YADDA AKE YIN WAFAR SILICON
A waferwani yanki ne na siliki mai kauri kusan milimita 1 wanda ke da filaye mai faɗi sosai godiya ga hanyoyin da suke da matuƙar buƙata. Amfani na gaba yana ƙayyade wace hanyar girma crystal yakamata a yi amfani da ita. A cikin tsarin Czochralski, alal misali, siliki na polycrystalline yana narke kuma ana tsoma nau'in lu'ulu'u mai bakin fensir a cikin narkakkar siliki. Ana jujjuya kristal iri kuma a jawo sama a hankali. Colossus mai nauyi sosai, monocrystal, yana haifar da sakamako. Yana yiwuwa a zaɓi halayen lantarki na monocrystal ta ƙara ƙananan raka'a na dopants masu tsabta. Lu'ulu'u suna doped daidai da ƙayyadaddun abokin ciniki sannan kuma an goge su kuma a yanka su cikin yanka. Bayan ƙarin matakan samarwa daban-daban, abokin ciniki yana karɓar ƙayyadaddun wafers a cikin marufi na musamman, wanda ke ba abokin ciniki damar amfani da wafer nan da nan a cikin layin samarwa.
TSARIN CZOCHRALSKI
A yau, babban ɓangare na silicon monocrystals ana girma bisa ga tsarin Czochralski, wanda ya haɗa da narke polycrystalline high-tsarki silicon a cikin wani hyperpure quartz crucible da kuma ƙara da dopant (yawanci B, P, As, Sb). An tsoma siriri, nau'in lu'ulu'u na monocrystalline a cikin narkakkar siliki. Wani babban kristal CZ yana tasowa daga wannan siraren kristal. Daidaitaccen tsari na narkar da zafin silika da kwarara, kristal da jujjuyawar da ba za a iya gani ba, da kuma saurin ja da kristal yana haifar da ingot silicon monocrystalline mai inganci.
HANYA ZUWA MAI WUYA
Monocrystals da aka ƙera bisa ga hanyar yankin iyo suna da kyau don amfani a cikin abubuwan haɗin semiconductor, kamar IGBTs. Silindrical polycrystalline silicon ingot an ɗora shi akan coil induction. Filin lantarki na mitar rediyo yana taimakawa narke silicon daga ƙananan ɓangaren sandar. Filin lantarki na lantarki yana sarrafa kwararar silicon ta cikin ƙaramin rami a cikin coil induction da kuma kan monocrystal wanda ke ƙasa (hanyar yankin iyo). Doping, yawanci tare da B ko P, ana samun su ta hanyar ƙara abubuwan gas.
Lokacin aikawa: Juni-07-2021