Menene bambanci tsakanin PECVD da LPCVD a cikin kayan aikin CVD na semiconductor?

Tushen sinadarai (CVD) yana nufin tsarin adana fim mai ƙarfi a saman silikiwaferta hanyar sinadarai na cakuda gas. Dangane da yanayi daban-daban na amsawa (matsi, precursor), ana iya raba shi zuwa samfuran kayan aiki daban-daban.

Wadanne matakai ake amfani da waɗannan na'urori biyu?
PECVDKayan aiki (Plasma Enhanced) sune mafi yawa kuma mafi yawan amfani da su, ana amfani da su a cikin OX, Nitride, ƙofar karfe, carbon amorphous, da dai sauransu; LPCVD (Ƙarfin Ƙarfi) yawanci ana amfani dashi a Nitride, poly, TEOS.
Menene ka'ida?
PECVD-tsari wanda ya haɗa daidaitaccen makamashin plasma da CVD. Fasahar PECVD tana amfani da plasma mai ƙarancin zafin jiki don haifar da fitarwa mai haske a cikin cathode na ɗakin tsari (watau tire samfurin) ƙarƙashin ƙaramin matsi. Wannan fitarwa mai haske ko wata na'urar dumama na iya ɗaga zafin samfurin zuwa matakin da aka ƙaddara, sannan gabatar da adadin iskar gas mai sarrafawa. Wannan iskar yana jure wa jerin halayen sinadarai da plasma, kuma a ƙarshe ya samar da wani fim mai ƙarfi a saman samfurin.

LPCVD - Ƙarƙashin ƙwayar tururin sinadarai (LPCVD) an ƙera shi don rage matsi na aiki na iskar gas a cikin reactor zuwa kusan 133Pa ko ƙasa da haka.
Menene halayen kowannensu?
PECVD - Tsarin da ya haɗa daidai da makamashin plasma da CVD: 1) Ƙarƙashin zafin jiki na aiki (kauce wa babban zafin jiki lalacewar kayan aiki); 2) Ci gaban fim mai sauri; 3) Ba picky game da kayan, OX, Nitride, karfe ƙofar, amorphous carbon iya girma duka; 4) Akwai tsarin kulawa a cikin wurin, wanda zai iya daidaita girke-girke ta hanyar sigogi na ion, yawan iskar gas, zazzabi da kauri na fim.
LPCVD - Fina-finan bakin ciki da aka ajiye ta LPCVD za su sami mafi kyawun ɗaukar hoto, ingantaccen abun da ke ciki da sarrafa tsari, babban adadin ajiya da fitarwa. Bugu da ƙari, LPCVD ba ya buƙatar iskar gas mai ɗaukar kaya, don haka yana rage tushen gurɓataccen ƙwayar cuta kuma ana amfani da shi sosai a cikin masana'antun da aka ƙara darajar semiconductor don ƙaddamar da fim na bakin ciki.

 

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