VET Energy PECVD tsari graphite wafer goyon bayan wani core consumable tsara don PECVD (plasma ingantacciyar sinadari tururi jijiya). Wannan samfurin da aka yi da high-tsarki, high-yawa graphite abu, tare da kyau kwarai high zafin jiki juriya, lalata juriya, girma da kwanciyar hankali da sauran halaye, na iya samar da barga goyon bayan dandali ga PECVD tsari, don tabbatar da uniformity da flatness na film ajiya.
Tsarin "tallafin graphite" na goyon bayan VET Energy graphite wafer ba zai iya tallafawa wafer kawai yadda ya kamata ba, har ma yana ba da kwanciyar hankali na thermal a cikin yanayin zafin jiki da matsa lamba PECVD don tabbatar da kwanciyar hankali na tsari.
VET Energy PECVD goyon bayan wafer graphite yana da halaye masu zuwa:
▪Babban tsarki:ƙarancin ƙazantaccen abun ciki, guje wa gurɓatar fim ɗin, don tabbatar da ingancin fim ɗin.
▪Babban yawa:high yawa, high inji ƙarfi, iya jure high zafin jiki da kuma high matsa lamba PECVD yanayi.
▪Kyakkyawan kwanciyar hankali:ƙananan ƙananan canje-canje a babban zafin jiki don tabbatar da kwanciyar hankali na tsari.
▪Kyakkyawan thermal conductivity:yadda ya kamata canja wurin zafi don hana wafer overheating.
▪Juriya mai ƙarfi mai ƙarfi:Iya yin tsayayya da yashwar da iskar gas iri-iri da kuma plasma.
▪Sabis na musamman:Teburan tallafi na graphite na girma da siffofi daban-daban ana iya keɓance su gwargwadon buƙatun abokin ciniki.
Abubuwan graphite daga SGL:
| Na yau da kullun: R6510 | |||
| Fihirisa | Gwaji misali | Daraja | Naúrar |
| Matsakaicin girman hatsi | ISO 13320 | 10 | μm |
| Yawan yawa | DIN IEC 60413/204 | 1.83 | g/cm3 |
| Bude porosity | Farashin 66133 | 10 | % |
| Girman pore matsakaici | Farashin 66133 | 1.8 | μm |
| Lalacewa | Farashin 51935 | 0.06 | cm²/s |
| Rockwell taurin HR5/100 | DIN IEC60413/303 | 90 | HR |
| Takamaiman tsayayyar wutar lantarki | DIN IEC 60413/402 | 13 | μΩm |
| Ƙarfin sassauƙa | DIN IEC 60413/501 | 60 | MPa |
| Ƙarfin matsi | Farashin 51910 | 130 | MPa |
| Modules na matasa | Farashin 51915 | 11.5×10³ | MPa |
| Thermal fadada (20-200 ℃) | Farashin 51909 | 4.2X10-6 | K-1 |
| Thermal conductivity (20 ℃) | Farashin 51908 | 105 | Wm-1K-1 |
An ƙirƙira shi musamman don ƙirar ƙirar hasken rana mai inganci, yana tallafawa sarrafa wafer mai girma G12. Ingantacciyar ƙira mai ɗaukar kaya yana ƙaruwa sosai da fitarwa, yana ba da damar ƙimar yawan amfanin ƙasa da ƙananan farashin samarwa.
| Abu | Nau'in | Mai ɗaukar waya mai lamba |
| Jirgin ruwan PEVCD Grephite - Jerin 156 | 156-13 grephite jirgin ruwa | 144 |
| 156-19 grephite jirgin ruwa | 216 | |
| 156-21 grephite jirgin ruwa | 240 | |
| 156-23 graphite jirgin ruwa | 308 | |
| Jirgin ruwan PEVCD Grephite - Jerin 125 | 125-15 grephite jirgin ruwa | 196 |
| 125-19 grephite jirgin ruwa | 252 | |
| 125-21 jirgin ruwan graphite | 280 |
