Graphite tare da rufin TaC

I. Tsari binciken siga

1. TaCl5-C3H6-H2-Ar tsarin

2. Zazzabi:

Bisa ga ma'anar thermodynamic, ana ƙididdige cewa lokacin da zafin jiki ya fi 1273K, Gibbs kyauta na makamashi na amsa yana da ƙananan ƙananan kuma abin da ya faru ya cika. KP akai-akai yana da girma sosai a 1273K kuma yana ƙaruwa da sauri tare da zafin jiki, kuma ƙimar girma a hankali yana raguwa a 1773K.

Tasiri kan yanayin yanayin yanayin rufin: Lokacin da zafin jiki bai dace ba (maɗaukaki ko ƙasa da ƙasa), saman yana ba da ilimin halittar carbon kyauta ko ramuka mara kyau.

(1) A high yanayin zafi, da motsi gudun na aiki reactant atoms ko kungiyoyin ne da sauri, wanda zai kai ga m rarraba a lokacin jari na kayan, da kuma arziki da matalauta yankunan ba zai iya smoothly miƙa mulki, sakamakon pores.

(2) Akwai bambanci tsakanin ƙimar amsawar pyrolysis na alkanes da rage yawan amsawar tantalum pentachloride. Carbon pyrolysis ya wuce kima kuma ba za a iya haɗa shi da tantalum cikin lokaci ba, wanda ke haifar da saman da carbon ke naɗe shi.

Lokacin da zafin jiki ya dace, farfajiyarTaC shafiyana da yawa.

TaCbarbashi narke da tara da juna, da crystal form ne cikakke, da hatsi iyaka miƙa mulki smoothly.

3. Ruwan ruwa:

Bugu da ƙari, akwai abubuwa da yawa waɗanda ke shafar ingancin sutura:

- Substrate inganci

- filin iskar gas

-The mataki na uniformity na reactant gas hadawa

II. Matsalolin lahani natantalum carbide shafi

1. Rufe fata da bawo

Madaidaicin haɓakar haɓakar zafin jiki na linzamin CTE:

2. Binciken naƙasa:

(1) Domin:

(2) Hanyar sifa

① Yi amfani da fasahar watsawa ta X-ray don auna saura iri.

② Yi amfani da dokar Hu Ke don kimanta ragowar damuwa.

(3) Dabaru masu alaƙa

3.Enhance da inji karfinsu na shafi da substrate

(1) Surface a-wuri girma shafi

Jigon amsawar thermal da fasahar watsawa TRD

Narkar da gishiri tsari

Sauƙaƙe tsarin samarwa

Rage yawan zafin jiki

Ƙananan farashi

More m muhalli

Dace da manyan-sikelin masana'antu samar

(2) Rubutun canji mai hade

Tsarin haɗin gwiwa

CVDtsari

Rufe abubuwa masu yawa

Haɗa fa'idodin kowane bangare

A hankali daidaita abun da ke ciki na shafi da rabo

4. Thermal dauki ajiya da kuma watsa fasahar TRD

(1) Hanyar amsawa

Hakanan ana kiran fasahar TRD tsarin sakawa, wanda ke amfani da tsarin boric acid-tantalum pentoxide-sodium fluoride-boron oxide-boron carbide tsarin don shirya.tantalum carbide shafi.

① Molten boric acid yana narkar da tantalum pentoxide;

② Tantalum pentoxide an rage zuwa aiki tantalum atoms kuma ya yadu a kan graphite surface;

③ Active tantalum atom ana adsorbed a kan graphite surface da kuma mayar da martani da carbon atom don samar.tantalum carbide shafi.

(2) Makullin amsawa

Nau'in murfin carbide dole ne ya cika buƙatun cewa samar da iskar shaka samar da makamashi kyauta na sinadarin da ke samar da carbide ya fi na boron oxide.

Ƙarfin Gibbs kyauta na carbide yana da ƙarancin isa (in ba haka ba, boron ko boride na iya samuwa).

Tantalum pentoxide ne tsaka tsaki oxide. A cikin yanayin zafi mai zafi na borax, zai iya amsawa tare da mai karfi alkaline oxide sodium oxide don samar da sodium tantalate, don haka rage yawan zafin jiki na farko.