Tsarin tururi na sinadarai(CVD)ita ce fasahar da aka fi amfani da ita a cikin masana'antar semiconductor don ajiye kayan aiki iri-iri, ciki har da nau'ikan kayan haɓaka, yawancin kayan ƙarfe da kayan haɗin ƙarfe.
CVD fasahar shirya fina-finai ce ta gargajiya. Ka'idarsa ita ce a yi amfani da precursors na iskar gas don lalata wasu abubuwan da ke cikin mahallin ta hanyar halayen sinadarai tsakanin kwayoyin halitta da kwayoyin halitta, sannan a samar da fim na bakin ciki a kan substrate. Siffofin asali na CVD sune: canje-canjen sinadarai (halayen sinadarai ko bazuwar thermal); duk kayan da ke cikin fim ɗin sun fito ne daga tushen waje; reactants dole ne su shiga cikin dauki a cikin nau'i na gas lokaci.
Low matsa lamba sinadaran tururi jijiya (LPCVD), plasma ingantattun sinadarai tururi shaida (PECVD) da kuma babban yawa plasma tururin tururi (HDP-CVD) su ne uku na kowa CVD fasahar, wanda ke da gagarumin bambance-bambance a cikin abun ciki ajiya, kayan aiki bukatun, tsari yanayi, da dai sauransu Mai zuwa shine bayani mai sauƙi da kwatanta waɗannan fasahohin guda uku.
1. LPCVD (CVD Low Matsi)
Ƙa'ida: Tsarin CVD a ƙarƙashin ƙananan yanayi. Ka'idarsa ita ce allurar iskar gas a cikin ɗakin amsawa a ƙarƙashin injin motsa jiki ko yanayi mara ƙarfi, bazuwa ko amsa iskar ta yanayin zafi mai ƙarfi, da samar da ingantaccen fim ɗin da aka ajiye akan saman ƙasa. Tun da ƙananan matsa lamba yana rage haɗarin gas da tashin hankali, an inganta daidaituwa da ingancin fim din. Ana amfani da LPCVD sosai a cikin silicon dioxide (LTO TEOS), silicon nitride (Si3N4), polysilicon (POLY), gilashin phosphosilicate (BSG), gilashin borophosphosilicate (BPSG), polysilicon doped, graphene, carbon nanotubes da sauran fina-finai.
Siffofin:
▪ Yanayin aiki: yawanci tsakanin 500 ~ 900 ° C, tsarin zafin jiki yana da inganci;
▪ Matsakaicin iskar gas: ƙananan yanayin matsa lamba na 0.1 ~ 10 Torr;
▪ Ingancin fim: inganci mai kyau, daidaito mai kyau, ɗimbin yawa, da ƙarancin lahani;
▪ Yawan ajiya: jinkirin yawan ajiyar kuɗi;
▪ Uniformity: dace da manyan ɗimbin ɗimbin ɗimbin ɗimbin ɗabi'a, jigon kayan ɗamara;
Abũbuwan amfãni da rashin amfani:
Zai iya ajiye fina-finai iri-iri da yawa;
▪ Yana yin da kyau a kan manyan ɗimbin ɗimbin yawa, dace da samar da taro;
▪ Ƙananan farashi;
▪ Babban zafin jiki, bai dace da kayan zafin zafi ba;
▪ Yawan ajiya yana jinkirin kuma abin da ake fitarwa yana da ƙasa kaɗan.
2. PECVD (CVD Ingantaccen Plasma)
Ƙa'ida: Yi amfani da plasma don kunna halayen lokaci na iskar gas a ƙananan yanayin zafi, ionize da lalata kwayoyin halitta a cikin iskar gas, sannan saka fina-finai na bakin ciki a saman ƙasa. Ƙarfin ƙwayar plasma na iya rage yawan zafin jiki da ake buƙata don amsawa, kuma yana da aikace-aikace masu yawa. Ana iya shirya fina-finai na ƙarfe daban-daban, fina-finai na inorganic da fina-finai na halitta.
Siffofin:
▪ Yanayin aiki: yawanci tsakanin 200 ~ 400 ° C, zafin jiki yana da ƙananan ƙananan;
Kewayon matsin iskar gas: yawanci ɗaruruwan mTorr zuwa Torr da yawa;
▪ Ingancin fim: kodayake daidaiton fim ɗin yana da kyau, yawa da ingancin fim ɗin ba su kai LPCVD ba saboda lahani waɗanda plasma na iya gabatar da su;
▪ Adadin ajiya: babban ƙimar, ingantaccen samarwa;
Uniformity: ɗan ƙasa kaɗan zuwa LPCVD akan manyan ma'auni masu girma;
Abũbuwan amfãni da rashin amfani:
Za a iya ajiye fina-finai na bakin ciki a ƙananan yanayin zafi, dace da kayan da ke da zafi;
▪ Gudun ajiya mai sauri, dace da ingantaccen samarwa;
▪ Tsarin sassauƙa, ana iya sarrafa kayan fim ta hanyar daidaita sigogin plasma;
Plasma na iya gabatar da lahani na fim kamar ramuka ko rashin daidaituwa;
▪ Idan aka kwatanta da LPCVD, yawan fim ɗin da inganci sun ɗan fi muni.
3. HDP-CVD (High Density Plasma CVD)
Ƙa'ida: Fasaha ta musamman ta PECVD. HDP-CVD (kuma aka sani da ICP-CVD) na iya samar da mafi girma yawa na jini da inganci fiye da kayan aikin PECVD na al'ada a ƙananan yanayin ajiya. Bugu da kari, HDP-CVD yana ba da kusan juzu'in ion mai zaman kanta da ikon sarrafa makamashi, haɓaka ramuka ko ikon cika ramuka don buƙatar jigon fim, kamar sutturar riga-kafi, ƙarancin ƙarancin dielectric akai-akai, da sauransu.
Siffofin:
▪ Tsari zafin jiki: dakin zafin jiki zuwa 300 ℃, da tsari zafin jiki ne sosai low;
Matsakaicin matsin iskar gas: tsakanin 1 da 100 mTorr, ƙasa da PECVD;
▪ ingancin fim: babban nauyin plasma, babban ingancin fim, daidaito mai kyau;
▪ Adadin ajiya: Adadin ajiya yana tsakanin LPCVD da PECVD, dan kadan sama da LPCVD;
▪ Daidaituwa: saboda babban ƙwayar plasma mai yawa, daidaiton fim ɗin yana da kyau sosai, ya dace da filaye masu siffa mai rikitarwa;
Abũbuwan amfãni da rashin amfani:
▪ Iya ajiye fina-finai masu inganci a ƙananan yanayin zafi, wanda ya dace da kayan da ke da zafi sosai;
▪ Kyakkyawan daidaiton fim, yawa da santsi na saman;
▪ Maɗaukakin ƙwayar plasma mafi girma yana inganta daidaituwar ajiya da abubuwan fim;
▪ Rikicin kayan aiki da farashi mafi girma;
▪ Gudun ajiya yana jinkirin, kuma mafi girman ƙarfin plasma na iya haifar da ɗan ƙaramin lalacewa.
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Lokacin aikawa: Dec-03-2024