Silicon carbide crystal girma tsari da kayan aikin fasaha

1. Hanyar haɓaka fasahar SiC crystal

PVT (hanyar sublimation),

HTCVD (CVD mai zafin jiki),

LPE(Hanyar lokaci mai ruwa)

uku na kowaSiC crystalhanyoyin girma;

Hanyar da aka fi sani a cikin masana'antu ita ce hanyar PVT, kuma fiye da 95% na SiC guda lu'ulu'u suna girma ta hanyar PVT;

Masana'antuSiC crystalwutar makera tana amfani da babbar hanyar fasahar PVT ta masana'antu.

2. SiC crystal girma tsari

Foda kira-iri crystal magani-crystal girma-ingot annealing-wafersarrafawa.

3. Hanyar PVT don girmaSiC crystals

Ana sanya albarkatun SiC a kasan ginshiƙin graphite, kuma kristal iri na SiC yana saman faifan graphite. Ta hanyar daidaita rufin, zafin jiki a kayan albarkatun SiC ya fi girma kuma yawan zafin jiki a kristal iri ya ragu. The SiC albarkatun kasa a high zafin jiki sublimates kuma bazuwa cikin gas lokaci abubuwa, wanda ake hawa zuwa iri crystal tare da ƙananan zafin jiki da crystallize samar da SiC lu'ulu'u. Tsarin ci gaba na asali ya haɗa da matakai guda uku: bazuwa da ƙaddamar da kayan albarkatun ƙasa, canja wurin taro, da crystallization akan lu'ulu'u iri.

Rushewa da ƙaddamar da albarkatun ƙasa:

SiC(S)= Si(g)+C(S)

2SiC(S)= Si(g)+ SiC2(g)

2SiC(S)=C(S)+SiC2(g)

Yayin canja wurin taro, Si tururi ya ƙara yin amsa tare da bangon graphite crucible don samar da SiC2 da Si2C:

Si(g)+2C(S) =SiC2(g)

2Si(g) +C(S)=Si2C(g)

A saman kristal iri, matakan iskar gas guda uku suna girma ta hanyoyi biyu masu zuwa don samar da lu'ulu'u na silicon carbide:

SiC2_(g)+ Si2C_(g)= 3 SiC_(s)

Si_(g)+ SiC2_(g)= 2 SiC_(S)

4. PVT Hanyar girma SiC crystal girma kayan aiki hanya fasaha

A halin yanzu, dumama shigar da ita hanyar fasaha ce gama gari don hanyar PVT SiC crystal girma tanderu;

Dumamar shigar da Coil na waje da dumama juriya na graphite sune alkiblar haɓakawaSiC crystalgirma tanderu.

5. 8-inch SiC induction dumama tanderun girma

(1) Dumama dagraphite crucible dumama kashita hanyar shigar da filin magnetic; daidaita yanayin zafin jiki ta hanyar daidaita wutar lantarki, matsayi na coil, da tsarin sutura;

(2) Dumama da graphite crucible ta graphite juriya dumama da thermal radiation conduction; sarrafa filin zafin jiki ta hanyar daidaita halin yanzu na graphite hita, tsarin na'ura mai zafi, da kuma kula da yanki na yanzu;