Tanderu crystal guda ɗaya na'urar da ke amfani da agraphite hitadon narke polycrystalline silicon kayan a cikin inert gas (argon) yanayi da kuma amfani da Czochralski hanya don girma wadanda ba a raba lu'ulu'u guda. An fi haɗa shi da waɗannan tsare-tsare:
Tsarin watsa injina
The inji watsa tsarin ne na asali tsarin aiki na guda crystal makera, wanda shi ne yafi alhakin sarrafa motsi na lu'ulu'u da kuma.crucibles, ciki har da ɗagawa da juyawa na lu'ulu'u iri da ɗagawa da juyawa nacrucibles. Zai iya daidaita daidaitattun sigogi kamar matsayi, saurin gudu da kusurwar jujjuyawar lu'ulu'u da crucibles don tabbatar da ingantaccen ci gaba na tsarin ci gaban crystal. Misali, a cikin matakan girma daban-daban na kristal kamar iri, wuya, kafada, girman diamita daidai da wutsiya, motsi na lu'ulu'u iri da crucibles yana buƙatar kulawa daidai da wannan tsarin don biyan buƙatun aiwatar da haɓakar crystal.
Tsarin kula da zafin jiki mai zafi
Wannan yana ɗaya daga cikin mahimman tsarin wutar lantarki guda ɗaya, wanda ake amfani dashi don samar da zafi da kuma sarrafa daidaitattun zafin jiki a cikin tanderun. Ya ƙunshi abubuwa da yawa kamar na'urorin dumama, na'urori masu auna zafin jiki, da masu kula da zafin jiki. Ana yin hita yawanci da kayan aiki irin su graphite mai tsafta. Bayan an canza madaidaicin halin yanzu kuma an rage shi don ƙara yawan na yanzu, mai zafi yana haifar da zafi don narke kayan polycrystalline kamar polysilicon a cikin crucible. Na'urar firikwensin zafin jiki yana lura da canjin zafin jiki a cikin tanderu a ainihin lokacin kuma yana watsa siginar zafin jiki zuwa mai sarrafa zafin jiki. Mai kula da zafin jiki daidai yake sarrafa ikon dumama bisa ga saitunan zafin jiki da aka saita da siginar zafin ra'ayi, don haka kiyaye kwanciyar hankali na zafin jiki a cikin tanderun da kuma samar da yanayin zafi mai dacewa don haɓakar crystal.
Tsarin sarari
Babban aikin tsarin injin shine don ƙirƙira da kuma kula da yanayi mara kyau a cikin tanderun yayin aikin haɓakar crystal. Ana fitar da iskar gas da najasa da ke cikin tanderu ta hanyar famfunan ruwa da sauran kayan aiki don sanya matsin iskar gas a cikin tanderun ya kai matakin ƙasa da ƙasa, gabaɗaya ƙasa da 5TOR (torr). Wannan zai iya hana kayan silicon daga kasancewa oxidized a yanayin zafi mai yawa kuma tabbatar da tsabta da ingancin ci gaban crystal. A lokaci guda kuma, yanayin injin yana da amfani don kawar da ƙazantattun ƙazanta waɗanda aka haifar yayin aikin haɓakar kristal da haɓaka ingancin kristal.
Argon tsarin
Tsarin argon yana taka rawa wajen karewa da daidaita matsa lamba a cikin tanda a cikin tanderun crystal guda ɗaya. Bayan shafewa, iskar argon mai tsabta (tsaftar dole ne sama da 6 9) an cika shi a cikin tanderun. A gefe guda, zai iya hana iska daga waje shiga cikin tanderun kuma ya hana kayan silicon daga zama oxidized; a gefe guda, cikawar iskar gas na argon na iya kula da matsa lamba a cikin kwanciyar hankali da kuma samar da yanayin matsa lamba mai dacewa don ci gaban crystal. Bugu da kari, kwararar iskar argon kuma na iya kawar da zafin da ake samu yayin aikin ci gaban kristal, yana taka wata rawar sanyaya.
Tsarin sanyaya ruwa
Ayyukan tsarin sanyaya ruwa shine don kwantar da nau'ikan nau'ikan zafin jiki daban-daban na tanderun crystal guda ɗaya don tabbatar da aiki na yau da kullun da rayuwar sabis na kayan aiki. A lokacin aiki na guda crystal makera, da hita.crucible, Electrode da sauran abubuwan da zasu haifar da zafi mai yawa. Idan ba a sanyaya su cikin lokaci ba, kayan aikin za su yi zafi sosai, su lalace ko ma sun lalace. Tsarin sanyaya ruwa yana ɗauke da zafin waɗannan abubuwan ta hanyar kewaya ruwan sanyi don kiyaye zafin jiki na kayan aiki a cikin kewayon aminci. A lokaci guda kuma, tsarin sanyaya ruwa zai iya taimakawa wajen daidaita yanayin zafi a cikin tanderun don inganta daidaiton yanayin zafin jiki.
Tsarin sarrafa wutar lantarki
Tsarin kula da wutar lantarki shine "kwakwalwa" na murhun kristal guda ɗaya, wanda ke da alhakin kulawa da sarrafa duk kayan aiki. Yana iya karɓar sigina daga na'urori masu auna firikwensin daban-daban, kamar na'urori masu auna zafin jiki, na'urori masu auna matsa lamba, na'urori masu auna matsayi, da dai sauransu, da daidaitawa da sarrafa tsarin watsawa na inji, tsarin kula da zafin jiki na dumama, tsarin vacuum, tsarin argon da tsarin sanyaya ruwa dangane da waɗannan sigina. Alal misali, yayin tsarin ci gaban crystal, tsarin kula da wutar lantarki na iya daidaita wutar lantarki ta atomatik bisa ga siginar zafin jiki da aka mayar da shi ta hanyar firikwensin zafin jiki; bisa ga ci gaban kristal, yana iya sarrafa saurin motsi da kusurwar juyawa na kristal iri da crucible. A lokaci guda kuma, tsarin kula da wutar lantarki yana da kuskuren ganewar asali da ayyukan ƙararrawa, wanda zai iya gano yanayin rashin daidaituwa na kayan aiki a cikin lokaci kuma tabbatar da aikin aminci na kayan aiki.
Lokacin aikawa: Satumba-23-2024