Za a iya shirya suturar SiC ta hanyar shigar da tururi mai guba (CVD), canji na precursor, fesa plasma, da dai sauransu. Rufin da aka shirya ta hanyar CHEMICAL tururi ya zama uniform da m, kuma yana da kyakkyawan tsari. Amfani da methyl trichlosilane. (CHzSiCl3, MTS) a matsayin tushen silicon, SiC shafi shirya ...
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