Aikace-aikacen yumbu na silicon carbide a cikin filin semiconductor

Abubuwan da aka fi so don daidaitattun sassan na'urorin photolithography

A cikin filin semiconductor,siliki carbide yumbuAna amfani da kayan galibi a cikin kayan aiki masu mahimmanci don masana'antar keɓaɓɓu, kamar silin carbide worktable, rails jagora,masu haskakawa, yumbu tsotsa shuck, makamai, niƙa fayafai, kayan aiki, da dai sauransu don lithography inji.

Silicon carbide yumbu sassadon semiconductor da kayan aikin gani

● Silicon carbide yumbu nika diski. Idan faifan niƙa an yi shi da ƙarfe na simintin ƙarfe ko ƙarfe na carbon, rayuwar sabis ɗinsa gajeru ce kuma ƙimar haɓakar zafin zafi mai girma. A lokacin sarrafa wafern siliki, musamman lokacin niƙa ko goge-goge, lalacewa da nakasar zafi na faifan niƙa yana da wahala a tabbatar da daidaito da daidaiton wafer siliki. Fayil ɗin niƙa da aka yi da yumbu na siliki carbide yana da babban tauri da ƙarancin lalacewa, kuma ƙimar haɓakar zafin jiki iri ɗaya ce da ta wafern siliki, don haka ana iya ƙasa kuma ana goge shi cikin babban sauri.
● Silicon carbide yumbu mai ɗorewa. Bugu da ƙari, lokacin da aka samar da wafern silicon, suna buƙatar yin maganin zafi mai zafi kuma ana ɗaukar su ta amfani da kayan aikin siliki na siliki. Suna da juriya da zafi kuma ba su da lahani. Za a iya amfani da carbon-kamar lu'u-lu'u (DLC) da sauran sutura a saman don haɓaka aiki, rage lalacewar wafer, da hana kamuwa da cuta daga yaduwa.
● Silicon carbide worktable. Ɗaukar tebur ɗin aiki a cikin injin lithography a matsayin misali, tebur ɗin aiki yana da alhakin kammala motsi mai ɗaukar hoto, yana buƙatar babban sauri, babban bugun jini, mataki shida-na 'yanci nano-matakin matsananci-daidaicin motsi. Misali, don injin lithography tare da ƙudurin 100nm, daidaitaccen mai rufi na 33nm, da faɗin layin 10nm, ana buƙatar daidaiton matsayi na aiki don isa 10nm, mashin-silicon wafer tare da matakai na lokaci guda da saurin dubawa shine 150nm / s. da 120nm/s bi da bi, kuma saurin binciken abin rufe fuska yana kusa da 500nm/s, kuma Ana buƙatar tebur ɗin aiki don samun daidaiton motsi da kwanciyar hankali sosai.

Tsarin tsari na tebur mai aiki da ƙaramin motsi (bangare sashi)

● Silicon carbide yumbu murabba'in madubi. Mabuɗin abubuwan da aka haɗa a cikin kayan haɗin haɗaɗɗen maɓalli kamar na'urorin lithography suna da sifofi masu sarƙaƙƙiya, maɗaukaki masu ƙima, da sassauƙa marasa nauyi, yana mai da wahalar shirya irin waɗannan abubuwan haɗin yumbura na silicon carbide. A halin yanzu, manyan masana'antun kera kayan aikin kewayawa na kasa da kasa, kamar ASML a Netherlands, NIKON da CANON a Japan, suna amfani da adadi mai yawa na kayan kamar gilashin microcrystalline da cordierite don shirya madubin murabba'i, mahimman abubuwan injin lithography, da amfani da silicon carbide. yumbu don shirya wasu manyan kayan aikin tsari tare da siffofi masu sauƙi. Duk da haka, masana daga Cibiyar Nazarin Kayan Aikin Gine-gine ta kasar Sin sun yi amfani da fasahar shirye-shirye na mallakar mallaka don cimma shirye-shiryen manyan girma, mai sarkakiya, mai nauyi mai nauyi, cikakkun madubin murabba'in yumbu na silicon carbide da sauran kayan aikin gani da kayan aikin na'urorin lithography.