungsten, molybdenum, nā huahana alumini a me nā ʻāpana i uhi ʻia.
04 Nā mea hoʻokaʻawale graphite a me nā mea ʻē aʻe
ʻO nā mea hoʻonā wela wela i hoʻohana ʻia i nā lako hana semiconductor e pili ana i ka graphite hard feel, soft felt, graphite foil, graphite pepa, a me ke kaula graphite.
ʻO kā mākou mau mea waiwai āpau i lawe ʻia mai ka graphite, hiki ke ʻoki ʻia e like me ka nui kikoʻī o nā koi o ka mea kūʻai aku a kūʻai ʻia paha ma ke ʻano holoʻokoʻa.
Hoʻohana ʻia ka pahu kalapona kalapona e like me ka mea lawe no ka uhi kiʻiʻoniʻoni i ke kaʻina hana o ka silikon monocrystalline solar a me nā cell silicon polycrystalline. ʻO ke kumu hana: e hoʻokomo i ka chip silicon i loko o ka pā CFC a hoʻouna iā ia i loko o ka pahu umu ahi e hana i ka uhi kiʻiʻoniʻoni.
