A yayin aiwatar da tsarin tururi na epitaxy (VPE), rawar ƙafar ƙafa shine don tallafawa ƙasa kuma tabbatar da dumama iri ɗaya yayin aiwatar da haɓaka. Daban-daban na ƙafafu sun dace da yanayin girma daban-daban da tsarin kayan aiki. Wadannan su ne wasu nau'ikan da aka saba amfani da su a lokacin tururiepitaxy:
Tufafin ganga
Ana yawan amfani da ƙwanƙolin ganga a kwance ko karkatar da tsarin lokacin tururi. Za su iya riƙe substrate kuma su ba da damar iskar gas ta gudana a kan substrate, wanda ke taimakawa wajen cimma ci gaban epitaxial iri ɗaya.
Tafarfasa mai siffar diski (tsawon ƙafar tsaye)
Matakai masu sifar diski sun dace da tsarin tururin lokaci na epitaxy na tsaye, wanda a cikinsa ake sanya madaidaicin a tsaye. Wannan zane yana taimakawa rage wurin hulɗar tsakanin ma'auni da mai haɗari, don haka rage asarar zafi da yuwuwar gurɓatawa.
A kwance mai cutarwa
Masu ciwon kai a kwance ba su da yawa a cikin lokacin hawan tururi, amma ana iya amfani da su a wasu takamaiman tsarin girma don ba da damar ci gaban epitaxial a madaidaiciyar hanya.
Monolithic epitaxial dauki susceptor
An tsara susceptor na monolithic epitaxial susceptor don juzu'i guda ɗaya, wanda zai iya samar da ƙarin madaidaicin kulawar zafin jiki da kuma mafi kyawun keɓewar thermal, wanda ya dace da haɓakar manyan yadudduka na epitaxial.
Barka da zuwa gidan yanar gizon mu don bayanin samfur da shawarwari.
Gidan yanar gizon mu: https://www.vet-china.com/
Lokacin aikawa: Yuli-30-2024